SMC Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
However, for FHM-055, the flat portion of the magnetic material functions as the contaminant adsorption surface. w Mount the magnetic separator in a location where fluid is constantly flowing by in laminar flow. e Avoid locations such as near the suction pipe or return pipe, places where there is turbulence, and locations where the flow speed is 3 m/min or greater. r If necessary, fix the
190 12 TBR-4 240 Spare Parts W (Dimension) Part no.
0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !
Base, Body Seal material Aluminum NBR, FKM, EPDM LQ Port A Port A LVN Port P TI/ TIL Port R Energized open Energized closed PA PAX PB Model Manifold base model Port A Rc Port P Rc Port R Rc VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations Manifold Manifold stations Manifold B mount 2 to 10 stations 1 8 1 4 1 8 1 4 1 4 1 4 17-3-105 The VX series will be revised shortly.
Refer to dimensions on pages 14-20-6 to 7 for details. w e Sight glass AMG850 is aluminum casted. Tempered glass Replacement Parts AMG450 Model Replacement Parts No. Description Material AMG250 AMG350 AMG550 AMG650 AMG850 AMG150 Resin Others Element assembly AMG-EL250 AMG-EL350 AMG-EL550 AMG-EL650 AMG-EL850 AMG-EL450 AMG-EL150 r Element assembly: With gasket and O-ring Max.
Nil Rc Thread type F G N NPT Accessory/Option Combinations Available Not available Depends on model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Option specifications C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable model Accessory (Option)
R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.
AFF Port size 3/4B 1/8B 01 02 03 06 10 14 AMl 1B 1/4B Note) Please refer to p.4.7-7 about "How to Order" case assembly. 3/8B 11/2B Related products 2B 20 04 1/2B Option combinations Available Not available D J R AMG150 AMG250 AMG350 AMG450 Applicable model Accessories Options C C D J R Accessories/Optional specification AMG550 AMG650 AMG850 Symbol N.C. auto drain N.O. auto drain Drain guide
R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18
ADDRESS R O I B U S PROCESS FIELD BUS F R P SW power 24 VDC 23 VDC Sensor Correspondence between output data and valve manifold Intput data Thank you for purchasing an SMC EX250-SPR1 Fieldbus device.
Adaptor connection thread Symbol Pad dia. 1 02 to 08 B5 2 10 to 16 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [qAdaptor] R S ZP 04 A5 [wR type adaptor] Symbol S Pad dia. 02 to 16 L 20 to 50 With Buffer ZP R 16 K20 A10 06 UGN [Pad model no.]
Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...
Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...
MGTM MGTL MGPM63 to 100-Carbon steel Flat cylinder w/turntable q MGPL63 to 100-White anodized White anodized White anodized Chromated Chromated Nickel plated High carbon chromium bearing steel Guide plate Bearing guide A Bearing guide B Bearing guide C Bearing guide D Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Carbon steel w e r t y u i o !
Power supply ON/Servo OFF: Green flashes. q q PWR Power supply LED y w With alarm : Red turns on. Parameter setting : Red flashes. w ALM Alarm LED Change and protection of the mode switch (Close the cover after changing switch.) u i e Cover o !0 Frame ground (Tighten the bolt with the nut when mounting the controller. Connect the ground wire.) r FG !1 !2 t y u i o !0 !1 !2 !3 !4 !5 !
Cylinder Port: TF (G), Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: w/o Arm, L Arm Style: w/o Arm, Painted Arm: P (Paint)
6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140
10)W = 51n + 81, .41446 lb, ModelApplicable valveManifold typeP (SUP)/R (EXH)Valve stations Note)A, B port locationPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X7-20SX7 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 4C8 (One-touch fitting for ?8)C10 (One-touch fitting for ?10)W = 51n + 81
10)W = 51n + 81, .89948 lb, ModelApplicable valveManifold typeP (SUP)/R (EXH)Valve stations Note)A, B port locationPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X7-20SX7 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 4C8 (One-touch fitting for ?8)C10 (One-touch fitting for ?10)W = 51n + 81