ZSE30/ISE30

x 0.8; T1 type: NPT 1/8, M5 x 0.8 Front case: PBT; Rear case: PBT; Piping port: C3602 (electroless nickel plated) Sensor pressure: Silicon; O-ring: NBR Material Weight 43g (without lead wire) Note 1) When switch output is selected, analog output is not available.

Pressure Control Equipment

1 Pressure Control Equipment Regulators Series Application/Characteristics Port size Set pressure (MPa) Option Page Miniature regulator ARJ1020F Direct operated relieving type Back flow function Manifold M5 0.1 to 0.7 14-4-4 1 8 / 14-4-6 Miniature regulator ARJ210 Direct operated relieving type Bracket Pressure gauge M5 to 0.2 to 0.7 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

ZSE1/ISE1

x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5

ZSP1

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

NVKF

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.

Clean Regulator

Relief port M5 thread The body material has been changed to aluminum. ITVH X234 SRH Standard model no.

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 777

2-Color Display

For vacuum/ compound pressure ZSE30A 01 N M Option 3 Operating manual Booklet Symbol Calibration certificate Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa Nil Y K T Piping Option 2 01 R1/8 (M5 female threaded) None Nil Bracket A N01 NPT1/8 (M5 female threaded) Straight type A1 C4H One-touch fitting 4 mm, 5/32 inch C6H One-touch fitting 6 mm Bracket B N7H One-touch fitting

AQ

01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 2 Note) AQ150 only AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F 554

Metering Valve with Silencer Series ASN2

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Series GS40 Digital Pressure Sensor

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Note 4) M5 fittings for M5 thread are attached without being incorporated.

PSE57  Series Pressure Sensor for General Fluids

output type 4 to 20 mA Port size Symbol Port size Model PSE570 PSE573 PSE574 PSE575 PSE576 PSE577 01 R1/8 (with M5 female thread) 02 R1/4 (with M5 female thread) shipped together.

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD VD W 2 1 1 G 2 01 VXZ For Water, Air, Vacuum VXE Made to Order (Refer to page 244.) Series VXP 1 10 Valve type Option 2 20 VXR

Model Av x 106 m2 C [dm3/(sbar)] N.C. 0.96 Cv 0.40 b 0.14 Cv converted 0.04 1 0.04 VDW10 M5 1.6 0.07 0.07 1.7 0.25 0.30 1.6 0.09 0.08 1.9 0.45 0.31 M5 1/8 (6A) VDW20 2.3 0.18 0.18 4.3 0.45 0.58 3.2 0.33 0.30 7.2 0.38 1.2 2 0.16 0.16 3.8 0.52 0.52 1/8 (6A) 1/4 (8A) VDW30 3 0.30 0.28 6.7 0.52 1.0 4 0.46 0.44 11 0.49 1.5 244

E-P HYREG ® VY1 Series

00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted Symbol 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 (3) (3) A M5 3(R) 1 8 2(A) 1(P) (3) (3) 1 1 4 1 4 3 8 3 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 4 1 1 2 1 3(R) 2(A) 1(P) 9 2 2 Note 3) Only

Lubricator Series AL10 to 60

Body size 10 20 30 40 50 60 AV Thread type AU Metric thread (M5) Rc NPT G Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 (2) IR M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order. Note 2) For M5 and NPT thread types.

Compact Manifold Regulator Series ARM5

Tightening torque recommended (M5: 1.5 to 2 Nm, R1/8: 7 to 9 Nm) For sealing, use a pipe tape.