2 PORT SOLENOID VALVE FOR DUST COLLECTOR

VXF21A VXF22A VXF23A VXF24A VXF27B VXF28B VXF25(A,B) VXF26(A,B, C,D) Product number Orifice size mm 22 28 44 53 70 80 90 100 Air Fluid Minimum operating pressure Maximum operating pressure MPa 0.03 0.1 MPa 0.7 Fluid temperature -10 (Non-freezing) to 60 Ambient temperature -10 to 60 Coil insulation type Class B Enclosure IP65 Alloable voltage fiuctuation 10% of rated voltage AC VA 10 7

Multistage Ejector

Description Product number Remarks Sound Absorbing Material A Sound Absorbing Material B Suction filter 9 Silencer set ZL112-SP01 10 11 ZL212 Series No. Description Product number Remarks 10 Silencer set ZL212-SP01 Sound Absorbing Material A Sound Absorbing Material B 9 17 - Doc. no.

ＳＭＯＯＴＨ ＣＹＬＩＮＤＥＲ

Specifications Fluid Air Proof pressure 1.05MPa Maximum operating pressure 0.7MPa 12, 16 0.03MPa Minimum operating pressure 20 ~ 40 0.02MPa 50 ~ 100 0.01MPa -10 ~ +70 C, Built-in magnet type: -10 ~ +60 C (with no freezing) Ambient and fluid temperature Lubricant Non-lube (Do not lubricate) CM2YCG1YCA2Y +1.4 0 Stroke length tolerance (mm) CQSYCQ2Y +1.0 0 Cushion Rubber bumper (none for CA2Y

Mechanically jointed rodless cylinder Basic short type (Rubber bumper), Basic standard type (Air cushion) Slide bearing guide type (Air cushion)

When using an intermediate fixing spacer for the MY3B series, the maximum operation speed is 800 mm/s (500 mm/s for the MY3B16). -10 -20 -30 -40 -50 -60 -70 -80 0 0 to 10 10 to 20 20 to 30 MY3*16/20 Without spacer Short spacer Long spacer 0 to 12 12 to 24 24 to 36 MY3*25/32 Without spacer Short spacer Long spacer 0 to 16 16 to 32 32 to 48 MY3*40/50 Without spacer Short spacer Long spacer

Parallel Type Air Gripper

Replacement part/Grease pack part no.: GR-S-010 (10 g) 15 - 3-6. Construction / Parts list, seal list MHZAJ2-6 Double acting/ Finger open Single acting / Normal open Single acting / Normal closed Double acting/ Finger closed Components Components No. Description Material Remarks No.

Compact Guide Cylinder JMGP Series ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 25, 50, 100, 150, 200 Intermediate strokes are available as a special order. Refer to pages 10 and 11 for cylinders with auto switches.

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Slide Unit/Double Rod Type Series CX2 Slide Bearing: 10, 15, 25 How to Order Port thread type Symbol Bore size 10, 15 Type M thread Rc 1/8 NPT 1/8 G 1/8 Nil TN TF 25 CX2 N 15 100 B C X2 N 15 B 100 J79W DB With auto switch Made to Order Cylinder with auto switch Refer to page 465 for Made to Order specifications.

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Slide Unit/Double Rod Type Series CX2 Slide Bearing: 10, 15, 25 How to Order Port thread type Symbol Bore size 10, 15 Type M thread Rc 1/8 NPT 1/8 G 1/8 Nil TN TF 25 CX2 N 15 100 B C X2 N 15 B 100 J79W DB With auto switch Made to Order Cylinder with auto switch Refer to page 465 for Made to Order specifications.

DOC1018150

Cassette 10 Cassette 11 Seal NBR 11 Seal NBR 12 Plug Electroless Brass nickel Plated 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

EX600-SEN_eng

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status.

EX600-AX_AY_AM_eng

URL http://www.smcworld.com -10 V to 10 V -20 mA to 20 mA for 2 hours each in direction X, Y and Z respectively (De-energized) 24 VDC Class2, 2 A 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 0 V to 10 V 0 mA to 20 mA Content Content Content 0 V to 10 V 0 mA to 20 mA 0 V to 10 V 0 mA to 20 mA

Process Pump

Discharge capability -P.9 to 10 8. Troubleshooting P.11 to 12 9. Construction and operating principle -P.13 10. Operating principle P.13 11. Sensor mounting (leakage sensor) P.14 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Valve Controller

Fig. 9 Normal output OFFt0 Fig. 10 Sequence OFF0 Fig. 11 Sequence 6. Cascade connection There are only outputs up to 10 points (6 points in the case of VXFC06A) on a single board. However, it is possible to increase the output points by cascading (multiple board connection).

IBV-OMY0015

Pressurizing the air blow discharge port may result in the breakage of the product. 10 Revision history A: Specification and Notes added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation

XLA Series

Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for

XLA- ∗ -F7NJ ∗ - ∗ Series

Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/

XMH/XYH Series

Specifications Table 4 Model Note 1 XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures ,

CG1-OM0227

-2- / *3) 1 1.5 *3)1 1 () -3- 1. 1-1. 1.5MPa 1.0MPa 0.05MPa -10+70-10+60 +1.4mm 1000st 0 +1.8mm 1500st 0 / 2063 501000mm/sec 80100 50700mm/sec (P9, [2-6.]) () 2. 2-1.

CG1x-OM0006N

ON 23 4. 10. 24 5. 1 CG5SR CG5SV 2 15 3 16 NBR FKM 4 17 5 18 6 19 7 20 PET 8 21 9 22 10 11 12 13 14 1CG1 2 11. 25 Revision history 1: 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of