Antistatic One-touch Fittings Series KA

(mm) Weight (g) M A L D Part No. 3.2 4 33.5 34.5 36.5 18.5 KAR23-04 18.5 17.5 18 15.5 9.6 3.4 2.9 2.3 2.1 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 10 KAR04-10 39.5 37 39.5 3.6 3 KAR06-08 8 18.5 6 10 KAR06-10 17 12.8 KAR06-12 42 5.2 12 20 3.5 13.1 13.1 8 KAR08-10 41 4.5 18.0 18.0 10 20 18.5 15.2 KAR08-12 42 5.1 12 10 KAR10-12 42 33 32.8 32.8 12 20 21 17 139

Digital Flow Switch (Integrated display type)

1 V 1.8 V 5 V Current output 4 mA 7.2 mA 20 mA (PF3W721-U30) A B C Voltage output 1 V 1.48 V 5 V Current output 4 mA 5.92 mA 20 mA Rated flow [L/min] Sensor model Minimum Maximum PF3W704 0.5 4 PF3W720 2 16 PF3W740 5 40 PF3W711 10 100 PF3W721-12/14 50 250 PF3W721-U30 30 250 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V Current output 2.4 mA 4 mA 20 mA 21.6

KN Series Nozzles for Blowing

34.6 35.6 36.3 37.1 29.5 27.7 40.4 41.3 31.2 40.1 38.4 45.6 43.9 10 10 12 12 12 14 14 17 17 17 17 17 19 19 19 24 24 27 27 10 10 12 12 12 14 14 14 14 14 14 14 17 17 17 22 22 26 26 4 4 6 6 6 8 8 10 10 10 10 10 12 12 12 16 16 20 20 1 1.5 1 1.5 2 1.5 2 2.5 3 3.5 4 6 3.5 4 6 4 6 4 6 D H2 H1 M L1 Nozzle with male thread/KN (mm) Model Nozzle size D Connection thread L1 A Width across flats H1

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 30 to 750 20 to 550 10 to 300 Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.01 (Lead H: 0.02) Lost motion [mm]*2 0.05 Lead [mm] 20 12 6 24 16

VXR21/22/23

IN Model/Valve Specifications Connection Max. operating pressure differential (MPa) Flow characteristics Water, Oil Weight (g) Min.operating pressure differential (MPa) Orifice size (mm) Max. system pressure (MPa) Model Thread Water Oil Cv converted Av x 10 -6 (m 2) 1 2 3 4 VXR2150-04 VXR2150-06 VXR2260-10 VXR2270-12 VXR2380-14 VXR2390-20 20 20 25 35 40 50 1250 160 180 290 530 720 1200 6.5

2/3 Port Valve for Various

IN Model/Valve Specifications Connection Max. operating pressure differential (MPa) Flow characteristics Water, Oil Weight (g) Min.operating pressure differential (MPa) Orifice size (mm) Max. system pressure (MPa) Model Thread Water Oil Cv converted Av x 10 -6 (m 2) 1 2 3 4 VXR2150-04 VXR2150-06 VXR2260-10 VXR2270-12 VXR2380-14 VXR2390-20 20 20 25 35 40 50 1250 160 180 290 530 720 1200 6.5

reduces flow setting time

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

LEJ-OM002xx

Refer to "LECSB2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. 1200 for LEJS40 H Lead 12 - [LECSC-T] Series LEJS40 LEJS63 LEJB40 LEJB63 Lead symbol H A B H A B T Lead 24 16 8 30 20 10 27 42 Parameter *1,*2 Para. No.

PSE550/300

mADC 5 20 Analog output [mA] Analog output [V] ZSE ISE 1 4 PSE 0 2 0 2 Differential pressure [kPa] Differential pressure [kPa] Z I SE3 Internal Circuit PS Z I SE1 2 PSE550 Voltage output type 1 to 5 V Output impedance Approx. 1 k PSE550-28 Current output type 4 to 20 mA Allowable load impedance 500 or less (at 24 VDC) 100 or less (at 12 VDC) Courtesy of Steven Engineering, Inc.-230 Ryan

OMR0032

External Connection (P.20) for wiring. Refer to section 17.

REC

M8 X 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 19 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 19 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 19 150 to 1000 M14 X 1.5 40 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 30 200 to 1000 NN P RR S U Z ZZ NA Bore size Stroke range 1 8 150 to 700 20 M20 X 1.5 9 146 14 217 226 30

IDX-OM-W011

-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W IDF Series 11-1 11 1 IDX-OM-W011 11 M 11-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 11-4 1-1 IDF Series 11-3 11 2 IDX-OM-W011 12 R 12 R IDF4E/6E/8E/11E/15E1 12-1 12-2 1 AC100V AC200V INOUT IDF4E/6E/8E/11E/15E1-10-R IDF15E1-20-R IDF4E/6E/8E/11E-20-R (A) 10 5 (mA) 30 12-3 M5

Low Profile Guide Type

M2 M3 m2 m3 m4 10 15 25 1 2 1 2 2 2 1.4 CY1F 1.5 3 1.5 5 5 5 2 14 20 14 12 12 12 12 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 Positioning distance (mm) 100 200 50 10 1 10 20.1 10.1 5.1 1.1 0.2 10 10.1 20.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 10.1 5.1 2.6 0.6 0.1 20 5.1 10.1 2.6 0.6 0.1 30 6.7 3.4 1.7 0.4 0.1 30 3.4 6.7 1.7 0.4

Digital Flow Monitor

(increment of 1 sec.), 20 sec., 30 sec.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

Low-Speed Rotary Actuator

Description Qty. 9 Wear ring 4 9 Wear ring 4 9 Wear ring 4 9 Wear ring 4 9 Wear ring 4 Parts includid 19 Gasket for cover 2 19 Gasket for cover 2 19 Seal 1 19 Seal 1 19 Seal 1 in seal kit 20 Gasket for end cover 1 20 Gasket for end cover 1 20 Gasket 4 20 Gasket 4 20 Gasket 4 21 Piston seal 4 21 Piston seal 4 21 Piston seal 4 21 Piston seal 4 21 Piston seal 4 22 Seal washer 2 22 Seal washer

OMR0031

External Connection (P.20) for wiring. Refer to section 17.

3 Port Solenoid Valve

double solenoid. 1 to 12 stations 1 to 12 stations Valve stations D-sub connector 15 pins D-sub connector 26 pins Refer to page 19.

VM

P.T. 20 N F.O.F. 30 O.T. 50 T.T.