Air Slide Table Series MXS

MTS With end lock (16) MXS16-R With buffer (16) MXS16-F 2 x M6 x 1 thread depth 10 Operating port 2 x M5 x 0.8 13 J 12 18 48 41 20 3 37.5 0.5 30 Other dimensions are the same as the basic style.

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A0.2 Bore size [mm] A [mm] B [mm] C [mm] D [mm] Hexagon socket head cap screw MGPM MGPL/A 12* 50 18 41 10 8 M4 x 0.7 16 56 22 46 12 10 M5 x 0.8 20 72 24 54 14 12 M5 x 0.8 25 82 30 64 18 15 M6 x 1.0 32 98 34 78 22 18 M8 x 1.25 40 106 40 86 22 18 M8 x 1.25 50 130 46 110 27 22 M10 x 1.5 63 142 58 124 27 22 M10 x 1.5 80 180 54 156 33 28 M12 x 1.75 100 210 62 188 39 33 M14 x 2.0 4.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41

SMC

G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Allowable radial load (N) Ta = I (Nm) (a) (b) Size I: Inertial moment High precision type High precision type High precision type High precision type Basic type Basic type Basic type Basic type Refer to page 11-9-7. . : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48

MG

Description Refer to How to Order for the standard model numbers on page 8-19-41. Part no. Applicable stroke (mm) 5 to 395 Part no.: MGPM50-35-HN A spacer 15 mm in width is installed in a MGPM50-50-HN. C dimension is 119 mm. Example Note 1) The minimum stroke for mounting auto switches is 10 stroke or more for two switches, and 5 stroke or more for one switch.

I/O Configurator (NFC version)

Detailed information of units 41 3.4.1. Information tab 41 3.4.2. Details of I/O monitor tab 50 4. Setting Function 57 4.1. Edit TAG 57 4.2. Software Control 57 4.3. Forced output 60 4.3.1. Forced output conditions 60 4.3.2. Forced output procedure 60 4.3.3. Forced output release procedure 63 4.4. Export Settings 64 4.5. Import Settings 66 4.6. Reading of the initial value 67 4.7.

Digital Flow Switch (Remote type sensor unit)

Refer to the outline dimension drawing (page 41) for mounting hole dimensions. The self tapping screws should not be re-used. Direct mounting (PF3W511/521) Mount using the self tapping screws (nominal size: 4.0 x 4 pcs.) for installation. The tightening torque must be 1.0 to 1.2 Nm. Refer to the outline dimension drawing (page 41) for mounting hole dimensions.

CS1

100 157.5 50 36 59 15 8 35 16 85 47 90 43 14 31 19 36 Lube Non-lube Air-hydro M30 X 1.5 to 1400 1401 to 1600 100 161 128 M14 X 1.5 188 112 180.5 50 36 59 15 9 35 16 14 19 47 90 43 31 36 1/2 3/4 M36 X 1.5 to 1400 1401 to 1600 18.5 106 197 182 144 M16 X 1.5 206 118 14 19 53 90 43 36 45 56 40 59 17 9 39 M40 X 1.5 3/4 to 1800 1801 to 2000 18.5 125 227 204 162 115 M18 X 1.5 231 132 60 48 17 41

MXS

MXU With end lock(16) MXS16-llR With buffer(16) MXS16-llF 2-M6 X 1 thread 10 deep MXS Operating port 2-M5 X 0.8 J 13 MXQ 12 18 48 MXF MXW 20 41 3 MXP 30 0.5 37.5 * Dimensions not indicated are the same as the basic sytle.

Rotary Table/

High precision type High precision type High precision type High precision type Ta = I (Nm) Basic type Basic type Basic type Basic type I: Inertial moment 1 2 3 7 10 20 30 50 70 100 200 31 41 0.56 41 Refer to page 3. 32 45 0.82 45 . : Angular acceleration Load . 33 48 1.1 48 2 = (rad/s 2) t 2 54 71 1.5 71 : Rotation angle (rad) 86 74 107 2.9 78 74 2.4 78 t: Rotation time (s) 166 137 197

Electric Actuator

Weight [g] D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Caution 0.5 8 8 7 Precautions 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

New

For the indicator lighted style, be careful not to damage the light with the lead wire of the cable. 41 Series VXZ Specific Product Precautions 6 Be sure to read before handling. Refer to back cover for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) and the Operation Manual for 2 Port Solenoid Valves for Fluid Control Precautions.

Mechanically Jointed Rodless Cylinders

41 RB1412 3.6 67.3 12 1.4 28.5 45.8 20.1 39.5 105 60.5 49 RB1412 3.6 67.3 12 5.9 24 41.3 30.1 48 128 73.5 60.5 RB2015 5 73.2 15 0.9 39 42.2 30.1 58.5 150 88.5 71 RB2015 5 73.2 15 2.9 37 40.2 36.1 74.5 178 108 91 RB2725 6 99 25 0.9 43 62 Note) When the stroke adjustment unit is used, the fitting type, which can be connected with the port on the body front and the back, will be limited.

AC Servo Motor Driver (Pulse input type)

Changing PD04 from 00212100 to 0021210D 0 D 41 - (2) Symbol allocation using the setup software: Changing pins CN1-16 to Gain changing selection (CDP). Change PD04 from 00212100 to 0021210D in the I/O tab. Select Single Axis Write. Cycle the power the parametersto be enabled.

Series LQ3 High Purity Fluororesin Fitting

M L K J H E t W1 W2 M 14 20 25 29 37 49 58 69 89 100 117 136 14.5 20.5 24.5 30.5 36.5 48.5 6 7 7 9 9 10 11 16 21 24 32 41 10 17 22.5 24.5 27 30 16 21 26 32 41 50 17 24 28 36 43 55 8 8 8 8 13 13 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3P1A LQ3P2A LQ3P3A LQ3P4A LQ3P5A LQ3P6A 1/4 (E) (E) L Panel Aperture (K) Straight Union : LQ3U (mm) Inch Size H Model Tubing O.D.

CRBU

Port locations: Axial direction CRBUWl-lSE (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 (Depth) Q2 R S1 S2 T U V W X Model 10.5 8.5 10.5 11 11.5 14 12 15.5 10.5 9.5 10.5 10 11 13 13 14 CRBUW10-lS CRBUW10-lSE CRBUW15-lS CRBUW15-lSE CRBUW20-lS CRBUW20-lSE CRBUW30-lS CRBUW30-lSE M3 (4) M5 X 0.8 M3 X 0.5 M5 X 0.8 M3 X 0.5 4 -0.004 -0.012 9 0 -0.043 29 22 14 8 3 25 31 41 15.5 M3 X 0.5 5 24 3.5

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

The auto switch may be damaged if a screw other than the one supplied is used. 25ALEC Weight (g) LEC S LEC SS-T D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 LEC Y LEC Y 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 Motorless 5 m (Z) 68 63 LAT Dimensions LZ (mm) D-M9 D-M9V LC3F2 Mounting screw M2.5 x 4 L Slotted set screw (flat point) 500 (1000) (3000) (5000) Indicator light

Environment

range [mm] R OA OB PA PB Q S T U PC W X Y Without lock With lock Without lock With lock Motorless 25 15 to 100 8 37 38 15.4 8.2 28 46 92 1 15.4 123 173 145 195 51 101 to 400 LAT 32 20 to 100 10 37 38 15.4 8.2 28 60 118 1 15.9 123 173 150 200 61 101 to 500 LZ [mm] Body Bottom Tapped Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41