IDX-OM-W089

Specification for OptionK 11 1 Safety instructions . 11 1 11 2 Specification . 11 1 Chapter 12 Specification for Option_L 12 1 Safety instructions . 12 1 12 2 Specification . 12 1 12 3 Installation . 12 2 12 4 Maintenance . 12 2 Chapter 13 Specification for Option_R 13 1 Safety instructions . 13 1 13 2 Specifications of the GFCI . 13 2 13 3 How to connect the power supply . 13 2

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

area (mm2) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) 08, 09 06, 07 Number of needle rotations Number of needle rotations 15-9-44 3 Speed

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type (400 V type only) (Option S only) (UL Standards) (Option S only) RoHS HRSH090 Series How to Order A HRSH090 20 Cooling capacity 090 9.5 kW Option Nil None B Note 1) With earth leakage breaker J With automatic uid ll function M Applicable to deionized water piping S Note 2) Conforming to CE/UL standards Cooling method A Air-cooled refrigeration

KF

O.D. 6 KFE06-02 KFE08U-03 KFE08N-03 KFE10U-03 KFE10N-03 KFE12U-03 KFE12N-03 4 5 6 6.5 7.5 8 9 1 4 41 49 50 63 62 93 91 37.5 17 12 17 44.2 16 15.2 3 4 5 5.5 6.5 7 8 M10 x 1 11 6 11 17 21 30 35 45 13 8 M12 x 1 3 8 17 46.2 39.5 16.2 19 14 19 3 8 M15 x 1 16 10 17 48.8 41.5 18.8 19 17 22 Connection thread Applicable tubing Mounting plate thickness 4 mm or less 18 12 3 8 17 51.3 44.5 19.3 22 19

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

BP1000

Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4

XG_-OMV0028

9 27 15 12 14 B 11 27 13 12 9 2A 2 2B 2 12 18 2 7 - 3-4 2B2C A 16 17 12 18 2 8 9 13 B 11 9 10 17 A 16 12 18 2 2 O 3 19 12 27 12 14 27 15 12 12 3-5 2C2B OPENCLOSE 9 B 11 10 A 16 18 2 2 12B 11 9 27 13 12 14 27 15 9 B 11 12 13 2 19 3-6 2B 2A 2 18 12 9 2 21 23 3-7 20 22 24 8 8 - 4. 4-1.

ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 CP96 Series

320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Intermediate strokes are available. *1 Please consult with SMC for longer strokes.

Process Pump

Dynamic viscosity [m2/s] Viscosity [Pas] Density [kg/m3] Formulas below can be used for common units 1cP = 1mPas = 10-3Pas 1cSt = 1mm2/s = 10-6m2/s 14 Working Principle 1. When air is supplied to P1 port, it enters drive chamber A. 2. Diaphragm A moves to the left, and at the same time diaphragm B also moves to the left. 3.

SJ1000/2000/3000 Series

Detachment To detach a socket from a connector, pull out the lead wire while pressing the socket s hook with a stick having a thin tip (approx. 1 mm). If the socket is used again, spread the hook outward.

VQ1000/2000 Series (PILOT VALVE : V100)

No.VQ1000V-OMM0002-B 10 - VQ1000/2000 series Specific Product Precautions 3 Be sure to read this before handling How to Calculate Flow Rate Conversion with sonic conductance C: S=5.0XC Q : Air flow rate [dm3/min(ANR)] S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream pressure [MPa] t : Temperature [] No.VQ1000V-OMM0002-B 11 - When the valve is failing, use this flow chart

SV1000x-OME0002

To avoid this, indicate positions of manifold blocks for single wiring specification (S) and double wiring specification (D) on a manifold specification sheet.

AMR3000 to 6000

11 S 8 7 10 15 R 78 97 98 115 P 50 35 45 46.5 AL 1 4, 3 8 1 4, 3 8 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 103 121 131 161 10 10 70 70 264 302 370 436 100 120 130 160 180 210 246 290 AMR3000 AMR4000 AMR5000 AMR6000 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 3 4, 1 3 4, 1 Adapter assembly installation procedure Accessory

1

Vacuum L = Effective area H = Fixed hysteresis (2% F .S.)

AP64

Wetted Parts Material Wetted Parts Body Surface finish Seal S 316L SS secondary remelt Electropolish + Passivation FKM (Option: CR) 1092

PSxx-OMH0002CN

SUS630SUS430SUS304 (ISE75(H)) ON/OFF (ISE70 ) (10 10 ) UL1310 UL1585 UL -5No.PS-OMH0002CN-D * (50 N ) , ,ISE70 40 NmISE75(H)80 Nm 1.52 FG *() 6 33 2 () ( etc.) 10 m10 m DC(-)() -6No.PS-OMH0002CN-D * () CE (FKM) * 2030 1 LCD * ()(), (ISE70 ) O -7No.PS-OMH0002CN-D ISE ISE ISE ISE ISE ISE ISE ISE 70 01 MPa 02 43 70 75H 02 43 2 75 010 MPa A 75H 015 MPa 1 02 Rc1/4 N02 NPT1/4 S

SY3000-OMH0002

(N.O.)3 8 No.SY3000-OMH0002 SY series .3.23.7mm ( ( (1mm) (R) (U) DC24V 12V 1/4 DC24V 62ms L M () (S) 0.5V (Z) () 9 No.SY3000-OMH0002 SY series DIN W 1 3WA +4-3 (DS) (Z) DIN M8 ( ) DC24V 12V 1V WA (FU) +COM (S) (Z) (R) (U) (SS5Y(3,5)-45)-COM (SS5Y(3,5)-45N) 4 (WA ) (S 3( WA ) L M (GZ, LZ, LOZ, MZ, MOZ) 4 (WA ) 3( WA ) DIN (DZ, YZ) 4 WA 3 WA 4 (WA

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

AMR3000 to 6000

Failure to observe this precaution could damage the filter element. 1.10-3 Regulator with Mist Separator AMR3000 to 6000 Dimensions AMR3000 AMR4000, 5000, 6000 N Bracket mounting dimension With auto drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) P 50 35 45 46.5 R 78 97 98 115 S 8 7 10 15 T 9 9 11 11 B 260 298 366 432 L 178 211 277 321 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000