MXU

D-A9V D-M9V D-F9WV ( ): Denotes the values of D-M9V, D-F9WV.

CEx-OMG0106

Supply Pressure: 0.5MPa (for both brake and driving purposes) d.

MHT2

Rail mounting Direct mounting D-F7BA D-F7lW D-F7lF D-J79W D-A7lH/A80H D-A73C/A80C D-F7l/J79 D-F7lV/J79C D-F9BA D-F9lW D-F9lWV D-F7lWV D-A9l D-A9lV D-F9l D-F9lV D-A79W D-A7l/A80 Bore size (mm) D 8 10.5 13.5 16.5 C 11 15 13 15.5 D 9 11.5 14.5 17.5 C 12 16 14 16.5 D 5 7.5 10.5 13.5 C 8 12 10 12.5 B 7 9.5 12.5 15.5 A 10 14 12 14.5 B 10.5 13 16 19 A 13.5 17.5 15.5 18 B 3.5 6 9 12 A 6.5 10.5 8.5

10

D-X 893

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

reduces flow setting time

Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

For D-A93, only outward electrical entry (D dimension) is available. Dimensions in parentheses apply to 12-CXSJ6. CXSJ10 / CXSJ10 11122122Note 2) D B Note 3) (mm) D-M9 34 (35.5) 3.5 (2) 24 (25.5) 6.5 (8) D-A93 30 (31.5) 25.5 (27) 5 (6.5) Symbol A B C D Note 1) The above mentioned values are indicated as a guide for auto switch mounting positions for stroke end detection.

LECP6_C

+ + + + 8 I/O (NPN/PNP) 9 10 FG () 12 - 3.3. 1 LECP6 2 DIN LECP6D 13 - 3.4. 1 DIN 2 LECP6DINLECP6DDIN 2M4 DIN DIN A DIN ADIN 2 M4 M4 14 - D (100 ) 2mm 2 D 3 40 30mm 50mm ()60mm () 0mm (LE)10mm LEH 25 30mm 60mm 30mm 50mm DIN ) 15 - 4.

180

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

ZR

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

Parallel Type Air Gripper

-40 M8 x 1.25 17.7 16 Max. tightening torque (Nm) Model Screw MHZ2-10 M2.5x0.45 0.49 MHZ2-16 M3 x 0.5 0.88 MHZ2-20 M4x0.7 2.1 MHZ2-25 M5 x 0.8 4.3 MHZ2-32 M5 x 0.8 4.3 MHZ2-40 M6x1 7.3 Note) If auto switches D-Y59, D-Y69, or D-Y7P are used, or the auto switch is mounted to the corner of the body, only a tapped body can be used.

CXWM/CXWL

and D-A8. ( mm) Note 1) The dimensions show D-A7 and D-A8. ( mm) Ht 15 Hs 12.5 Hw 23 Auto switch model Auto switch model D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C Hv 10.5 Ht 15 Hw 23 D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C 15

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.

Process Valve

Applicable cable O.D. 6 to 8 (D, DZ) P Pg9 J (DIN terminal: D, DZ) I (Grommet: G) F (Air operated) Pilot port 12 (P1) 2 x (Back side 10 (P2)) 4 x M 8 1 Manual override (Non-locking push type) P1 D S Q E 15 B A H (DIN terminal: D, DZ) G (Grommet: G) A R B C Main port 1 (A) (Back side 2 (B)) Port side: refer to table below Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S VNB2V

VK3000

Mixed Mounting of VK300 and Manifold Base of VK3000 Series Type VV5K3-20 Type VV5K3-40 1. In the case of VV5K3-20/40 When installing the 3 port valve on the manifold base, plug the R port at the corresponding mark side with the rubber plug (VK3000-8-1) as shown in the figures on the right. Plug Plug 2. Other manifold 3 port valve can be mounted without any work.

I/O Configurator (NFC version)

Detailed information of units 40 3.4.1. Information tab 40 3.4.2. Details of I/O monitor tab 49 4. Setting Function 56 4.1. Edit TAG 56 4.2. Software Control 56 4.3. Forced output 58 4.3.1. Forced output conditions 58 4.3.2. Forced output procedure 59 4.3.3. Forced output release procedure 62 4.4. Export Settings 63 4.5. Import Settings 65 4.6. Reading of the initial value 66 4.7.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

) M10 x 1.5 x 40 Differential pressure indicator (60) (65) (30) (34) Blanking cap M12 x 1.75 x 40 08 SSA25 G35 M12 x 1.75 x 45 2 x d G E H J G G M12 x 1.75 x 40 10 IN OUT IN OUT IN OUT SSA32 G40 X X' M12 x 1.75 x 45 Differential pressure indication switch Differential pressure indicator M16 x 2 x 50 12 Bracket mounting base port size 10 to 24 SSA40 G50 Bracket mounting base port size 03 to

ZQ-OM01401

-40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0