EX500 Gateway System Serial Transmission System Series SV ® How to Order Manifold Mounting Direct mounting Nil D DIN rail mounting (With DIN rail) Series D0 DIN rail mounting (Without DIN rail) 1 SV1000 D3 When a longer DIN rail is For 3 stations

Tie-rod base SS5V W 1 A2W D 05 U 10S Cassette base U SS5V W D 05 16S 1 A2W Enclosure IP67 specifications DIN rail length specified Series Standard length Nil 3 SI unit 1 2 SV1000 SV2000 Specify a longer rail than the standard length.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

NVV5Z5-4 2-( 05 ) 1 -r87T) Y -r.Stationsa asize ot A, B port E-?

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Body class LQ3 Connecting tubing outside diameter Symbol Ammonium hydroxide compatible 2 1 3 4 5 PFA PPS PTFE N Metric sizes 03 04 06 08 10 12 19 3 4 6 8 10 12 19 Pilot port thread type Symbol Body class 1 2, 3, 4, 5 1, 2, 3, 4, 5 Thread type 4 One-touch fitting 6 One-touch fitting M5 x 0.8 Nil 2 Port B (OUT) different dia. size Inch sizes Symbol Nil Application Ports A & B same size 03 05

Soft Start-up Valve

Without light SY100-61-1 With light Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Without light SY100-82-1 Caution With light Rated voltage Voltage symbol Part number 24 VDC 24 VN SY100-82-3-05 12 VDC 12 VN SY100-82-3-06 100

Manifold Specifications

Valve stations 02 2 stations 05 5 stations 10 stations 10 Precautions Be sure to read before handling. For Safety Instructions and Splenoid Valve Precautions, refer to page 3-13-2. Mounting Caution 1. SUP port and EXH port are positioned on both sides of manifold block. Air can be supplied from either side; however, the unused port must be plugged in this case.

Manifold Specifications

Series VS3115/3110 Manifold Specifications Specifications Manifold type Max. number of stations B mount 10 stations Port location/Port size P A E P A E Port direction Applicable valve model Exhaust type Side Side Side Side Bottom Side VS3114-00 Base Base Base Common 1 4 3 8 3 8 Accessory AXT338-17A Blanking plate (With gaskets and screw) How to order manifold VVS31 1 0 05 Thread type EXH

ZU

Matching the Ejector to the Vacuum Circuit Caution For precautions associated with matching the ejector to the vacuum circuit, refer to the technical data on page 13-1-10 to 13-1-19. 13-6-2 Vacuum Ejector In-line Type Series ZU How to Order ZX ZU 05 S ZR ZU07 ZM Maximum vacuum pressure S 85 kPa ZH L 48 kPa ZU05 ZU Nozzle diameter 05 0.5 mm ZL 07 0.7 mm Circuit diagram ZY EXE ZQ Specifications

Compact and

For vacuum equipment precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www. smcworld.com Nozzle diameter Port size 05 0.5 mm 07 0.7 mm Nil 6 One-touch fitting 01 Rc1/8 female thread Symbol EXH Vacuum pressure reached S 90 kPa L 48 kPa Mounting P V Caution Specifications 1 .

Body Size: 05 (400 L/min. 14.1 scfm), Thread Type: Body Size 05: M Thread; Body Size 10-40 R Thread, Port Size: M5 (M5 x 0.8)

Air Cylinder Series CS1

30 M30 x 1.5 35 98 110 318 82 75 40 133 341 364 0.2 stroke Lube Non-lube Air-hydro 15 31 24 M30 x 1.5 35 98 110 318 82 75 40 133 341 364 0.2 stroke 17 36 26 M36 x 1.5 39 106 120 346 82 75 40 141 367 388 0.2 stroke 20 41 31 M40 x 1.5 39 111 135 381 92 85 45 153 399 417 0.2 stroke Lube Non-lube 20 46 31 M45 x 1.5 39 111 135 381 96 90 45 153 399 417 0.2 stroke 25 56 35 M56 x 2 49 141 160 461

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

M30 x 1.5 35 98 364 Lube Non-lube Air-hydro 1/2 341 133 40 75 110 318 0.2 stroke 15 31 24 M30 x 1.5 35 98 364 3/4 141 367 75 40 120 346 0.2 stroke 17 36 26 M36 x 1.5 39 106 388 3/4 399 153 45 85 381 135 0.2 stroke 20 31 41 M40 x 1.5 39 111 417 3/4 1 399 45 153 381 90 135 0.2 stroke 20 31 46 M45 x 1.5 39 111 417 Lube Non-lube 477 176 55 105 160 461 0.17 stroke 25 56 35 M56 x 2 49 141 493

Step Motor Controller

While the test function operates at manual mode, only the output is valid. 31

Step Motor Controller

In the unlikely event that malfunction is caused by ground, please disconnect the unit from ground. 31 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Electric Actuator

Description Material Note 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 No.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

: EtherNet/IP (87.9) 82 (85) 82 1 31 (35) 31 (35) 4.5 4.5 For body mounting For body mounting 1 152.2 170 152.2 170 161 161 18.2 4.5 For body mounting 18.2 4.5 For body mounting Trademark DeviceNet is a trademark of ODVA.

3 Port Solenoid Valve/

Symbol M12 connector pin number Wiring specication G1/2 terminal number Wiring specication r w (32) (12) (11) q 12 11 (12) e w w (31) e (31) (11) r q 32 31 q e (32) r VP542(R)/742(R)-X536 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) Safety limit

Cylinder with Lock Series CLS

27 M30 x 1.5 Up to 1000 3 30 14 35 50 47 161 78 18 110 146 1/4 128 36 90 59 43 16 114 64 110 M14 x 1.5 15 31 27 M30 x 1.5 Up to 1000 5 46 56 53 182 95 23 132 169 1/4 144 40 90 59 43 14 18.5 130 74 120 M16 x 1.5 17 36 30.5 M36 x 1.5 39 Up to 1200 16 30 60 106 118 48 17 135 41 25 39 63 204 36 167 195 3/8 162 45 115 70 18.5 149 86 20 35 M18 x 1.5 M40 x 1.5 5 M12 x 1.75 Up to 1200 21 34

3 Port Solenoid Valve/

M12 connector pin number G1/2 terminal number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) 3(R) (31) e (11) q 3(R) (31) e (11) q 3(R) (31) e (11) q 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal

CLS

31 36 41 46 56 14 14 14 17 17 20 35 35 39 39 39 49 Up to 1000 3 5 30 46 M14 x 1.5 M30 x 1.5 161 78 18 110 146 128 16 114 64 110 27 Up to 1000 M16 x 1.5 M36 x 1.5 182 95 23 132 169 144 18.5 130 74 120 30.5 Up to 1200 16 21 35 5 5.5 6 30 34 42 25 31 41 M18 x 1.5 M40 x 1.5 204 106 36 167 195 162 18.5 149 86 135 35 Up to 1200 M12 x 1.75 118 226 124 40.5 187 216 182 18.5 165 97 135

SI unit ( device)

30 29 28 27 26 25 24 31 30 29 28 27 26 25 24 Force output 4 24-31 Output 28-31: Setting value F0 1 1 1 1 0 0 0 0 0F 0 0 0 0 1 1 1 1 Hold last state Structure of Output Switching Counts (index68) The output switching count parameter consists of thirty-two sub-indices that represent bit fields with a size of 32 bits each.