Cylinder with Lock

H6 K1 K2 (Max.) l1 l3 (Max.)

Vacuum Ejector Series ZM

10 36 ZMA (Needle fully open) 60 72 84 ZQ ZH 4 x 5.6 Mounting hole 14 Pitch P = 16 14 ZU L1 ZL 1/8 (Rc, NPTF, G) Individual air pressure supply port (P) ZY 1/4 (Rc, NPTF, G) Common air pressure supply port (P) ZF 2 x M5 Common pilot pressure exhaust port (PE) ZP SP A ZCUK 119 AMJ Left Right AMV 77 63 52 AEP 24 HEP 8 2 x Rc1/8 (1/8-27NPTF, G1/8) Vacuum port (V) 10 Related 22 Equipment L2 L3

Compact and Lightweight

L1 L21 L3 M1 d2 M3 Q1 D22 2 x F VAC.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.

Vacuum Unit

Symbol Note L V V Cannot be selected when e is N L1 None V L2 V None Cannot be selected when e is P or T L3 None None 4 For the connector length other than 300 mm, order the connector assembly on page 32 separately. t Vacuum (V) port y Option5 (For details on the Function/Application, refer to page 42.)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

V or less L3: Analog output: 1 to 5 V or 0 to 10 V can be selected.

Air Fittings & Tubing

(mm) Thread R(PT) L1 D1 D2 L2 L3 M Part No.

VFR

(MP) L3 (AP) Formula L1 = 28 x n + 47 L2 = 28 x n + 56 L3 = 28 x n + 194 L3 = 28 x n + 235.5 3 131 140 278 319.5 4 159 168 306 347.5 5 187 196 334 375.5 6 215 224 362 403.5 7 243 252 390 431.5 8 271 280 418 459.5 9 299 308 446 487.5 10 327 336 474 515.5 6-Rc 1/4 (P , EA, EB port) 3-5-26 27 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR2000 Plug-in type/Non

90

Switch for Vacuum Specifications) B C D J K P L W (without supply/release valve, without switch, pressure sensor) KJR KJRN L to L3 C to L3 06 P 560 56 P to J N 00 i Optional Specifications/Functions/Applications Note 19) Q 08 Type Function/Application Symbol Nil L to N A 07 ZK2 07 Without option B 10 09 Bracket P to N C to N With one bracket for mounting a single unit (Mounting screw is

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) Y L2 L2 max Size (mm) E3 = E1 = Y = 10 3 to 8 5 ( 8 Y) to (Y 1) Y-1 L1 L3 max X Size L2 = L4 = 10 9 (14 X) to (X 1) 15 3 to 9 6 ( 9 Y) to (Y 1.5) Y-1.5 3 to 14 X 1 L1 = 15 10 (18 X) to (X 1.5) 20 3 to 10 7 (10 Y) to (Y 1.5) Y-1.5 3 to 18 X 1.5 L3 = X = 20 10 (20 Xs) to (X 1.5) 30 5 to 13 8 (13 Y) to (Y 2) Y-2 3 to 20 X 1.5 30 12 (22 X) to (X 2) 40 7 to 15 9 (

Compact manifold regulator ARM5 Series

L1=(14 x n)+36 10 16 14 10 14 Y W Pressure gauge (Accessory) V X 2 x 4.3 L3=50+R+V L4=50+T+X H H L L S S O O M4 thread hole U U C C P P K K 50 SMC 25 S T R L2=(14 x n)+29 29 55 (Max. 58) Note) U IN IN IN 33 15 14 Note) Max. dimension is the size when the knob is unlocked.

Series VQ Metal Seal/Rubber Seal Body Ported

(mm) L1=10.5n+14.5 L2=10.5n+25 n L 1 35.5 46 125 135.5 16 15 182.5 193 275 285.5 14 172 182.5 262.5 273 13 161.5 172 250 260.5 12 151 161.5 237.5 248 11 140.5 151 225 235.5 10 130 140.5 212.5 223 9 119.5 130 212.5 223 8 109 119.5 200 210.5 7 98.5 109 187.5 198 6 88 98.5 175 185.5 5 77.5 88 162.5 173 4 67 77.5 150 160.5 3 56.5 67 150 160.5 2 46 56.5 137.5 148 VQ4 25 35.5 112.5 123 L1 L2 L3

Electric Actuator/Slider Type

L3 [mm] L3 [mm] L3 [mm] L3 [mm] 1,000 1,000 1,000 Mer m 500 500 500 500 0 60 50 40 30 20 10 0 0 2 4 6 8 10 Work load [kg] 0 0 Work load [kg] 0 0 Work load [kg] 0 Work load [kg] 5 10 15 20 10 20 30 40 1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L4 [mm] L4 [mm] L4 [mm] L4 [mm] 1,000 1,000 1,000 500 500 500 500 Mep m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 20 0 25

KRM

(mm) Model N L1 L2 Port B Min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 76 10 6 6 10 29 47 19.5 31.5 21.5 31 13 13.5 17 21 7.5 10 102 6 85 10 116 41 39 55 73 KRM11-08-12-10 KRM11-08-12-6 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 57 86 Dimensions: KRM12 2-connection thread 2-4.5 mounting hole N-applicable tubing O.D.

VK300

7 44.5 (Station 1) (Station n) 4 x M3 x 0.5 depth 6 (Bracket mounting screw) L Dimension n L n: Stations 1 35 27 20 396 388 13 32 51 70 89 108 127 146 165 184 203 222 241 260 279 298 317 336 355 374 2 54 46 3 73 65 4 92 84 5 111 103 6 130 122 7 149 141 8 168 160 9 187 179 10 206 198 11 225 217 12 244 236 13 263 255 14 282 274 15 301 293 16 320 312 17 339 331 18 358 350 19 377 369 L1 L2 L3

VK300

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M3 x 0.5 depth 6 (Bracket mounting screw) (Pitch) n-Rc 1/8 (A port) L Dimension n: Stations n L 1 37 27 2 56 46 3 75 65 4 94 84 5 113 103 6 132 122 7 151 141 8 170 160 9 189 179 10 208 198 11 227 217 12 246 236 13 265 255 14 284 274 15 303 293 16 322 312 17 341 331 18 360 350 19 379 369 20 398 388 L1 L2 L3

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93 1 5 Port Pilot Operated Solenoid Valve Rubber Seal Series VF1000/3000/5000 VK VZ Large flow capacity Yet compact size.

Vacuum Module Series ZX

L3 L2 L1 4 10 Vacuum switch ZSE2 8 Pressure setting trimmer 15 (Needle fully open) Filter Body (Air operated type) (ZX1A) 18 Adapter B M5 Pilot port 9.3 (44) M5 External release port 13 22 35 37.4 45.4 Adapter D 58.3 Individual spacer ZX1-R1 Release valve VJ314 Pilot valve for supply (N.C.) VJ114 Pilot valve for supply (N.O.)

Base Mounted How to Order Manifold VQC1000 Series Plug-in Unit

(Except double wiring) With name plate External pilot Direct EXH outlet with built-in silencer C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow with 3.2 One-touch fitting Top ported elbow with 4 One-touch fitting Top ported elbow with 6 One-touch fitting M5 thread

Table of Contents

Mep Mep = 1/3 We x 9.8 (L3 + C) Examine Mep.