Integrated Controller

M4 x 0.7 thread depth 7 M5 x 0.8 thread depth 10 25.5 0.5 10.5 B + Stroke A + Stroke 25.5 34 35 4 x M4 x 0.7 thread depth 7 35 Rod end male thread 6 x M4 x 0.7 thread depth 5.5 3 H9 (+0.025 0 ) depth 3 M8 x 1.25 Width across fats 174 16 23 MD XX 5 Width across fats 22 15 MC ML + Stroke 13 14 24.5 Required Space5 [mm] 4 3 H9 (+0.025 0 ) 3 Cable connector type J Straight 115 XX (2:1) 1 The

High Vacuum Angle Valve

1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

VFR

Material Steel Part no. q Description Connection fitting B Connection fitting A VVFS3000-5-2 VVFS3000-5-1A Steel NBR w e Gasket r NBR Gasket VVFS3000-7-1 VVFS3000-8 19.8 x 16.6 x 1.6 (for end plate) 20 x 16 x 2 (for manifold block) 6.2 x 3 x 1.6 VVFS3000-6A y NBR O-ring t NBR O-ring u NBR O-ring i Terminal assembly VVFS3000-4AStations AZ738-22AStations For 01T For 01SU Junction cover assembly

Slider Type/Ball Bushing Bearing

D 1.6 x P 0.1 x Wcos + Wsin D 5.0 x P 0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load mass & pressure Inclined operation (For vertical operation, refer to page 1515.)

MY1

M3E 1 3 1 3 M3E = x FE x Y = x 179.1 x 29.6 x 10 3 = 1.77 (Nm) MY1 HT Load factor 5 = M3E/M3Emax = 1.77/5.7 = 0.31 MY1 W MY1 W MY2C 6 Sum and Examination of Guide Load Factors = 1 + 2 + 3 + 4 + 5 = 0.67 1 MY2 H/HT The above calculation is within the allowable value, and therefore the selected model can be used.

MB

1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 15 21 21 21 30 30 16 16 16 16 16 16 4 4 5 5 5 5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 -W Stroke range (mm) Bore size (mm) MO N NB P RF S V W WL ZZ S ZZ 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 800 to 800 19 19 19 19 23 23 27 27 31.5 31.5 38 38 35 40 43.5 43.5 56 56 1/8 1/4 1/4 3/8 3/8 1/2 11

SYJ3000/5000/7000

Load factor: ( (Load weight x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB/CA2 Series CJ2 Series CM2 4 x 1 m Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AS2301F-04 6 x 1 m 4 x 1 m AS1301F-04 AN120-M5 SYJ5120-M5 SYJ5140-01 AN101

MXS

Combination of Options v: Possible X: Not possible Functional option F R P FR FP Adjuster option v v v v v v v (3) v (3) v (3) AS v v v X X X X AT v v v (3) X X X X A v X X X BS v v v X X X X BT v v X X X X X B v Note 3) For combination of buffer mechanism style and stroke adjuster at extension end style, the buffer stroke is shortened by the adjusted length with the stroke adjuster at extension

SYJ300/500/700

P, R port thread type S 20 20 stations A A X port (External pilot type) M5 x 0.8 A port size Nil Rc X P R A port M5 x 0.8, C4 R port M5 M5 x 0.8 + + + + F G 1/8 C4 4 One-touch fitting A A P port X P R N NPT P port 1/8 N3 5/32" One-touch fitting 1/8 T NPTF X port (External pilot type) M5 x 0.8 R port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides

Auto Switch Guide

2.5 Auto switch Hexagon socket head cap screw (M3 x 16 l) RZQ Switch mounting screw Round head Phillips screw with spring washer M3 x 0.5 x 16 l MI W S 1.

Modular F.R.L. Unit

Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.

CA2

3 y e q w !7 r !4 !8 !6 !2 t u !5 o C85 C95 CP95 NCM NCA D!1 !0 i -X Component Parts 20Material Description Note No.

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

Best Pneumatics Vol. 14

1 Drain q r e w t i u y o !0 !

CNA

1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 37 to

CNA

1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 37 to

0.4

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series Conditions CJ2 series CM2 series MB, CA2 series T0604 (O.D. 6/I.D. 4) x 1 m Tube x Length VQC1101 Speed controller AS3002F-06 AN15-C08 Silencer T0806 (O.D. 8/I.D. 6) x 1 m Tube x Length VQC2101 Speed controller AS3002F-08 AN20-C10 Silencer 542 I N D E X P.538 P.540 P.542 P.544 P.550 P.556 Features Variations Cylinder

ZX

Nil Y M5 x 0.8 M6 x 1 (Option) Pilot valve Vacuum switch electrical entry Nil DC: 1 W (With indicator light: 1.05 W) AC Nil L Lead wire length 0.6 m Grommet type Lead wire length 3 m C Lead wire length 0.6 m CL Lead wire length 3 m Y DC: 0.45 W (With indicator light: 0.5 W) Connector type CN Without connector (Without lead wire) 24 VDC and 12 VDC are applicable to 0.45 W.

Cylinder with Lock

Axial foot: C96NL-W XA + Stroke 4 x AB AH TF E1 AT SA + Stroke AO AO [mm] Bore size AB AH AO AT E1 SA TR XA 32 7 32 10 4.5 48 200 32 202 40 10 36 11 4.5 55 227 36 229 50 10 45 12 5.5 68 245 45 250 63 10 50 12 5.5 80 264.5 50 269.5 80 12 63 14 6.5 100 320 63 325 100 14.5 71 16 6.5 120 343.5 75 353.5 Flange Rod side: C96NF-W 4 x FB R E2 UF TF W MF Head side: C96NG-W MF ZF + Stroke [mm] Bore

SX

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% 1-6-2 3 Cylinder Speed Chart Conditions Conditions Base mounted Body ported Series CJ2 Series CM2 Series MB T0604 x 1 m Series CJ2 Series CM2 Series MB T0604 x 1 m Tube x Length Speed controller Silencer Tube x Length Speed controller Silencer Tube x Length Tube x Length Silencer Tube x Length Speed controller Silencer Tube x Length