MQQ

4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x 1.25 97.5 31.5 151 40.5 20.5 33 29 20 Rc 1/8 32 18 10 13 30 8.5 M26 x 1.5 M10 x 1.25 102.5 34.5 160 44.5 20.5 38 32 25 Refer to page 18 for details regarding the rod end nut and mounting nut. 14 Series MQM Refer to the standard

VCC

Indication of A B C D E F G H T VCKL1209-02F VCKL1008-02F VCKL1075-02F VCKL0806-02F VCKL0604-02F 19 9 to 12 Nm 12/9 13 43.5 33 30.5 10 18.5 17 6 to 9 Nm 10/8 11 42.5 33 30 9 18.5 17 6 to 9 Nm 1075 11 42.5 33 30 9 18.5 14 4 to 9 Nm 8/6 9 40 32 27.5 8 16 12 3 to 8 Nm 6/4 7 38.5 32 27.5 8 16 VNA VNB SGC SGH VNC VNH VND VCC VCC TQ 653 VCC Series Special Tools Tool for Attaching/Detaching Valve

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

13 11 13 13 25 30 30 32 40 40 36 46 46 12 15 15 7 9 9 6.5 8.5 8.5 57 (65) 66 (74) 71 (79) 19.5 22.5 25 40 43 46 46 50 53 73.5 82 87 The figures in parentheses are the normally open type. 24 25 Series VX Safety Instructions The following safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Slide Unit Series CX2/CXWM/CXWL

ZZ Max. 32 2 x 3.3 through 2 x 6.5 counterbore depth 3.3 With shock absorber Max.

Slide Unit Series CX2/CXWM/CXWL

ZZ Max. 32 2 x 3.3 through 2 x 6.5 counterbore depth 3.3 With shock absorber Max.

RSH/RS1H

load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 Data 10-9-13 13 Series RSH/RS1H Specific Product Precautions 1 Be sure to read before handling.

3 Port Solenoid Valve

KJH01-C1 1/8" one-touch fitting (Straight) 2a, 2b KJH03-C1 5/32" one-touch fitting (Straight) 13 VVQ1000-50A-N3 5/32" one-touch fitting (Straight) 1(P), 3(E) VVQ1000-50A-N7 1/4" one-touch fitting (Straight) 3 3 Port Solenoid Valve Series VV100/D-sub Connector Plug-in Connector Type Manifold How to Order Manifold U 1 VV100 10F C6 05 D A 2 D-sub connector type Mounting option Symbol A B Number

RSH/RS1H

/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 Data 10-9-13 13 Series RSH/RS1H Specific Product Precautions 1 Be sure to read before handling.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 Weight (g) ASV220F-U10/32-03 ASV220F-U10/32-07 5/32" 1/4" 10-32 UNF 10-32 UNF 8 8 9.3 12 9.6 9.6 22.8 23.6 27.6 28.4 11.1 11.1 31.4 31.4 28.6 28.6 27.7 27.7 24.9 24.9 12.7 13.7 8 9 Reference U10/32 thread dimensions after installation.

VXA21/22

40 E 25 30 D 11 13 C 10.5 13 [ ]: Individual pressure style 4.1-66 Direct Air Operated 3 Port Valve Series VXA31/32 For Air, Gas, Vacuum, Water and Oil Proper selection of body and sealing materials permits application of a wide variety of fluids.

MRQ

20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable side load on the piston end Unit: N 100 10 Stroke of linear part Size 40 40 50 4 5 5 10 15 20 25 30 40 50 75 100 32 40 32 14 14 13 13 13 12 12 11 10 9 20 25 30 2 2.5 3 23 23 22 21 21 20 19 18 16 15 2) Using the cylinder body installed vertically: To operate the rotary cylinder with the cylinder body

IP8001 Series

KFD2-SR2-Ex2.W Relay output No.IP8S-OM09 17 Description of Components Fig. 13 shows a description of each component.

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Title not found

(inch) 1 8 1 2 3 8 5 32 3 16 5 16 1 4 One-touch Inch-size tubing/UNF, NPT thread connection Possible to use in vacuum to 100kPa UNF 10-32 Nylon 1 16 One-touch Mini Series KJ Soft nylon 1 8 Polyurethane Unions Applicable area U.S.A. etc.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

32 14 2-M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 20 74 65 90 50 20 8-8-27

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

75.4 70 10.6 29 18.5 14 5 12 50 32 84 37 6.5 33.5 65h9 67h9 32H9 9 22H9 10 4.5 3 6.5 17 8.6 14 8.5 85.4 80 14 38 22 19 6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 10 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9

CVRA1-E

Periodic inspection 32 Replacement part 32 Disassembling procedure 33 Assemble procedure 34 Trouble shooting 37 -1- CRA1 Series CRA1 Series CRA1 Series CRA1 Series Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

VCL

VA VCL40: 19/16 VA VCL40: 13 VA Holding Note 1) When the ambient temperature or fluid temperature is 60C or more, use high temperature specifications (class H coil).

EXxx-OMU0020CN

EX245-SPN1 16 Valves (16 coils)32 Valves (32 coils) 2 2 4 D 0 1231 0.X byte Valves (16 coils) Valves (32 coils) 0 Valve coils 0-7 Valve coils 0-7 1 Valve coils 8-15 Valve coils 8-15 2 Valve coils 16-23 3 Valve coils 24-31 . 6-2 46 No.EX-OMU0020CN 6.4.

Vacuum Module Series ZX

Ejector assembly Gasket ZSE2, ZSP1, ZSE3 Vacuum switch Valve unit Interface plate Silencer case Filter case ZL ZX1-VA-DZX1-FG 12 ZX1-SAE 13 Silencer element (PV PS PD) ZY ZX1-PK 14 Seal set Note) Silencer assembly ZX1-HS2 (7,13) ZF Note) Caution when handling filter case 1) The case is made of polycarbonate.