ITV

0 25 50 75 100 Input signal [% F.S.]

CRQ2

M ab BA BA BB D (AU)Max.

Series MXP Precision Air Slide Table

Wiring Electrical entry Auto switch type Electrical entry from inside 3-wire D-F9P B Solid state switch D-F9 In-line 2-wire D-F9B 3-wire D-F9NW,D-F9PW In-line 2 color indication solid state switch D-F9 W 2-wire D-F9BW 3-wire D-F9NWV,D-F9PWV Perpendicular B 2-wire D-F9BWV Install auto switch as shown in figure below.

VZ1000

connector (Station n)(Station 1) VQ7 (mm) EVS 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 VFN U D VV4Z1-25FUStation -00C (2 to 10 stations) VV4Z1-25F Station B-00C (2 to 10 stations) VV4Z1-25F Station -00C (11 to 20 stations) U D D side

Shock Absorbers and Rate Controls

{l$odell D T G H JA t8 JH HPt | 0tt-l 8.5 r-t2 ut{F .31 .88 5.45 .88 .19 HPt t0tr-2 0-) l-12 tJlt t . J l .88 5.45 .88 .81 1.30 t.r3 l 0 HPt l0tf-3 8.5 l.l2 uilt .31 .88 5.45 .88 .81 1.30 .19 A[ d]mer Usable Adjustment Settings Sizing Graph 2eo 260 ?l 240 cff: E 180 160 o 140 q 120 i 1oo 240 260 ^ 244 E o d F{ o. E 20o > 180 o F 100 ?

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

] 100 L/min type 100 L/min type Error display function When an error or abnormality arises, the location and contents are displayed.

Manifold Specifications

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

V

Max Vacuum Pressure* 0.5 0.7 1.0 1.3 mmHg (Torr) 5 12 24 40 Max Suction S Type 660 (100) 8 20 34 70 Flow Rate L Type 360 (400) / / / / L Type 400 (400) 10 20 34 68 Air Consumption S Type 660 (100) 10 20 34 68 L Type 360 (400) H O W T O O R D E R ZH V A C U U M E J E C T O R *Vacuum pressure is quoted as mmHg below atmospheric (Torr Absolute) 1 Torr = 0.0197PSI D ZH D I M E N S I O N S M

LEF-OM002xx

The INP output signal is turned on from 100[mm] 0.5[mm]=99.5[mm] Table Position[mm] c Area2[mm] j Area1[mm] j b Speed[mm/s] 100 0 AREA Output signal ON OFF INP Output conodition INP Output signal ON In pos[mm] k OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] 27 - Example of step data input (2) Positioning operation Relative a b c d e f g h i j k Step data No.

LVQ

D (Max.

CL

Additional weight with air cushion 0.01 0.01 0.02 0.02 Additional weight for long stroke 0.01 0.01 0.02 0.03 No. of auto switches mounted Auto switch model Calculation: (Example) CLG1LA20-100 (Foot, 20, 100 st) Basic weight Additional weight Air cylinder stroke Additional weight of air cushion 0.72 + 0.05 x 100/50 + 0.01 = 0.83 kg 1 2 D-B5/B64 D-C7/C80 D-H7 D-G5/K5 0.72 0.05/50 st 100

Wedge Cam Operation Provides

Electrical entry: Vertical type Electrical entry: Lateral type L L Space L 1mm or more S O Unit: mm In-line entry Perpendicular entry Electrical entry Auto switch type Finger position Air gripper D-F9BV D-F9B D-F9NV D-F9N D-F9BA 2 7 Open MHK2-12l 7 3 12 Closed Open 2 6 MHK2-16l Closed 8 1 1 3 13 Open 1 MHK2-20l Closed 5 1 11 Open MHK2-25l 6 Closed 2 12 Open 3 MHKL2-12l Closed Open

VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

For low pressure For positive pressure Rated pressure range 0 to 101 kPa 100 kPa to 100 kPa 0 to 100 kPa 0 to 1 MPa 0 to 500 kPa Analog output [mA] 5 20 Analog output [V] For low differential pressure Rated pressure range 0 to 2 kPa C 0 D 2 kPa F 0.2 kPa Range 1 0.6 4 2.4 A C E F B D A C E F B D Pressure Differential pressure Pressure Differential pressure 848 Pressure Sensor Controller

Industrial Filters

65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 500 24 260 103 560 400 270 710 1045 1445 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 750 24 295 137 560 400 270 710 1305 1705 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 1000 24 340 171 560 400 270 710 1570 1970 100 150 FGAC FGAS 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B)

LEH_C

100% 10 , 16 20 , 25 540 40% 100% 2150 80% 100% 1120 60% 100% 10L , 16L 510 50% 100% 3150 70% 100% 20L , 25L 520 40% 100% 2130 50% 100% [mm/sec] () 2130 50% 100% 520 40% 100% [mm/sec] () 4150 50% 100% 540 40% 100% 3150 80% 100% 1130 60% 100% 510 40% 100% 22 - 150% LEHZJ 1) (SVON ) 2)CN1 EMG() a)SVRE SETONON SVRE OFF SETON ON b) SVREON SVREON c) SVREON

Air cylinder (Series compatible with secondary batteries)

Bore size(mm) Auto swich model 40 50 63 80 100 D-A9-900 D-M9-900/M9V-900 D-M9W-900/M9WV-900 90-BA7-040 90-BA7-040 90-BA7-063 90-BA7-080 90-BA7-080 Table 5 Operating Range Bore size(mm) Auto swich model 40 50 63 80 100 D-A9-900 7.5 8.5 9.5 9.5 10.5 D-M9-900/M9V-900 D-M9W-900/M9WV-900 4.5 5 5.5 5 6 Values which include hysteresis are for guideline purposes only, they are

2/3 Port Valve

Nitrogen gas(N2) Freon 11, 113, 114, Turbine oil(40 to 100 cst), Hydraulic fluid Valve size 5 to 7 Argon, Helium, Turbine oil, Hydraulic fluid (99C) CO2 (0.7 MPa max.) Applicable fluids TL D DIN connector DIN connector with indicator light DL 6, 7, 9.

Adsorption Plate

Adsorption surface size 9 SP1130 SP1230 50 x 50 80 110 20 50 65 95 70 5 100 x 100 130 160 20 100 115 145 95 A D Rc 1/8 (Suction port) C F F B D G E E 8 x 5.5 drill Element fixing nut N pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

SMC Wireless System EtherNet/IP ® compatible

/ED5 -97No.EX-OMU0028-D EX600-ED4/ED5-2 -98No.EX-OMU0028-D EX600-ED4/ED5-3 -99No.EX-OMU0028-D EX600-EU1 EX600-EU1-2 -100No.EX-OMU0028-D EX600-EU1-3 -101No.EX-OMU0028-D Accessories -102No.EX-OMU0028-D 1.