Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Rotary Actuator/Vane Type

to 22 2 to 22 40 6.5 to 30 4.5 to 30 3 to 30 4.5 to 30 Symbol: A57 Symbol: A58 Both the long shaft and the short shaft are shortened.

CRBU

show size 30 actuators.)

ZP

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

ZP

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

Air Cylinder Series MB

60 + 30 (n 4) 2 (n = 4, 8, 12, 16) 65 + 30 (n 4) 2 (n = 4, 8, 12, 16) 70 + 30 (n 4) 2 (n = 4, 8, 12, 16) 75 + 30 (n 4) 2 (n = 4, 8, 12, 16) 85 + 30 (n 4) 2 (n = 4, 8, 12, 16) n 2 (Different surfaces) 2 (Same surface) 60 90 65 95 75 100 80 105 85 110 90 125 D-A3 D-G39 D-K39 65 + 30 (n 2) (n = 2, 4, 6, 8) 75 + 30 (n 2) (n = 2, 4, 6, 8) 80 + 30 (n 2) (n = 2, 4, 6, 8) 85 + 30 (n 2) (

Table of Contents

to 30 5 to 7 11 to 13 14 to 16 20 to 22 VMG Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand Recommended tightening torque (Nm) Nominal size of Uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2.

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Dual Rod Cylinder Series CXSJ/CXS

Bore size 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

Made to Order

MGC series 20 to 50 MGC Series (mm) C port SZ + Stroke B Cushion valve (Width across flats WH) Front mounting flange Bore size (mm) GC GD SA SB W 1 W 2 A, B port A port W 2 W 1 A 20 25 32 40 50 30 30 21 9 50 87 30 30 C port D port 21 9 50 87 B port W 2 W 1 10 A' 25 30 23 9 52 91 20 20 24 8 59 99 Cushion valve (Width across flats WH) D port ZZ + Stroke A + Stroke B SB + Stroke B SA + Stroke

Possible to transfer a workpiece at low-speed.

20 30 40 Size 20 30 40 The figure shows the view from the long shaft end.

Air Cylinder Series CM2

15 24 9 62 14 13 5 20 M8 x 1.25 M20 x 1.5 133 142 15.5 10.5 8 1 25 22 9 30 25 10 19 10 13 8 45 8 30 15 30 9 62 14 17 6 26 5.5 M26 x 1.5 137 146 M10 x 1.25 19.5 10.5 33.5 8 1 32 22 9 30 25 10 19 12 13 8 45 10 30 15 9 64 14 17 6 26 5.5 M26 x 1.5 139 148 M10 x 1.25 19.5 10.5 37.5 34.5 4 1 40 24 10 11 11 38 15 30 14 16 50 12 39 88 18 22 8 21 7 M32 x 2 32 M14 x 1.5 177 188 13.5 46.5 42.5 41.2

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend Model C Mounting bolt Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5S -10S CQ2B40-5S -10S CQ2B50-10S -20S CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5T -10T CQ2B40-5T -10T CQ2B50-

Air Cylinder Series CA2

30 30 30 30 34 30 31 31.5 31.5 30 30 37 71.5 81.5 38.5 38 73 69 81 69 37.5 46.5 34 34 34 34 34 38 34 35 35.5 35.5 34 34 42 76.5 86.5 42 42 78.5 77 86.5 77 43 52 41 41 41 41 41 44 41 41.5 43 43 41 41 49 83.5 93.5 46.5 47 85.5 91 93.5 91 51.5 58.5 49 49.5 49 49.5 49 52.5 49 50 51 51 49.5 49 57.5 92 102 53.5 53.5 94 107 102 107 58.5 66 55.5 57.5 55.5 56.5 56 61 56 58.5 57.5 57.5 56.5 56 68

Table of Contents

4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

Vacuum Pad

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

Vacuum Pad

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

Vacuum Pad

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

Vacuum Pad

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

Rotary Actuator

5 to 22 2 to 22 2 to 22 Size: 10 to 30 Size: 40 40 40 18 to 30 6.5 to 30 4.5 to 30 18 to 30 Symbol: A57 Both the long shaft and the short shaft are shortened.