ZSE3/ISE3

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSE3 Vacuum Q CE marked products Note) Only available with output specifications 21 and 23.

NCX2 seies

Contact Drotection bg)dlnternal circuit cD.P11 Oul Blue (black) (+)oLn Browll (rcd) C)Out Blue (brack) Solid State Wiring Method 3 vi irc q'51rn U/hen potte| solrce lor siu bh and load s commom) --19toul_Jn.a1 .

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Be sure to loosen the locknut before adjusting the knob by hand. r After adjustment, tighten lock screw for tamper proof operation, Fluid-Air/Supply 1 05psig (7 kgt / cm2l NSR 1110 to-32^lrn {l',151 NSR 3110 NSR 4110 %tlPf 75 75 g q 6 0 il IJ I 6 a 60 d 5 F "ff 45 * 3 0 d 30 1 5 0 o o 7 1 4 2 1 2 A 3 FWSSM P r e ssur e C -lwr a ct eri st i e s Supply pressure 1OOpsig (7kgt/cm2l, Secondary

Electro-Pneumatic Proportional Valve

1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40: 0.12 10% or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P V Q

Precision Clean Regulator

1 ARP 4 Bonnet PPS 5 Knob PBT IR-A i o Electroless nickel plated 6 Set nut ZDC 7 Valve spring Stainless steel 316 IR 8 Main valve Ceramics !

VX21/22/23

8 F 24 VDC 5 G DIN terminal 24 VDC With surge voltage suppressor A B D E H J L M 4 H 100 VAC Size 2 2 1/4 N.C. 7 J 110 VAC Aluminum 4 5 N.O. 3/8 K 200 VAC 7 L 230 VAC 4 8 7 Resin (With bracket) M Conduit terminal 24 VDC With surge voltage suppressor 4 N 100 VAC 10 7 P 110 VAC A B C D E F G H J K L M N 5 Q 200 VAC Size 3 3 N.C. 8 1/4 R 230 VAC 10 (N.C. only) 6 N.O.

Thermo-chiller Series HRS Compact Type (Except HRS050)

Note 4) q Ambient temperature: 25C, w Circulating fluid temperature: 20C, e Rated circulating fluid flow rate, r Circulating fluid: Clear water, t Facility water temperature: 25C Note 5) Use a 15% ethylene glycol aqueous solution if operating in a place where the circulating fluid temperature is 10C or less.

Thermo-chiller Basic Type HRSE Series

Note 6) Required ow rate for cooling capacity or maintaining the temperature stability. The specication of the cooling capacity and the temperature stability may not be satised if the ow rate is lower than the rated ow. Note 7) Purchase an earth leakage breaker with current sensitivity of 15 mA or 30 mA/power supply 100 VAC separately.

VK300

Note Platinum silver Black Black 1 Description Cover Body 2 3 Resin Resin End cover Spool valve assembly 5 Stainless steel Return spring 4 Aluminum, NBR Black 6 Resin Molded coil 1410 A

VK3000

Description Note Platinum silver Black Black Material Aluminum die-casted 1 2 3 4 5 6 Cover Body Resin Resin End cover Spool valve assembly Stainless steel Return spring Resin Molded coil Aluminum, NBR Black 1420 A

Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control VNA Series VNA 2 1 1 A A 1 0 15A 1 15A T Bracket (Valve size: 1/2/3/4.) Nil B Note) None With bracket Manual override Rated voltage 1 1 1 2 N.C. N.O. C.O. Port size Rc ø15 ø10 ø2

Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 Nil F N T NBR seals FKM seals EPR seals A B C None With bracket Nil B Note) Refer to Table (1) for availability. 2 0 1 A VNA Air operated 15A 2 to 4 External pilot solenoid 2 VNA 1 1 A 15A 1 T CE-compliant Nil Q CE-compliant Note) CE-compliant: For D or DZ only Manual override Rated voltage Valve size Valve type Port size 110

Process Valve: 2 Port Valve For Flow Control VNB Series

Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 Threaded port only Thread type Nil F N T Rc G NPT NPTF 2 to 4 VNB 15A Air operated 2 0 1 A External pilot solenoid 2 VNB 15A 1 1 1 A T CE-compliant Nil Q CE-compliant Valve type Port size Valve size Rated voltage Electrical entry: D or DZ only Symbol Manual override Port size Rc 1 2 3 Note 2) 100 VAC 50/60 Hz 200 VAC 50/60 Hz

VQC4000

How to Order Sub-plates [Option] VQ4000 PW 02 CE-compliant Porting specications Nil Q CE-compliant Nil Side ported B Bottom ported Note) Thread type Port size Replacement of pilot valve assembly (Voltage) Refer to page 640 for pilot valve assembly part numbers.

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

3 Port Solenoid Valve Body Ported Series VQZ100/200/300 Single Unit [Option] Plug Lead Unit VQZ100 / How to Order Valve Series VQZ 1 1 5 5 M C6 1 PR CE compliant CE marked 1 VQZ100 body width 10 mm Nil Q Note) For CE compliant models, DC-type only. Type of actuation N.C.

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Note) For applicable one-touch fitting and silencer models for this valve series, refer to page 978. Caution Use standard (DC) specification for continuous duty. 913

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 ø0.5 Part no. Symbol Applicable tubing O.D. 07 ø0.7 KJS23-M5 ø3.2 (Straight) 1 Solenoid valve combination (Refer to Table (1).) KJS04-

Pilot valve symbol 1 2 3 4 5 6 100 AC 200 AC 110 AC 220 AC 24 DC 12 DC q w e r t y u i Nil Y Nil Y Nil Nil Nil Nil K1 K1 J1 J1 Q1 Q2 N1 N2 Combinations (1) to (8) in the above table are the only possible options. 850

Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)