SY3000/5000/7000/9000 Series (Pilot Valve:V100)

DIN rail VZ1000-11-1SY3000*-OMJ0003-A -24- Specific Product Precautions 18 Be sure to read before handing.

Pneumatic Transfer System Series MF

15 32 15 32 I 10 15 J 6 7 X 244 to 254 262 to 279 Y Note 2) I 10 15 J 6 7 X 233 to 244 224 to 241 Y Note 2) J 6 7 X 240 to 251 236 to 253 Y Note 2) H 298 339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C C Y Y B G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1)

EXxx-OMN0035CN

9 Bit 11 Bit 13 Bit 15 (EX600-DYF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 4 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -43No.EX-OMN0035CN-A EX600-DYB EX600-DYE -44No.EX-OMN0035CN-A EX600-DYF -45No.EX-OMN0035CN-A EX600-DM E D-sub (25 ) 8 8 F (32 ) 8 8 P PNP N NPN EX600-DME No. 1 LED 2 () 3 4 D-sub (No.4-40 UNC) 5 6 () -46No.EX-OMN0035CN-A

Fieldbus system Digital unit

Output 13 Output 15 Output signal Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 Output signal assignment (EX600-DY F) Group 0 1 2 3 4 5 6 7 Terminal position Pin 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 Output signal Pin 4 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -43No.EX-OMN0036-B Dimensions EX600-DY B EX600-DY E -44No.EX-OMN0036-B EX600-DY F -45No.EX-OMN0036-

Stainless Steel 316

M Weight (g) A D L D Applicable tubing (inch) 10 2.5 22 8.6 4 KQGS03-32 10-32UNF 25 18 5/32 M 2.78 12 20.9 11 4.1 KQGS03-N01S NPT1/8 A A L 2.5 22.8 13 4 KQGS07-32 10-32UNF 13 25.8 21.7 13 18.8 9.9 KQGS07-N01S 1/4 NPT1/8 4.76 Connection thread 20 20 10 KQGS07-N02S NPT1/4 H 5.56 14 30.5 26.4 17 17.2 KQGS09-N01S NPT1/8 (In case of R) 28.5 22.7 18 20.9 KQGS09-N02S 5/16 NPT1/4 D 23.3 Applicable

Digital Flow Switch (Integrated display type) ( compatible)

40 50 4.5 5 1.5 PF3W704 3/8 20.9 23.9 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W720 3/8, 1/2 20.9, 23.9 23.9, 26.9 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W740 1/2, 3/4 23.9, 29.9 26.9, 31.9 PF3W711 44 36 48 58 70 5.5 7 2 PF3W711 3/4, 1 41 -101No.PF-OMW0010-D PF3W721 Basic type Symbol Piping port size A AA B D E F G H J K L N P Model 11/4, 11/2 104 74 31 52 39.5 PF3W721 25 27.5 3.5 depth 14 G 11/

LEC-OM038xx

LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

External pilot port 11 11 67 VQZ L plug connector (L) DIN connector (Y) VQD 148 (3 Position)<150> 135 (Double)<137> 300 155.5 (3 Position) MAX.10 (Lead wire length) VZS 142.5 (Double) 97.5 (Single)<98.5> Indicator light Pg.7 101.5 (Single) 65.5<66.5> VFS 69.5 Applicable cord O.D. 3.5 to 7 Indicator light VS 64<67.5> Cover diameter 1.5 R1 R2 5 3 1 P VS7 Cross section 0.23mm2 93.5 86 < >

MRQ

to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 12.5 3 15 20 32 15 17.5 20 4 25 30 30 12.5 15 3 (mm) L Max. 32 Max. 31.5 20 Size 32 40 15 40 17.5 20 4 Possible to change the specification from standard to"-X5" 25 Specify the part number for hexagon

JXCx-OMU0026

Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2 Mounting the controller . 11 3.3 Install the setting software and the driver . 11 3.4 Wiring and connection . 11 3.5 Power supply, Start-up of controller setting software, setting date and time, Alarm and error check . 11 (1) Supplying power . 11 (2) Start-up of controller setting software . 12 (3) Setting date

MGP

M 10 16. 16-1. 1 22 (mm) gfcm) (mm) 12 RTW-13 5 14 16 RTW-18 6 34 20 RTW-22 8 52 25 RTW-26 10 88 32 RTW-34 14 220 40 RTW-42 14 220 50 RTW-52 17 440 63 RTW-62 17 440 80 RTW-82 22 1,240 100 RTW-102 27 2,000 16-2. 1) 1 1 2) 2 2 11 3) 32 4) 3 3 16-3. 2JIS2 1 , 4 2 3 4 16-4. 1 5 5 6 6 12 () 32 () 32 7 7 () 8 2 1 13 17. 17-1.

