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General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / *3) 1 1.5 *3)1 1 () 3 - 1 1-1. 1)0.5MPa L = 20mm MHZ2-10* MHZ2-16* MHZ2-20* MHZ2-25* MHZ2-32* MHZ2-40* mm 10 16 20 25 32 40 D 0.20.7 0.10.7 MPa S 0.350.7 0.250.7 C oC -1060 mm 0.01 0.02 c.p.m. 180 60 D 11

Model Thread size Tightening torque SX3000 M2 0.17 Nm SX5000 M3 0.8 Nm SX7000 M4 1.4 Nm 11 SX3000-OMM0002-B -12-SX3000-OMM0002-B -13SX3000-OMM0002-B TROUBLESHOOTING Should any trouble be found during operation, trace the source of the trouble in the following order and take corrective action.

Warranty period and guaranteed range 10 6.Parts replacement procedure 11 1 XM-OMP0001-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

Repeatability Maximum operating frequency 11-: Fluorine grease 22-: Lithium soap based grease 11-/22-: Class 3 Grease Cleanliness class (ISO class) 932

Repeatability Maximum operating frequency 11-: Fluorine grease 22-: Lithium soap based grease 11-/22-: Class 3 Grease Cleanliness class (ISO class) 938

Deceleration Controller 11 - Doc.no.DOC1018150 Adjustment procedure *1 These procedures are for making adjustment by moving the cylinder piston on the L end at its initial position to the R end by using the deceleration controller (double-end specifications).

EX500-DX B Install the product using 2 M5 screws x 20 mm minimum with a head 9 to 11. NOTE Refer to the product catalog or SMC website (URL http://www.smcworld.com) to obtain more detailed information about product specifications. 1 3 5 7 9 11 13 15 The direct current power supply to combine should be UL1310 Class 2 power supply when conformity to UL is necessary.

(hysteresis or window comparator mode). -44No.PF-OMW0004-B Model PF3W704 PF3W720 PF3W740 2-screen display (main screen, sub screen) Main screen: 4-digit, 7-segment, 2-colour; red/green Sub screen: 9-digit, 11-segment (5th digit is 7-segment only), White Display method Display updating frequency 5 times/sec.

Dynamic viscosity [m2/s] Viscosity [Pas] Density [kg/m3] Formulas below can be used for common units 1cP = 1mPas = 10-3Pas 1cSt = 1mm2/s = 10-6m2/s 13 Working Principle 1. When air is supplied, it passes through the switching valve and enters drive chamber B. 2.

D-A90A93A96A90VA93VA96V 3. <> () () 6080 D-M9A(V) M3M3 0.6 0.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1) (M2.5) 2) M3 BM5 12 - 13 - 3. 14 - 1) 2)1 (30) * *(NC=b )(D-M9E(V)) 15 - / 16 - 3.

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) A 9 13 11 13.5 B 6 8.5 11.5 14.5 A 9.5 13.5 11.5 14 B 6.5 9 12 15 A 6.5 10.5 8.5 11 B 3.5 6 9 12 C 8 12 10 12.5 D 5 7.5 10.5 13.5 C 12 16 14 16.5 D 9 11.5 14.5 17.5 C 11 15 13 15.5 D 8 10.5 13.5 16.5 32

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) D 8 10.5 13.5 16.5 C 11 15 13 15.5 D 9 11.5 14.5 17.5 C 12 16 14 16.5 D 5 7.5 10.5 13.5 C 8 12 10 12.5 B 3.5 6 9 12 A 6.5 10.5 8.5 11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32

Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions. Design Piping Caution Caution 1. Not suitable for use as a selector valve or a divider valve. The valve can malfunction due to air leakage. 2. Not suitable for vaccum applications. The valve can malfunction due to air leakage. 3. Do not supply air pressure from other ports than 1(P) port.

Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions. Design Piping Caution Caution 1. Not suitable for use as a selector valve or a divider valve. The valve can malfunction due to air leakage. 2. Not suitable for vaccum applications. The valve can malfunction due to air leakage. 3. Do not supply air pressure from other ports than 1(P) port.

Mounting frame (Option: Refer to page 11, Accessories.) 12 Air Cooled Aftercooler Series HAA Flow Characteristics Air pressure 0.7 MPa (Example) To get pressure drop at 0.3 MPa of air pressure, 2000 l/min (ANR) of air flow, and model HAA22, use P = 0.0007 MPa at 0.7 MPa from the table and convert P1 to 0.3 MPa.