Air Slide Table

A A1 B C D1 E F G M (Fine pitch) P2 MXQ12(L, A, C, CL) MXQ8B(L) MXQA-JS12-X2202 RJ0805U-X2300 47.3 5 2.5 7 M3 x 12 24 7.1 10.4 M8 x 1 M4 x 8 MXQ16(A) MXQ12B(L) MXQA-JS16-X2202 RJ1006U-X2300 52.8 6 3 9 M4 x 12 29.4 9.2 12.6 M10 x 1 M5 x 10 MXQ20(A) MXQ16B MXQA-JS20-X2202 RJ1007HU-X2300 52.8 7 4 9 M5 x 12 36 11.2 16.2 M12 x 1 M6 x 12 MXQ25(A) MXQ20B MXQA-JS25-X2202 RJ1410U-X2300 77.1 10 5 12

Electric Actuator/Slider Type

7 q @0 u A A i o !9 !6 !9 !1 !5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

Battery-less

7!9@0 q @2 @3 y@7 A A u i @1 !5 @1 !0 !4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

Fluoropolymer Piping Equipment

3/4" x 5/8" 1/2" 12 x 10 3/4" 1/2" 1" x 7/8" 3/4" 19 x 16 1" 3/4" 7 B 1 1/4" x 1.1" 1" 7 C 25 x 22 1 1/4" 8 C 1 1/2" x 1.33" 1 1/2" Fitting type H, piping type M: Male connector only.

ZP

C N S U F GN GS B4 M4 x 0.7 4 ZP R 10 13 16 UT 28.4 04 06 M5 x 0.8 19.5 B5 M5 x 0.8 5 Dimensions Per Vacuum Inlet 2.52 Width across flats 7 Model C D E Fitting part min. hole size Vacuum inlet direction q Pad dia.

Free Mount Cylinder

Applicable cylinder bore (mm) 10 16 20 25 32 2.4 H M4 x 0.7 d 7 B 8.1 C 6.8 D Part no.

ISO Cylinder

Auto switch mounting Auto switch model C85 Series C75 Series Bore size [mm] 8 10 12 16 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V)*7 BJ6-008 (A set of a, b, c, d) BJ6-010 (A set of a, b, c, d) BJ6-012 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9lA(V) BJ6-008S (A

Vacuum Pad

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

NCA1

) 1 3/4-16 1 1/8 3.9 1/2 3 13/16 1 15/16 1 1/4 3/4 11/64 1.5 1/2 7/8 3/8-24 3.75 0 1/2 5/8 1.57 1.18 6 1/4 1 3/8 2.34 2.72 4.25 7 3/8 6 7/8 7 5/8 400 (4) 1 3/4-16 1 1/8 4.7 1/2 4 1/2 2 1/4 1 1/4 3/4 15/64 1.5 1/2 7/8 3/8-24 4.5 0 1/2 5/8 1.57 1.18 6 1/4 1 3/8 2.34 2.72 4.25 7 3/8 6 7/8 7 5/8 Front Flange Type NC A1F (MF1 Mounting Style)-X130US (in) Bore (in) MM KK A AA B BA C D DD E EA EE

NCA1

4-DD 2-EE (NPTF) AA WF falts C EA KK MM BA B AE AH AT S J F G 6-AB (Hole) AL AL LF + Stroke R AO AO SA + Stroke E Bore size (in) R MM KK A AA AB AE AH AL AO AT B BA C D DD E EA EE F G J S WF Y P LF 150 (1.5") 5/8 7/16-20 3/4 2.02 3/8 2 3/16 1 3/16 1 7/16 1 1/8 1 1/8 3/8 9/16 2 0.3 3/8 3/8 1.26 1.1 1.43 1/4-28 1/8 3 1 1/4 1 2.36 5/8 1.71 200 (2") 5/8 7/16-20 3/4 2.6 3/8 2 11/16 1 7/16 1 9

NCA1

") 6 5 5/8 6 1/16 200 (2") 6 5 5/8 6 3/16 250 (2.5") 6 1/8 5 3/4 6 5/16 325 (3.25") 7 3/8 6 7/8 7 5/8 400 (4") 7 3/8 6 7/8 7 5/8 6-15-8 8 Series NCA1 NFPA Interchangeable Air Cylinder Medium Duty Series Rod Side Flange Style: NCA1F (MF1 mounting style) Y P + Stroke AA D across flats 2-EE (NPTF) C 4-FB (Hole) KK EA MM BA CJ1 B R E CJP CJ2 F W J G TF CM2 WF LF + Stroke UF A ZB + Stroke CG1

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

5 ENC c Encoder connector (16 pins) Axis 3: Connect the actuator cable. !6 MOT c Motor power connector (6 pins) !7 ENC v Encoder connector (16 pins) Axis 4: Connect the actuator cable. !8 MOT v Motor power connector (6 pins) !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Cable length (L) [m] 3 3 5 5 A 10 C 20 LE-CYM-llA-l: Motor cable L 50 7 U V W G M4 Crimped terminal LE-CYB-llA-l: Motor cable for lock option L 50 7 3-M4 Crimped terminal LE-CYE-llA: Encoder cable L (60) (100) 12 (7) (32) D 19 5 3 1 6 4 2 25 Battery case Depth dimension: 25 mm Product no.

CV/MVGQ

7 !8 !

CV/MVGQ

7 !8 !

High Vacuum Angle Valve

Quantity Without auto switch Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 7-1 i 7-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 7-1 1.3 x 10-9 (FKM) r i 7-2 XLQ Note) Values at normal temperature, excluding gas permeation.

Display Pressure: 10 (1.0MPa), Connection Thread: 01M (R 1/8, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 15 (1.5MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 2 (0.2MPa), Connection Thread: 01M (R 1/8, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 10 (1.0MPa), Connection Thread: 02 (R 1/4), Attachment: C2 (Clear Cover Removable, Wrench Tighten)