Compact Cylinder

25 to 40 Minimum lead wire bending radius 10 Auto switch H thread effective depth C 4 x N through F Q 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W E M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 20 5 to 50 21 17.5 27.5 24 8 8 30 5 29.5 M4 x 0.7 36 2.5 6 3.5 21 3.5 7.5 32 8 25 5 to

CG5-S

WH 32 (E1) D 21 19 17.3 41.4 6.4 7/16-20 126.4 I 40 19 16.6 17.3 41.4 6.4 7/16-20 134.4 B2 BZ MM AL A 50 22.4 19.8 18.8 52.6 7.9 1/2-20 161.6 Plug bolt (4 pcs. included) K KA 8-J 63 22.4 19.8 18.8 52.6 7.9 1/2-20 161.6 (F1) C 0.1 80 S + Stroke ZZ + Stroke H 25.4 22.9 23.9 63.5 9.7 5/8-18 193.5 NA 100 31.8 29.3 27.8 69.9 10.7 3/4-16 200.9 80 and 100mm-X165US are a future release.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

mounting groove (4 locations) Width across flats 8 (4 locations) 18.2 M5 x 0.8 (Finger closing port) 4 x M5 x 0.8 (Piston rod thread and rack thread) 5.5 2 x M5 x 0.8 Vacuum port H 7 8.4 16.8 0.5 7 9 7 12.5 8 6 6 O S 15 31 (46) 20 K 12.4 15 15 7 7 4 4 20 When open F 10 4 x M4 x 0.7 through (Thread for mounting attachment) 34 10 When open G (mm) J 24 39 57 H 116 158 196 G 92 134 172 F 72

Cylinder with Lock

Take measures for drop prevention by strut, etc. * For lock unit with a rod boot, add J to the part number suffix. Example) MWB50TF-UA-J 2.

Vacuum gripper

164.9 ZP B25 J 183.4 ZP B30 J 189.9 ZP3P 20 JT2 SF 169.1 ZP3P 20 JT2 SF M 169.1 ZP3P 32 JT2 SF 180.5 ZP3P 32 JT2 SF M 180.5 ZP3P 20 JT5 SF 182.6 ZP3P 25 JT5 SF 186.4 ZP3P 32 JT5 SF 200.9 0 0 Note) Material symbol"N","S","U",or"F" is put in of the product number. "" in this table indicates the material symbol "N", "S", "U" or "F". -34No.

Vacuum Pad

ZP3P-20PTSF ZP3P-25PTSF ZP3P-35PTSF ZP3P-50PTSF p. 2 q Pad unit With Buffer p.6 e Buffer assembly Pad diameter Part no. 20 25 35 50 Dimensions ZPB2(J/K)10-B5 V V ZPB2(J/K)20-B5 V V ZPB3(J/K)10-B01 V V ZPB3(J/K)20-B01 V V p. 12 e Buffer assembly w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions ZP3PA-T1-B5 V V ZP3PA-T2-B8 V V w T female thread adapter p. 11

Counter/Extension Cable

COM RS Q G 1 k ( ) or Control signal input RS H A 2.2 k (Select Reset/ Hold/Bank) Power supply (24 or 12 VDC) RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-12-29 Series CEU CEU5 Operation Parts description External power supply Pulse input terminals Control signal input A COM COM COM B 12 VDC GND F.G. R.S.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42 47 37 11 10 59 11-/22-MXPJ6-10 100 Air slide table MXP/MXPJ6 11221122Dimensions: MXP6 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter

Electric Actuators

P JOG and constant rate movement, return to origin, test operation and testing of forced output can be performed. 32 Series LEC Teaching Box/LEC-T1 RoHS How to Order LEC T1 3 J G Enable switch (Option) Teaching box Enable switch S None Equipped with enable switch Nil Cable length [m] 3 3 Interlock switch for jog and test function Stop switch Initial language J E Japanese English Stop switch

ZPT/ZPX

63.5 85.5 160.5 211.5 27.5 75-B01-A18 75-B01-A18 183.5 234.5 196.5 247.5 ZPX HBJ-B01-A22 (Male thread) 100 125 Hexagon width across flats 17 M22 x 1.5 9.5 50 Hexagon width across flats 30 Width across flats 19 Rc 1/8 9.5 10 Hexagon width across flats 21 J Width across flats 60 70 4-M5 x 0.8 I 11 H G F E Y 4 40 C A B D Dimensions (mm) Model B A C D E F G H I J Y ZPX100HBJ25-B01-A22 141.5

