Oscillation Angle A: 100°, Torque (Range)(N⋅m): 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100 / 100 or More, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Provided

Oscillation Angle A: 100°, Torque (Range)(N⋅m): 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100 / 100 or More, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 1 to Less than 50, Tube Nominal Diameter: 100, Valves: Provided

Oscillation Angle A: 100°, Torque (Range)(N⋅m): 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100 / 100 or More, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Provided

Oscillation Angle A: 100°, Torque (Range)(N⋅m): 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100 / 100 or More, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Provided

Oscillation Angle A: 100°, Torque (Range)(N⋅m): 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100 / 100 or More, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Provided

Oscillation Angle A: 100°, Torque (Range)(N⋅m): 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100 / 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 1 to Less than 50, Tube Nominal Diameter: 100, Valves:

Oscillation Angle A: 100°, Torque (Range)(N⋅m): 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100 / 100 or More, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 1 to Less than 50, Tube Nominal Diameter: 100, Valves: Provided

Oscillation Angle A: 100°, Torque (Range)(N⋅m): 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100 / 100 or More, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 1 to Less than 50, Tube Nominal Diameter: 100, Valves: Provided

Oscillation Angle A: 100°, Torque (Range)(N⋅m): 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100 / 100 or More, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Provided

Oscillation Angle A: 100°, Torque (Range)(N⋅m): 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100 / 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves

Oscillation Angle A: 100°, Torque (Range)(N⋅m): 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100 / 100 or More, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Provided

EX500-DX_e

(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Power supply (0 VDC) 3 6 4 4 3 20 m or less total extension per branch Branch cable length Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result. This product is not designed to be explosion proof.

PF2D5.eng

Zero or more Output for PF2D3 + Analogue (4 to 20 mA) type: PF2D5 -2 Flow direction Sensor Monitor PF2D3 CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

Electric Actuator / Rod Type Dust-tight / Water-jet-proof (IP65 Equivalent / IP67 Equivalent)

562 to 1058 Actuator specifications Speed [mm/s] Note 4) 18 to 400 9 to 200 5 to 100 24 to 400 12 to 200 6 to 100 24 to 400 12 to 230 6 to 110 Max acceleration/deceleration [mm/s2] 3,000 Pushing speed [mm/s] Note 5) 35 or less 30 or less 30 or less Positioning repeatability [mm] +/0.02 Lost motion [mm] Note 6) 0.1 or less Lead [mm] 12 6 3 16 8 4 16 8 4 Impact resistance/vibration Resistance

Regulator Valve

Option Rated voltage Voltage symbol Part no. 100 VAC 100V VK300-82-2-01 110 VAC 110V VK300-82-2-03 200 VAC 200V VK300-82-2-02 Note) When requiring a gauge different than that mentioned above, specify the model number. 220 VAC 220V VK300-82-2-04 Option is packed with it.

NAIV

NAN200,400 NAN500 -900 4.21 11071 NAN120-X200 Port size (NPT) M5 (NOM 10-32) Noise reduction lvax. operating pressure I 45 PS(10.2kg7c.rf) 40140.F (s -60.C) Operating temprature range Effective orifice mm2 (Cv) 5 (0.27) 20 0.1) .12 (3.3) \4/eight oz (g) 0.69 (17) Dimensions In.

asilltr

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return

NVEPA|VEFseies

SOLENOID SPECIFICATIONS Adder Number 0 1 Required Amplifier VEA1 30, VEA131 vEA 250, 251 ,252 Control Range 0-750mA 0 1 A Coil Resistance 26]2 (68"F (20"C) ) 1312 (68"F (20'C)) PorYer Consumotion 15W Max. Current (68"F (20"C) ) 13W Max. Current (68"F (20'C)) Insulation Class H Max. TempeEture Rise 284'F (140"C) at Full Current Elec-trical Connection DIN Connector (h" PF) NVEF.

Exhaust Cleaner for Vacuum Pump AMV Series

amount (L) AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 1.6 3.0 5.9 10 43 59 0.3 0.5 1.0 1.0 10 10 360 650 1,500 3,700 7,500 16,000 360 650 1,500 3,700 7,500 16,000 1 1 1/2 2 2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange Construction Gasket Cover Element Tension bolt No Description Material Component Parts 1 2 3 4 Holder Case Cover Tension bolt Aluminum alloy Carbon steel

AP500

Changes from the standard type are: AP501mmA AP501 AP502 AP506 0.1 0.4 psig (0.0028 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Option Other Parameters AP510 HF Cv Supply pressure effect Wetted Parts Material Flow Characteristics AP500 100 psig (0.69 MPa) Inlet pressure: 30 psig (0.21 MPa) Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat S SH 316L