Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROLLER, FLOW CONTROL, SVD, 19 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROLLER, FLOW CONTROL, 19 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROLLER, FLOW CONTROL, 19 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROLLER, FLOW CONTROL, SVD, 19 lb

Vacuum Ejector Body Ported Type/Box Type (Built-in Silencer)

For M3: 0.315 0.03 Nm For M4: 0.76 0.08 Nm *1: For ZH15 to 20B, there is only one mounting hole 6 - Doc. no. ZH-OM00401 Mounting of the standard bracket (ZH05 to 15DA) and adjustment of the vacuum (V) port (1) Align the recess of the standard bracket and the protrusion of the adapter.

Precision Regulator

other P362010-2 1 1 1 1 1 P362020-5 P362020-5 P362030-34 P362030-34 13 Diaphragm NBR, other 1 1 P36202019 P36202019 14 Valve Stainless steel, NBR P36201058 1 15 Valve Stainless steel, H-NBR 1 1 P36202068#1 P36202068#1 16 Valve Brass, NBR 1 1 P36203009#1 P36203009#1 17 Valve Brass, NBR 1 1 P36203010#1 P36203010#1 18 Damper NBR, other P36201021 1 1 1 P36202026 P36202026 19

AS-FPQ/AS-FPG

Operating Pressure Particle Generation Classification Flow Direction Symbols on Body 105 1.2 Particle concentration (particles/m3) Meter-out type Meter-in type ISO Class 6 Max. operating pressure MPa 1.0 104 Indication symbol ISO Class 5 0.8 103 ISO Class 4 0.6 102 ISO Class 3 Symbol 0.4 10 0.2 0 0.1 0.5 1 1 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to back page

AS-FPQ/AS-FPG

Operating Pressure Particle Generation Classification Flow Direction Symbols on Body 105 1.2 Particle concentration (particles/m3) Meter-out type Meter-in type ISO Class 6 Max. operating pressure MPa 1.0 104 Indication symbol ISO Class 5 0.8 103 ISO Class 4 0.6 102 ISO Class 3 Symbol 0.4 10 0.2 0 0.1 0.5 1 1 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to back page

Port Size: B01 [Bar Base Type (SUP/EXH port: M5, OUT port: M3)], Stations: 19 Stations

Port Size: B01 [Bar Base Type (SUP/EXH port: M5, OUT port: M3)], Stations: 19 Stations

Digital Flow Switch (Remote type monitor unit)

. -14No.PF-OMN0012-H Mounting and Installation Installation Mounting with panel mount adapter Fix the panel mount adapter to the flow monitor with the screws supplied M3 x 8 L (2 pcs.).

Process Pump

Dynamic viscosity [m2/s] Viscosity [Pas] Density [kg/m3] Formulas below can be used for common units 1cP = 1mPas = 10-3Pas 1cSt = 1mm2/s = 10-6m2/s Pulsation Attenuating Capacity The process pump generates pulsation because it discharges a liquid using two diaphragms.

SI unit for CC-Link

Tighten the FG terminal (M3 round head combination screw) firmly with a tightening torque of 0.3 Nm. Tighten the connector fixing screws (M2.5 slotted head screws) firmly with a tightening torque of 0.2 to 0.3 Nm. A. Dual power supplies B. Single power supply Figure 3 Figure 4 : Communication connector FG and FG terminal are connected inside the SI unit.

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

(g) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D When mounting Series CU, refer to the below table. Tightening Torque/ 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) Bore size (mm) Hexagon socket head cap screw dia.

I

ON THIS PRODUCT REQUEST CATALOG REFERENCE E811 7.14 INSTRUMENTATION SERIES ZSE5/ISE5 D I M E N S I O N S S E R I E S ZSE5/ISE5 W I T H B R A C K E T F L U I D O P T I O N S Dry Air Drain-Containing Air Hydraulic Fluid (JIS-K2213) Silicon Oil (JIS-K2213) Lubricating Oil (JIS-K6301) Freon Carbon Dioxide Ammonia Argon Nitrogen Gas Chlorine Gas ACCESSORIES BRACKET Bracket ZS-22-D With Four M3

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

Allowable moment (Nm) Load weight (kg) m3 40 20 30 20 10 10 0 0 16 25 40 16 25 40 Bore (mm) Bore (mm) MY2C MY1C MY2C MY1C 2 Magnetically Coupled Rodless Cylinder/Low Profile Series CY1F Compact Max. 29% reduction in height (mm) Height Series 10 15 25 CY1F 28 34 46 46 63 CY1H 39.5 CY1H CY1F Short body Max. 31% reduction in overall length Reduction in length is 22% over MY2H cylinder CY1F

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 32 (4 Port/Base Mounted Common SUP Common EXH), Stations: 19 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 32 (4 Port/Base Mounted Common SUP Common EXH), Stations: 19 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 19 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 19 Stations, A B Port Size: M5 (Base Mounted M5X0.8), P R Port Thread: T (NPTF)