5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g3/8, 1/2Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g3/8, 1/2Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g3/8, 1/2Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g3/8, 1/2Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g3/8Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5 V or

25 to 85C (with no freezing and condensation)NPN open collector: Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA); Maximum applied voltage: 30 V; 2 outputsPNP open collector: Maximum load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates when output

25 to 85C (with no freezing and condensation)NPN open collector: Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA); Maximum applied voltage: 30 V; 2 outputsPNP open collector: Maximum load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates when output

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B AS Series Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow rate characteristics are representative values.

Vacuum Saving Valve

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NT printing NT 12200SZ Printed in Japan.

Oil Filter FH150 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM Model Port size (Rc) Rated flow rate (L/min) Model/Rated Flow Rate FH FH FH150-02 FH150-03 FH150-04 5 1/4 HOW 10 3/8 20 1/2 Description Part no.

Speed Controller with Uni One-touch Fitting AS Series

M Weight (g) Model Applicable tubing O.D. d T Uni thread 1 8" AS221F-U01-01 AS221F-U01-03 AS221F-U01-05 AS221F-U01-07 AS221F-U01-09 AS221F-U02-03 AS221F-U02-05 AS221F-U02-07 AS221F-U02-09 AS221F-U02-11 AS321F-U02-07 AS321F-U02-09 AS321F-U02-11 AS321F-U03-07 AS321F-U03-09 AS321F-U03-11 AS421F-U04-11 AS421F-U04-13 7.8 8.9 11.4 13.2 15.2 8.9 11.4 13.2 15.2 17.9 13.2 15.2 17.9 13.2 15.2 17.9

C95

Rod boot MB W R K F MB1 CP95 Stroke (mm) Refer to standard stroke table on p.1.11-4 C95 Applicable Auto Switches/ Tie rod mounting C92 Load voltage Lead wire (m) Indicator Mounting bracket Applicable load Auto switch model Special function Style Electrical entry Wiring (Output) 0.5 () 3 (L) 5 (Z) AC DC CA1 3 wire (Equiv. to NPN) 5V A56 IC CS1 Yes Reed switch Solid state switch 32,40 BT-03

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3