Vacuum Pad

Applicable for the ZP series adapter How to Order ZP2 03 U N Pad unit Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 03 B04 05 06 B06 07 B08 N S U F GN GS 3 4 5 6 6 7 8 Blast type: Work pieces can be removed easily.

Vacuum Pad

Applicable for the ZP series adapter How to Order ZP2 03 U N Pad unit Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 03 B04 05 06 B06 07 B08 N S U F GN GS 3 4 5 6 6 7 8 Blast type: Work pieces can be removed easily.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QY printing QY 8150SZ Printed in Japan. D-G

Electro-pneumatic Proportional Valve Series VEF/VEP 1

Symbol Body size Symbol Standard characteristics Symbol Port size Without sub-plate Rc 1/4 Rc 3/8 1 2 3 Nil 02 03 Symbol Set pressure range (MPa) 2 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 03 04 06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 1 3 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 1 4 45 1 2 3 4 12 8 4.5 2.5 Without sub-plate

VXD21/22/23

TI/ TIL Table (2) Rated Voltage-Electrical Entry-Electrical Option Table (1) Connection Size and Applicable Model PA Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G Connection Applicable model VXD2130-02 VXD2130-03, VXD2140-03 VXD2130-04, VXD2140-04 VXD2150-06 VXD2260-10 VXD2270-32 VXD2380-40

VXP21/22/23

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

Clean Regulator

SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 10 0 5 15 20 25 0 0 1000 500 500 1000 1500 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05

Electro-Pneumatic Proportional Valve Series VEF/VEP

characteristics Set pressure range (MPa) Without sub-plate Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2

Electro-pneumatic Proportional Valve Series VEF/VEP

Symbol Body size Symbol Standard characteristics Symbol Port size Without sub-plate Rc 1/4 Rc 3/8 1 2 3 Nil 02 03 Symbol Set pressure range (MPa) 2 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 03 04 06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 3 1 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 4 1 45 1 2 3 4 12 8 4.5 2.5 Without sub-plate

KC

Nijverheidsstraat 20 B-2160 Wommelgem Belguim TEL: 03-355-1464 FAX: 03-355-1466 TAIWAN SMC Pneumatics (Taiwan) Co.,Ltd. 17, Lane 205, Nansan Rd., Sec.2, Luzhu-Hsiang, Taoyuan-Hsien, TAIWAN TEL: 03-322-3443 FAX: 03-322-3387 POLAND SMC Industrial Automation Polska Sp.z.o.o. ul.

VS7-6

VFR VP7 Individual SUP Style An individual SUP spacer (VV72-P-03, 04) mounted on the manifold-block allows each valve to be supplied individually.

Electro-Pneumatic Proportional Valve Series VEF/VEP

characteristics Set pressure range (MPa) Without sub-plate Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 0.1 to 0.9MPa 2 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2

Body Ported Type Vacuum Ejector ZH Series

10 One-touch Screw-in One-touch 02 03 03 Screw-in Screw-in Screw-in ZH15DA09 11 11 One-touch One-touch One-touch 09 N03 11 One-touch Screw-in One-touch N02 N03 N03 Screw-in Screw-in Screw-in ZH18DA10 12 12 One-touch One-touch One-touch 10 03 12 One-touch Screw-in One-touch 03 03 03 Screw-in Screw-in Screw-in ZH18DA11 13 13 One-touch One-touch One-touch 11 N03 13 One-touch

Vacuum Pad

Applicable for the ZP series adapter How to Order ZP2 03 U N Pad unit Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 03 B04 05 06 B06 07 B08 N S U F GN GS 3 4 5 6 6 7 8 Blast type: Work pieces can be removed easily.

Vacuum Pad

Applicable for the ZP series adapter How to Order ZP2 03 U N Pad unit Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 03 B04 05 06 B06 07 B08 N S U F GN GS 3 4 5 6 6 7 8 Blast type: Work pieces can be removed easily.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

For driver of 200 W to 750W, built-in regenerative resistor is used. 02: LEC-MR-RB-032 03: LEC-MR-RB-12 11 13 11. OPTIONS AND PERIPHERAL EQUIPMENT 11.2.3 Selection of regenerative option POINT For the wire sizes used for wiring, refer to section 11.5. The regenerative option generates heat of 100 C higher than the ambient temperature.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

HRX-OM-M091

(Request):010307F5 [CR][LF] (Response):01030E00D40D02010A [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 0E Quantity of bytes to read 0007 Quantity of register to read 00D4 Information of 0h (circulating fluid discharge temperature) F5 LRC 0 Information of 0001h (Reserved)

HRX-OM-Q033

(Request):010307F5 [CR][LF] (Response):01030E00D40D02010A [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 0E Quantity of bytes to read 0007 Quantity of register to read 00D4 Information of 0h (circulating fluid discharge temperature) F5 LRC 0 Information of 0001h (Reserved)

HRX-OM-S010

(Request):010307F5 [CR][LF] (Response):01030E00D40D02010A [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 0E Quantity of bytes to read 0007 Quantity of register to read 00D4 Information of 0h (circulating fluid discharge temperature) F5 LRC 0 Information of 0001h (Reserved)