3

Pin name 1 2 3 4 DC (+) OUT2 DC () OUT1 1 3 2 x Piping port Z U T S 4 x WX G 2 4 (35.5) 42 H For PF3W721 OUT IN AA G 4 x P K L 2 x Piping port G N DD PF3W504/520/540/511/521 Remote sensor unit Y A E J F 30 W B V 2 x Piping port Z S T U 4 x WX G H 42 (35.5) For PF3W521 IN OUT AA G 4 x P K L 2 x Piping port G N (mm) Bracket dimensions Model Port size A AA B D DD E F G H J K L N P (Rc, NPT,

Vacuum Unit Series ZK2

P Single unit Note 4) Vacuum pump system J N.C. None Note 5) Self-holding release valve linked For manifold Q R N.C. Note 7) N None None Silencer exhaust A Note 3) Only non-locking type is available for the manual override for K, J, R. Note 4) When J is selected for vacuum pump system, install a release valve or vacuum breaker.

Air Cylinder: Standard Type Double Acting, Single Rod Series CM2 ø20, ø25, ø32, ø40 How to Order Mounting style Cylinder stroke (mm) T B Basic style (Refer to “Standard Stroke” on page 129.) Head side trunnion style Clevis integrated style Axial foot styl

Rubber bumper 0.4 J 0.65 J 1.2 J Allowable kinetic energy 0.54 J (11.0) 0.78 J (11.0) 1.27 J (11.0) 2.35 J (11.8) Air cushion (Effective cushion length (mm)) CG1 With air cushion MB Standard Stroke MB1 Bore size (mm) Maximum stroke (mm) Standard stroke (1) (mm) Made to Order Specifications (For details, refer to pages 1373 to 1498.)

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

LH 0.2 C B W W D E d d D E LY MM MM 4-LD Width across flats G Width across flats G LT LT NA NA Y X Y X LX B S + Stroke LS + Stroke ZZ + 2 strokes (mm) Bore size (mm) LD LH LS LT LX LY A a B B C d E F G GA J K M MA MM NA D H 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 9 47 168 8 44 77 23 10 60 60 44 18 45

240

Dimensions [mm] Model L1 L2 A B C D E F G J K LEPS10-25 138 152.5 61.8 20 22 30 29 20 29 39 88.2 LEPS10-50 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10L-25 124 138.5 47.8 20 22 30 29 20 29 39 88.2 LEPS10L-50 149 163.5 24 43 34 50 24 50 60 113.2 394 LEPY/LEPS Series Specific Product Precautions 1 Be sure to read this before handling the products.

15

Select [Applicable tubing O.D.: 4 or more, Connection thread: Rc1/8]. 10.5 Motorless Motorless FK LAT Dimensions [mm] LZ Size Stroke range [mm] B C D EH EV H J K L M O1 R S T U LC3F2 63 50 to 200 123 21 40 76 82 M16 x 2 44 36 33.4 60 M8 x 1.25 16 78 83 5 205 to 500 158 505 to 800 193 The L measurement is when the unit is at the retracted stroke end position.

Integrated Controller

GR-S-010 (10 G) GR-S-020 (20 G) 20 Easy to Operate EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor EQFS16H (72) 50 24 3 H9 (+0.025 0 ) depth 3 4 x M4 x 0.7 thread depth 6.4 12 Body mounting reference plane (B dimension range)1 39.4 28 3.5 3 H9 (+0.025 0 ) depth 3 Stroke A + Stroke (Table traveling distance)2 Required space: J L + Stroke 127 (With lock: 188

Refrigerated Air Dryer

IDFB3E IDFB4E to IDFB11E B Q A D E Compressed air inlet Illuminated switch Compressed air outlet Evaporation thermometer G F J Ventilation direction Ventilation direction C Ventilation air outlet Drain tube (O.D.: 0.4 [10 mm], Length: 31.5 [0.8 m]) H 4 x 0.5 [4 x 13 mm] N M L K Power cable with plug (Length: 110 [2.8m]) Dimensions Unit: inch [mm] A B C D E F G H J K L M N Q Model Port size

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2 x M2 x 0.4 depth 2.2 12 11-/22-MXP6-10 Metal stopper Max. 10.5 F 4 x M3 x 0.5 depth 3 12 2 x M2 x 0.4 depth 3 (mm) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 23.5 45 2 11-/22-MXP6-51 30 35 53 48.5 47 37 11 10 42 30 60 9.5 11

IZx-OMX0087

3 10 10 G 1 K 5 Straight 15 15 H 2 M 10 Straight N None J 3 S 3 To use AC adapter, specify "N", and select AC adapter with the option number.