New

Series VXF2 Dimensions: Flange body I type VXF26C<<< Conduit terminal Conduit 247 247 S S J J Qp2 Tp2 K 24.4 Q z280 I R 24.4 I R 1/2 Exhaust port K 1/2 Exhaust port U (32) G1/2 G1/2 E (32) U 24 97.5 E 97.5 6 x M10 x 1.5 x 30 24 6 x M10 x 1.5 x 30 (32) (17) 106 (17) 106 Faston terminal 247 S J 24.4 I R 1/2 Exhaust port K Q 11 (17) 97.5 E U 24 6 x M10 x 1.5 x 30 (32) Note) Refer to page 24

58

71 15 43 17 15 25 32 32 64 M14 x 1.5 Up to 1000 +0.084 0 0.1 0.3 +0.3 +0.1 0 0.2 50 47 157 128 160 17 32 71 15 43 17 15 28 36 36 72 M14 x 1.5 Up to 1000 +0.100 0 0.1 0.3 +0.3 +0.1 0 0.2 56 53 177 144 180 20 38 78.5 15 42 20 18 32 40 40 80 M16 x 1.5 Up to 1200 (mm) With rod boot Bore size (mm) Without rod boot K KA L N P S U RR MM l Z1 ZZ1 Z ZZ e f h H 125 140 160 15 30.5 27 1/2 65 98 35

MGQ

For details, refer to page 8-30-32. 8-20-11

SI unit ( device)

No.EX-OMW0016-A PRODUCT NAME SI unit ( device) MODEL / Series / Product Number EX260-SIL1 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product elements 9 Summary of product function 10 Installation and Wiring 11 Installation 11 Wiring 12 LED Indication, Settings and State Monitoring 13 LED indication 13 Switch setting (Process data size / Data transmission

VQ7-6/7-8

18 (20) 44 (58) 44 (58) Indicator light 5-Rc3/8, 1/2, 3/4 (P, A, B, R1, R2) Rc1/8 Port Y (PE) SMC 108.5 (121.5) 23 (30) (ports A, B) 12 Y 50 (63) 3 5 38 (53) 38 (53) 32 (42) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P Rc1/8 Port X (PE) 2-Rc3/8, 1/2, 3/4 Ports A, B 30 (42) 30 (42) 10 (11) Dimensions inside ( ) are for Rc3/4 2 position/Single : VQ7-8-FG-DSC Single (reverse

EXxx-OMY0006CN

10-11 Bit 7 Ch3/7(3) Table 10-11 58 No.EX##-OMY0006CN 10.7.

MLGC

32 31 60 95 60 12 63 125 132 103 1/8 Rc(PT) 70 40 7 7 9 M8 X 1.25 20 32 38 60 95 125 60 12 132 63 104 1/8 Rc(PT) 45 8 8 11 M8 X 1.25 25 38 47 70 75 12 73 150 162 115 82.5 115 Bore size (mm) Y WH Wq X Z 20 25 32 40 23 30 30 146 182 25 30 37 167 199 25 37 167 202 28.5 20 44 210 227 33 Without rear plate Long stroke Stroke range (mm) Bore size (mm) Bore size (mm) Z R Y 20 25 32 40 20 25 32 40

CE

Case screw gasket Stainless steel Pin NBR 11 32 to 63 29 Piston seal Lead-bronze casting NBR Sensor guide 12 32 to 63 30 Rod seal Carbon steel NBR Case setting nut 40 to 63 31 Gasket 13 Rolled steel NBR Cushion ring A 40 to 63 32 Cushion seal Rolled steel 14 NBR Cushion ring B 40 to 63 33 Piston gasket NBR 15 Cushion valve 40 to 63 34 Port seal Rolled steel NBR 16 Piston nut 40 to 63 35

Series AP500

Specifications AP501mmA 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) AP510 1 to 100 psig (0.007 to 0.7 MPa) AP506 1 to 60 psig (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.06 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max