Clean Air Module

) 111 59 71 80.4 41 59 59 Rc 3/8 (NPT 3/8) 521 3.5 (3.5) Note) This port is unavailable.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

) (67) (73) Pilot port threaded type 20 39 30 A A 32 2 x 5 MAX 14 (52.6) M5 x 0.8 Depth 5 Pilot port M5 x 0.8 Depth 5 Pilot port 44 36.5 23.5 1/8 1/8 9.5 (41) 4.5 (67) 501 Tube Extensions Series LVD How to Order Body class LVD 2 0 06 T Option Symbol 2 3 4 5 None With flow rate adjustment Nil 1 Orifice dia. 4 8 10 16 Body class 2 3 4 5 Note) Refer to Variations in the table below for option

AHC System Series MA

3.4 depth 12.5 Magnet for tool stand sensor Air pressure port 6 x M3 x 0.5 Applicable shaft diameter d D Mass (g) Model Air pressure port 6 x M5 x 0.8 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 MA3 0-YNM5 MA3 0-YNM5-R1 MA3 0-YNM5-R2 MA3 0-YNM5-R3 MA3 0-YNM5-R4 MA3 0-YNM5-R5 MA3 0-YNM5-S6 MA3 0-YNM5-R6 MA3 0-AM3 MA3 0-AM5 440 Electrical contact points: 12 10 11 35 14 AHC unit 15 520 20 24 41

IN20267

TYPE Class Instance Attribute Size Description Output 100 100 3 1 INT Position set-point Input 150 150 3 2 INT 2 bytes measured position, 2 bytes diagnostics Figure 16-1 Explicit Messaging 41 - IN20267 Installation and Handling 17. Air supply 17.1. Use clean air.

One-touch Fittings

9.7 12 10 15.5 31 33.1 13.3 10.9 8.6 4.5 11.4 1/4 KQ2W06-02GS1 14 10.4 9.7 12 10 15.5 34.4 34.9 13.3 10.9 8.6 4.5 28 3/8 KQ2W06-03GS1 17 10.4 9.7 12 10 15.5 35.7 35.8 13.3 10.9 8.6 4.5 47.4 D2 A L2 1/8 KQ2W08-01GS 10 13.2 13 10 16.4 32.4 35.9 14.2 10.9 10.9 4.5 12.2 1/8 *3 KQ2W08-01GQS 12 13.2 13 12 17.2 42.4 45.9 14.2 20.5 14.2 6 23.7 V H 8 1/4 KQ2W08-02GS 14 13.2 13 12 17.2 39.1 41

KT10

Gauge port 2) (Inlete, Outletr) Porting Configuration Pressure gauge Code r psig/bar unit MPa unit r e 0 6 10 20 40 60 Q No pressure gauge w q w q 600 psig/bar 3) 4.1 MPa 7 MPa 14 MPa 28 MPa 41 MPa 70 MPa qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Connections (Inletq, Outletw) 1000 psig/bar 3) Ports Code 2000 psig/bar 3) Connections 4P V 4PN 4000 psig/bar 3) e 4P 4PN 4 4B NPT 1/4 inch

Soft Start-up Valve

5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/4 128 59 53 74 53 Width across flats 36 52 AV5000-m06, 10-5 to 6G(Z)m-A Model [mm] Optional specifications With bracket With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-m02-1 to 4G(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 41

HAW

(Refer to the instruction manual for details on the cleaning.) 42 47 49.5 40 39.5 43 44.5 34.5 35.5 36 38 40 41.5 10 12000 14000 HAW75 15000 18000 20 45 48.5 52 45 39 40 42.5 41 43 45.5 34.5 35.5 36 HAW110 Conditions: Air pressure 0.7 MPa, Cooling water temperature 30C. Inlet air temperature 50C is saturated air.

Refrigerated Air Dryer For Use in North, Central and South America

Single-phase 115 VAC (60 Hz) * IDFB60 only IDFB Series CAT.ES30-21A B Refrigerated Air Dryer IDFB Series Applicable for the hightemperature environments Increased air flow capacity IDFB60 IDFB70 IDFB90 IDFB80 50 10 New Current model IDFB Series 49 IDFB Series 9 48 IDFB75E IDFB55E 47 IDFB22E IDFB37E 8 46 Max. 113F (45C) Max. 104F (40C) Ambient temperature Dew point [C] Dew point [F] 45 7 44 43 6 42 41

