SET To measuring mode 13 Series PSE Function Details A Display calibration function B Copy function This function eliminates slight differences in the output values of all 4 channels and allows uniformity in the numbers displayed. Displayed values of the pressure sensors can be adjusted to within 5%.
JS20, 32, 40, 63 M M U U D J F H B E G P A Rod end nut (mm) 30 Description H B C D d: Nominal thread size d Nut for JS10 M4 x 0.7 3.2 7 8.1 6.8 Nut for JS16 M5 x 0.8 4 8 9.2 7.8 Nut for JS20 M8 x 1.25 5 13 15 12.5 D C Nut for JS32 M10 x 1.25 6 17 19.6 16.5 Nut for JS40 M14 x 1.5 8 22 25.4 21 H B Nut for JS63 M18 x 1.5 11 27 31.2 26 (mm) Max. tension and compression N Allowable eccentricity
useries Compact Electric ctuators .Compact, Low Profile .Rigid Linear Guides .DC Stepper Motor (Optional AC Seruo Motor) Features and Benefits .pa9e 4 & 5 Product Variations .pa9e 6 & 7 Specifications/Construction/Parts List .page B Selection Chart & Duty Ratio .page 9 Kinetic Moment Allowance &Table Deflection ,.page 10 Criteria of Accelerating Speed . .page 11 How To Order. .pages 12 & 13
A External yoke B Piston side yoke A Piston side yoke B Magnet A Aluminum alloy Aluminum alloy Stainless steel Aluminum alloy Aluminum alloy Brass Rolled steel plate Rolled steel plate Rolled steel plate Rolled steel plate Rare earth magnet Rare earth magnet Stainless steel Aluminum alloy Urethane rubber Carbon steel 1 2 1 2 2 2 4 2 4 2 5 5 1 2 2 4 2 2 2 2 2 2 2 2 2 2 4 6 7 8 9 10 11 12 13
Nickel plated Clear anodized 1 Carbon steel Body Aluminum alloy Hexagon socket head cap screw B 13 Nickel plated Hard anodized 2 Tube Hexagon socket head cap screw C Carbon steel Aluminum alloy 14 Clear anodized 3 Rod cover Magnet Magnet Aluminum alloy 15 Chromated 4 Piston Plug Carbon steel Aluminum alloy 16 Electroless nickel plated 5 Piston rod Element Resin Carbon steel 17 Anodized 6
M L K J H E t W1 W2 M 14 20 25 29 37 49 58 69 89 100 117 136 14.5 20.5 24.5 30.5 36.5 48.5 6 7 7 9 9 10 11 16 21 24 32 41 10 17 22.5 24.5 27 30 16 21 26 32 41 50 17 24 28 36 43 55 8 8 8 8 13 13 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3P1A LQ3P2A LQ3P3A LQ3P4A LQ3P5A LQ3P6A 1/4 (E) (E) L Panel Aperture (K) Straight Union : LQ3U (mm) Inch Size H Model Tubing O.D.
SY7000 With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) Type of actuation Without light/surge voltage suppressor 12 or less Type of actuation Without light/surge voltage suppressor 31 or less Type R, U Type S, Z 12 or less 15 or less 2 position single 10 or less 10 or less 13
Orifice size mm Series Symbol 1 2 2 3 4 1 1.6 2 3 4 200 1 1.8 300 13 Compact Direct Operated Series VDW200/300 3 Port Solenoid Valve for Water and Air Standard Specifications Valve construction Direct operated poppet Fluid Note 2) Water (except waste water or agricultural water), Air, Low vacuum Valve specifications Coil specifications Burst pressure MPa (psi) 2.0 (290) Ambient temperature
FKM (Standard seal material) Pilot torque Nm 0.1 % 0.15 % 0.35 % 0.5 % Handle revolutions 5 7 10 13 Service life (million cycles) 10 XMH 0.31 (0.35) 0.57 1.35 (1.71) 2.02 Weight kg Note 2) XYH 0.62 1.37 2.42 Note 1) Conductance is the value for the molecular flow of an elbow having the same dimensions. Note 2) Figures in ( ) indicates the weight of CF, conflate fittings.
Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 42 52 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 56 65 Two mounting screws (for mounting
suction flow rate l/min (ANR) Model S M H ZMA05H 0.5 12 18 ZMA07H 0.7 24 23 0.5MPa ZMA10H 1.0 46 36 2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32 ZMA13M 1.3 70 36 ZMA13S 1.3 75 38 1 stage diffuser 0.45MPa ZMA15S 1.5 90 45 Series ZMA How to Order ZMA 07 1 H K 5 T14 C Nozzle diameter Switch lead wires (connector type) 0.5mm 0.7mm 1.0mm 1.3mm 1.5mm 05 07 10 13
Refer to CAT.E824A "Pressure Switch" Series ZR How to Order Ejector Systems ZR1 20 S 25 M Z 1 5 K1 D1 Ejector unit nozzle size 1.0mm 10 Digital vacuum switch specifications (D1, D2, D3) 1.3mm 13 Symbol Lead wire length 1.5mm 15 Applicable switch Output specifications 25 (L) Lead wire length 0.6 (3.0) m 1.8mm NPN output 18 D1 D2 26 (L) Lead wire length 0.6 (3.0) m Analog output 2.0mm 20 65
25MM MXS CLEAN ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, I5, 25MM MXS CLEAN ROOM, 8.92872 lb, ModelABEAuto switch operation range StrokeStroke 10203040507510012515010203040507510012515013-MXS252337.527.517.517.520.536.552.585.5100.535.5(33)25.5(23)15.5(13)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8
)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8
)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8
)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8
)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8
Lateral vacuum inlet with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, Lateral Vacuum Inlet, w/buffer, VACUUM PAD, ZP, ZP2, ZP3, M30, 13 lb
Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, Vertical Vacuum Inlet, w/buffer, VACUUM PAD, ZP, ZP2, ZP3, M30, 13 lb
Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, Vertical Vacuum Inlet, w/buffer, VACUUM PAD, ZP, ZP2, ZP3, M30, 13 lb