Two Hand Control Valve

0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !

Slit Valve

A6063 Main material of vacuum part Body A5052 Bonnet A5052 Others Stainless steel 304 Exhaust direction Free Mounting direction Vertical Port size M5 x 0.8 Rc 1/8 End-lock mechanism With lock mechanism at opening/closing position Note 5) Cylinder volume (L) 0.12 0.2 Non-cassette type 8 14 Cassette type: Standard 12 20 Weight (kg) Cassette type: Half MESK 12 20 Cassette type: Full MESK 11

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: S2 (100W Output, Incremental Encoder), Lead: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 100mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length: 2 (2m)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: A [Servo Motor (24 VDC)], Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 100mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 1 (1.5m), Controller Type:

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 100mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 1 (1.5m), Controller Type:

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 100mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type: 6P (LECA6 PNP, Servo

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 100mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type: 6P (LECA6

Series: 11-LEFG (Guide, Clean Series), Size: 16, Mounting Pitch: S, Stroke, mm: 100

Size: 25, Motor Type: S6 [AC Servo Motor (Absolute Encoder), 100W], Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 100mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Driver Type: -, I/O Connector: -

Clean Series: Vacuum Suction Type, Magnet: Built-in, Mounting: Basic Style, Stroke: 100mm, Cushion: Rubber Bumper (Standard), Head Cover Port: 90° to Axis, Auto Switch: H7B--Solid State, Gen. Purpose, 2 Wire, Lead Wire, Lead Wire or Prewired Connector: -, Number: -, Bore Size: 16mm

Clean Series: Vacuum Suction Type, Magnet: Built-in, Mounting: Front Flange, Stroke: 100mm, Cushion: Rubber Bumper (Standard), Head Cover Port: 90° to Axis, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, Lead Wire or Prewired Connector: -, Number: -, Bore Size: 16mm

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 20mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 20mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Z73--Reed, DC Volt., AC Volt, 2 Wire, LED, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 32mm, Port Type: NPT: 25 & 32mm Bore, Stroke: 100mm, Auto Switch: Z73--Reed, DC Volt., AC Volt, 2 Wire, LED, Lead Wire or Prewired Connector: 5m, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 25mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Y7PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 25mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 25mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 20mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 1.0m Cord Length, M8-3 Pin Connector, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 20mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (vacuum type), Port