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

H J M N 10-/21-AR20-B 10-/21-AR25-B 10-/21-AR30-B 10-/21-AR40-B 10-/21-AR40-06-B 10-/21-AR50-B 10-/21-AR60-B 2 Note 2) 1/8, 1/4 28.5 1/8 20.5 40 11 67.4 44 26.5 65.5 M28 x 1 30 28.5 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 1/4, 3/8 0 27.5 1/8 21.3 53 9.8 71.9 44 28 64.5 M32 x 1.5 30 27.5 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41

Series 10-, 21- AW-B Filter Regulator

Optional specifications Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20-B 10-/21-AW30-B 10-/21-AW40-B 10-/21-AW40-06-B 10-/21-AW60-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5 30.2 31.1 35.5 37 2.3 2.3 2.3 2.3 3.2 55 53 70 70 90 15.4 8 10.5 10.5 13 5.4 6.5 8.5 8.5 11 43.9 45.8 54 55.5 65.8 34 40 54 54 66 30 41

With Factory Installed

D.8 AR3001 1/4 3/8 53 127.5 35 53 29.5 41 2.3 40 46 6.5 8 53 52.5 36

Speed Controller with One-touch Fittings

AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 D2 D3 D4 L1 L2 L3 L5 L6 L7 L8 M1 MIN. 18.4 21 21.7 22.7 25.4 26.5 28.2 29.5 33.6 34.4 36 37.1 44.1 45.1 3.2 5 6 25.4 36 37 39.5 40.7 42.5 53.2 57.2 59 65 70.8 76 76.9 81.3 3.4 4.4 5.1 6.1 5.2 6.3 6.7 8 7.4 8.2 9.8 10.9 10.3 11.3 7.9 11.1 11.8 12.8 12.3 13.4 16.3 17.6 19.3 20.1 21.7 22.8 22.7 23.7 20.9 23.8 24.5 25.5 28.9 30 33.2 34.5 38.6 39.4 41

76

F (C) Correction factor 1.41 41 to 86 (5 to 30) Air ow capacity scfm (m3/min) (ANR) 50 Hz 565 (16) 709.8 (20.1) 882.8 (25) 50 (10) 1 1.21 95 (35) 60 Hz 663.8 (18.8) 836.9 (23.7) 953.4 (27) 59 (15) 1.4 1 104 (40) 61 (16) or more 1.5 0.92 113 (45) The maximum coefficient value is 1.5 due to the drainage separation performance. 0.75 122 (50) 0.63 131 (55) Data D: Inlet Air Pressure 0.53 140

60

61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43 50 4.5 4.5 5.5 5.5 6.5 14.8 19 24 26 31 9 9 10 10 12 VHS20 VHS30 VHS40 VHS40-06 VHS50 1/4, 3/8, 1/2 3/4 3/4, 1 Options specifications Model Built-in silencer With bracket N Q R S T U V W X Y AA BB 5.4 6.5 8.5 8.5 11 8.4 10 19 19 27.5 27 36.5 43.5 43.5 49.5 40 53 70 70 90 75.4 90.9 119.4 123.4 152.3 31.3 40 53 55 71 25.3 33 44 46 60 53.3 30 41

Coolant Valve

(mm) Model Conversion Cv 1.2 1.3 1.5 3.9 5.0 4.5 5.8 7.0 11 9.1 15 17 23 17 23 26 34 30 40 41 62 41 66 49 70 73 100 Threaded Note) Flange Kv VNC1-6A VNC1-8A VNC1-10A VNC24-10A VNC2-10A VNC24-15A VNC2-15A VNC34-20A VNC3-20A VNC44-25A VNC4-25A VNC54-32A VNC5-32A VNC54-32F VNC5-32F VNC64-40A VNC6-40A VNC64-40F VNC6-40F VNC74-50A VNC7-50A VNC74-50F VNC7-50F 1 8 1 4 1.1 1.1 1.3 3.4 4.3 3.9 5.0

3

2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting a b d e f g h i j VXS23 1/4, 3/8 21 57 28.5 87.5 35 10.5 22 40 35 10 M5 56 75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41

XLAQ/XLDQ

assembly (Maintenance parts) (Material: Stainless steel 304 plus sealant) S valve (Material: Stainless steel 304) i Valve side exhaust Refer to page 478 for the maintenance parts. 473 XLDQ Series Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet A Width across flats 10 3 34.5 15 11 6 41 18 14.5 10 51 22 20.5 N S U F GN GS J K ZP3 T 10 13 16 B B5 15 59 40.5 10 20 66.5 48 JB K Dimensions Per Vacuum Inlet: One-touch Fitting 1.82 Bellows Type with Ribs Model D E F Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

ML2B

For details, refer to page 10-20-41. Reed switch D-X 20Data 10-13-17