Thermo-chiller

(Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s *1 In the case of [Mcm], it will be 0.003 to 0.01.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

MHZ2-10, 16, 20, 25 1122M3 x 0.5 M3 x 0.5 K Width across flats 5 2.6 8.5 2 x Y thread depth Z 10 accessory: Extension fitting assembly (2 pcs.)

HRX-OM-M090

How to see the manufacturing code R O 001 January 2013 O O 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2013 R Repeated from A to Z in alphabetical order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2014 S 2 P 2015 T 3 Q Fig. 1-3 Position of product label 1.5 Safety Measures 1.5.1 Safety Instructions for Use Follow the instructions below

HRX-OM-R016

How to see the manufacturing code R O 001 January 2013 O O 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2013 R Repeated from A to Z in alphabetical order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2014 S 2 P 2015 T 3 Q Fig. 1-3 Position of product label 1.5 Safety Measures 1.5.1 Safety Instructions for Use Follow the instructions below

HRX-OM-R005

How to see the manufacturing code R O 001 January 2013 O O 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2013 R Repeated from A to Z in alphabetical order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2014 S 2 P 2015 T 3 Q Fig. 1-3 Position of product label 1.4.2 Earth Label Fig. 1-4 Earth label HRS Series 1.4 Other Labels 1-5 HRX-OM-R005

CJP

15st W Q 5st 10st Z Bore (mm) 6 10 15 A 15st 7 12 13.9 6 12.5 19.5 26.5 8.5 9 3.5 M3 X 0.5 M10 X 1.0 9 18.5 25.5 32.5 3 27.5 34.5 41.5 3 10 19 22 6 14.5 21 28 12 12 3.5 M4 X 0.7 M15 X 1.5 13 20.5 27 34 4 32.5 39 46 5 12 27 31 7 16.5 22.5 29 19 14 4.2 M5 X 0.8 M22 X 1.5 20 23.5 29.5 36 5 37.5 43.5 50 6 Plug Mounting Style CJPS B C E G H K MM NN 5st 10st F 15st R 5st 10st S 15st W Q 5st 10st

Escapements Series MIW/MIS

D F9NV S MIW Double finger type 20 30 1 A S D F9BV S Single finger type MIS Scraper Cylinder bore Nil S No Yes Number of auto switches 12 2 pcs. 1 pc. 12mm 20mm Nil S Stroke adjuster 20 Type of auto switch Nil A No Yes Stroke Without auto switch (built-in magnet) Nil 10 20 30 10mm 20mm 30mm Refer to the table below for auto switch part numbers.

Vacuum Pad: Ball Joint Type

Vacuum Pad: Ball Joint Type ZPT/ZPR Series Pad Diameter: 10, 13, 16, 20, 25, 32, 40, 50 on n io on n a io a pt pt s s or la or la ds nt ds nt ed ed a a or or w w l f l f or or ea ea k k id su id su pe rfa pe rfa ty ty ce ce nt nt s s oi oi ac ac l j l j ac ac al al e e B B s s ZP3 ZP3E ZP2 ZP2V ZP ZPT ZPR ZPT ZPR XT661 ZPT Series: Vertical Vacuum Entry Type ZPR Series: Lateral Vacuum Entry

CRQ2

auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without Without

Compact Cylinder Series NCQ8

Features 1 Compact Cylinder Double Acting, Single Rod Bore size: 056 (9/16), 075 (3/4), 106 (1-1/16), 150 (1-1/2), 200 (2), 250 (2-1/2) Series NCQ8 How to Order Without auto switch B 056 025 NCQ8 B 056 025 Z M9B S NCDQ8 With auto switch X-Option Built-in magnet Nil XB6 XC4 Standard High temp.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

D MIW Double finger type 32 50 1 A S D M9B MIS Single finger type Scraper Cylinder bore 8 12 20 25 32 Nil S No Yes 8 mm 12 mm 10 mm 25 mm 32 mm Number of auto switches Nil S 2 pcs. 1 pc.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Yes 8 mm 12 mm 10 mm 25 mm 32 mm Number of auto switches Nil S 2 pcs. 1 pc.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

12.8 S 10 to 16 (mm) 10.4 21.6 Q: 6 Q: 8 Pad diameter (mm) R 24.3 R S 15.2 S ZPR F-0-B8 (Without buffer/Female thread) 40 50 20 to 32 12.8 26.2 S Hexagon width across flats 12 N 8 R F Applicable tubing O.D.Q E D C Y 2.5 A B Dimensions (mm) A B C D E F N Y Model ZPR40F-0-B8 40 43 12.5 18.5 32.3 49.5 5 M8 x 1.25 ZPR50F-0-B8 50 53 13.5 19.5 33.3 50.5 6 Dimensions by Tubing Diameter (mm) Q: 6

AR20-B to AR60-B

mounting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 75 Regulator AR10-A Series Regulator AR20-B to AR60-B Series Regulator with

3 Way,3 Port Solenoid Valve NVZ Series

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

NVZseies

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

CEx-OMQ0011

100 100 50 50 0 0 0 5 m/s m/s 19 4-3.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Pressure relief, 3 port valve, Accessory for AC series, Body sizes: 1/8

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~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".