Vacuum Filter AFJ Series

q r r w w (y) e (y) t e t Component Parts No.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

When the inlet pressure is shut off and released, the check valve w opens and the pressure in the diaphragm chamber q is released to the inlet side (Figure 2). This lowers the pressure in the diaphragm chamber q and the force generated by the pressure regulator spring e pushes down the diaphragm.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

When the inlet pressure is shut off and released, the check valve w opens and the pressure in the diaphragm chamber q is released to the inlet side (Figure 2). This lowers the pressure in the diaphragm chamber q and the force generated by the pressure regulator spring e pushes down the diaphragm.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

When the inlet pressure is shut off and released, the check valve w opens and the pressure in the diaphragm chamber q is released to the inlet side (Figure 2). This lowers the pressure in the diaphragm chamber q and the force generated by the pressure regulator spring e pushes down the diaphragm.

1.63

position is changed, go back to step q.

MHC2

9 MHC6-PS Seal kit MHCA2-6 (Short body type) Double acting/With fingers closed Single acting Double acting/With fingers open o i e q t !1 !6 w !0 r !4 u !5 !7 y !3 !2 Component Parts Material Note Material Note No. Description No. Description Hard anodized Aluminium alloy High carbon chromium bearing steel Body Needle roller q !

10

3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.

3-Position Rotary Table

Thus, the total air consumption Q of the rotary table and tubing is obtained as shown below.

MHC2

9 MHC6-PS Seal kit MHCA2-6 (Short body type) Double acting/With fingers closed Single acting Double acting/With fingers open o i e q t !1 !6 w !0 r !4 u !5 !7 y !3 !2 Component Parts Note Material Material Note No. Description No. Description Hard anodized Aluminium alloy High carbon chromium bearing steel Body Needle roller q !

Series IDG

With drain guide Port size A B C D E F G H K L M N Model P 255 276 Q 241 262 IDG60M, 60HM IDG75M, 75HM, 100M, 100HM 191 186 101 80 365 204 202 104 90 368 241 262 16 19 129 147 7 9 95 108 50 55 22 25 3/8, 1/2 1/2 27 Membrane Air Dryer Series IDG Dimensions (mm) 1in = 25.4mm IDG60LM, 75LM, 100LM IDG60SM, 75SM, 100SM Port size 3/8, 1/2 (250) 91 Purge air for dew point indicator 50 77 84 13

MQQ

Y I 4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5

MRQ

Make sure that the moment is within the value shown in the table below. 0.3 0.2 0.3 0.2 0.7 1 0.5 0.4 Load rate () How to read graph q Decide on the direction in which the cylinder output will be used (the extension or the retraction side).

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

ISG

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

VQZ100/200/300

Note 3) Weight without sub-plate 2.10-6 VQZ100/200/300 Body Ported Construction VQZ100 Poppet e w q Component Parts SY Material No. q Description Notes N.C. Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C.

Series AS-FM/AS-M/ASD-FM

Max. 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 12.7 12.3 7 25 25.8 22.2 9.6 28.6 M5 x 0.8 8

Series VG342 is a 3 port pilot poppet solenoid valve and can be used as a selector or divider valve (external pilot). Actuation is changeable between N.C., N.O., or external pilot types. VG342 is possible to use in vacuum or under low pressures. No lubrication is required. 3 port pilot operated poppet valve , Material restriction type , Low power consumption: 4.8W DC (standard type); 2W

Series VG342 is a 3 port pilot poppet solenoid valve and can be used as a selector or divider valve (external pilot). Actuation is changeable between N.C., N.O., or external pilot types. VG342 is possible to use in vacuum or under low pressures. No lubrication is required. 3 port pilot operated poppet valve , Material restriction type , Low power consumption: 4.8W DC (standard type); 2W

Series VG342 is a 3 port pilot poppet solenoid valve and can be used as a selector or divider valve (external pilot). Actuation is changeable between N.C., N.O., or external pilot types. VG342 is possible to use in vacuum or under low pressures. No lubrication is required. 3 port pilot operated poppet valve , Material restriction type , Low power consumption: 4.8W DC (standard type); 2W