Display Pressure: 1.0MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover Removable, Wrench Tighten

Display Pressure: 1.5MPa, Connection Thread: R 1/4, M5 Female, Attachment: Clear Cover Removable, Wrench Tighten

Display Pressure: 0.2MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover Removable, Wrench Tighten

Display Pressure: 1.0MPa, Connection Thread: R 1/4, Attachment: Clear Cover Removable, Wrench Tighten

Display Pressure: 1.0MPa, Connection Thread: R 1/4, Attachment: Clear Cover w/Protrusion, is Removable

Display Pressure: 0.2MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover w/Protrusion, is Removable

Display Pressure: 1.5MPa, Connection Thread: R 1/4, M5 Female, Attachment: Clear Cover w/Protrusion, is Removable

Display Pressure: 1.0MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover w/Protrusion, is Removable

CA2

7 !8 !

MY1

4 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 7.15 x 3.75 x 1.7 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 8.3 x 4.5 x 1.9 C-7 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 Note) Two types of dust seal band are available.

Electric Actuators

(5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

CQS

Foot or Flange style: Body mounting bolt Double clevis style: Clevis pin, type C snap ring for axis, Body mounting bolt CQS-L025 7-4-37 38 Weight/Without Auto Switch (g) Made to Order Specifications (For details, refer to page 7-10-1.)

Electric Actuator with Integrated Guide

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Aluminum High Vacuum Angle Valve

Quantity Without auto switch Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 7-1 i 7-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 7-1 1.3 x 10-9 (FKM) r i 7-2 XLQ Note) Values at normal temperature, excluding gas permeation.

MY1

7 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 5.1 x 3 x 1.05 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 MYM40-15AA5905 GMY40 RCS-12 TMY-40 8.3 x 4.5 x 1.9 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 2 2 2 2 2 4 Scraper Piston seal

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

New

M Conduit terminal 24 VDC With surge voltage suppressor 1/8 3.2 N 100 VAC 1/4 Stainless 5/32 4 steel P 110 VAC 7/32 5.6 Q 200 VAC W 1/8 3.2 X Y 5/32 4 3/8 R 230 VAC 7/32 5.6 S Conduit 24 VDC With surge voltage suppressor C E F 1/8 1/8 3.2 VX2 T 100 VAC 1/8 3.2 U 110 VAC 1/4 5/32 4 V 200 VAC G C37 7/32 5.6 W 230 VAC J 1/8 3.2 K L 3/8 5/32 4 Faston terminal Single 7/32 5.6 3 Size 3 Unit Q

SMC Basic Pneumatics

C"=l C'=l C;l C,=l C;l C;l C"=t Flg. 7.28.1 In Series circuit, all devices having a C" of 1 and the resulting impact on the circuit,s ovsrall C, \i_ --+ C,-=t c,=1 .4 C,=1.4 C,=1.73 c"=1 .73 C"=1.73 C"=2 C"=2 C,=2 Q,=2 =.x><+<_= _><_><_# -..>---.> G".v"=1'0 C,*=1.0 C"-=1.0 c,=1 C,=3 c,=4 C-"=r C*"=0.9g C"*=o.06 C,"r.=0.84 C",l/|=0.89 C*=0.82 Flg. 7.28.2 Orifices in series connection and resulting

%silltr

C"=l C'=l C;l C,=l C;l C;l C"=t Flg. 7.28.1 In Series circuit, all devices having a C" of 1 and the resulting impact on the circuit,s ovsrall C, \i_ --+ C,-=t c,=1 .4 C,=1.4 C,=1.73 c"=1 .73 C"=1.73 C"=2 C"=2 C,=2 Q,=2 =.x><+<_= _><_><_# -..>---.> G".v"=1'0 C,*=1.0 C"-=1.0 c,=1 C,=3 c,=4 C-"=r C*"=0.9g C"*=o.06 C,"r.=0.84 C",l/|=0.89 C*=0.82 Flg. 7.28.2 Orifices in series connection and resulting

C85

7 !8 !