3 Way,3 Port Solenoid Valve NVZ Series

C onne c t ion,/ Di sc onne c tion of Plug OConnection _. Push lhe connector straight on to the pins of the solenoid, making sure the lip of the lever is securely positioned in the groove of the solenoid cover. ODisconnection Pinch the lever against the connectol and pull connector away from the solenoid.

NVZseies

C onne c t ion,/ Di sc onne c tion of Plug OConnection _. Push lhe connector straight on to the pins of the solenoid, making sure the lip of the lever is securely positioned in the groove of the solenoid cover. ODisconnection Pinch the lever against the connectol and pull connector away from the solenoid.

Fluoropolymer Piping Equipment

Note) Metric size 6, 8, 10 10, 12 Inch size 1/8", 3/16", 1/4" 1/4", 3/8" 3/8", 1/2" LVC Orifice diameter 4.4 8 10 0.4 1.2 1.8 Flow rate characteristics Av x Kv LVA 0.5 1.4 2.2 Cv Withstand pressure (MPa) 1 LVH Operating pressure (MPa) 0 to 0.5 Fluid temperature (C) 5 to 90 LVD Ambient temperature (C) 0 to 60 Weight (kg) LVQ 0.055 0.115 0.185 Note) For details of the applicable tubing sizes

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

3 Ejector assembly ZK2 EJ A W 10 Nozzle nominal size 07 0.7 10 1.0 12 1.2 15 1.5 Bellows type with groove Flat type with groove 257 ZHP Series Dimensions 30 N 70 Silencer In the case of Flat type P 16.6 EXH. 24.7 P F E D C A PD port 3 6.2 K M Female thread mounting M Male thread mounting Unlocked: 32.2 PD port 2 Locked Unlocked J PD port 1 G H P port L E F 6.2 10 7.8 6.2 Lock screw 14.4 1.4

VK300

[dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] V100 Grommet b Cv b Cv b Cv b Cv S070 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19 0.15 0.47 0.39 0.39 0.47 0.39 0.80 0.55 0.55 0.80 0.55 0.40 0.35 0.35 0.40 0.35 0.27 0.32 0.32 0.27 0.32 0.13 0.10 0.10 0.13 0.10 0.19 0.14

VSA4

dm3/(sbar)] 6.4 8.7 9.2 6.4 8.7 9.2 6.2 8.1 10 6.6 8.9 11 Port size Rc 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 Note) Weight (kg) A/B EA/EB Pilot port size SA C[dm3/(sbar)] 6.3 8.2 9.6 6.3 8.2 9.6 5.8 7.5 9.5 5.5 6.7 9.4 b 0.16 0.28 0.14 0.16 0.28 0.14 0.23 0.27 0.18 0.24 0.25 0.15 b 0.13 0.13 0.17 0.13 0.13 0.17 0.15 0.11 0.14 0.15 0.14 0.14 Cv 1.4 2.1 2.2 1.4 2.1 2.2 1.4 2.0 2.4

TA301

DXT060-27A Flow Characteristics/Weight Weight (kg) Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Valve model b Cv Grommet Port size b Cv b Cv C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] b Cv 0.63 0.30 0.16 0.59 0.30 0.15 0.59 0.32 0.15 0.65 0.30 0.16 0.11 (With bracket: 0.13) 0.66 0.28 0.16 0.60 0.29 0.15 0.61 0.32 0.15 0.66 0.30 0.16 0.34 0.26 0.084

IDX-OM-W053

CM PE FM1 PRS P FM2 PE CM FM 12 OLR PTC PTC ILS PRS TB PE GFCI EDV 6 3 6 6 4 2 6 4 7 A A 7 1 7 2 A m 3/h(ANR) 1) (50/60Hz) 0.32/0.375 10 1ANR 65% 2 7 3 7 1 8 C 8 C 8-1 8-2 1) 2) 8-3 8 1 9 G G 9-1 9 1 10 H 10 H 10-1 ( ) 10-2 () AD48-2-A 10 IDFA6E-20-H N.O. () 0.151.0MPa 10 1 10 H IDF-S1941 () 1 AD48-2-A 1 1) 2019 3 2019 2 SERIAL No.XP IDF-S1940

KR

(mm) Model N L1 L2 Port B Min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 76 10 6 6 10 29 47 19.5 31.5 21.5 31 13 13.5 17 21 7.5 10 102 6 85 10 116 41 39 55 73 KRM11-08-12-10 KRM11-08-12-6 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 57 86 Dimensions: KRM12 2-connection thread 2-4.5 mounting hole N-applicable tubing O.D.

CEP1

R04-J8M7.3 AC100240V DC24V RS-232C RS-232C + BCD 05 5 10 10 15 15 20 20 *1) ( ) () 2-3 CEP1 CEU5 3 CEU1 , CEP1 CEU5 ,CE1-R,23m ,, (8 ) CEP1 ,CE1-R, CEP1 ()() CEP1 ,CE1-R C C () CEP1, CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 3 3-1 CEP1B12 CEP1B20 () 1.5MPa 1.0MPa 0.15MPa 0.1MPa 50~300mm/s 0~60 () 25~85%RH() 0~+1.0 2 3 , JIS2 3-2 7,6 () [,R03-J8M] 23m*

MH-OMY0004

C 1C 2 3 :MH-G04(30g) C 17 3-4. C C 1. Assy 18 3. 4. 5. 6.

PSxx-OMV0003CN

OFF No.3 No.4 No.5 No.6 -73No.PS-OMV0003CN-G No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -74No.PS-OMV0003CN-G No.

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

PSE530/200

Internal data error. 16-3-10 10 Series PSE530/200 Multi-channel Controller/Pressure Sensor Operation 1: Initial Setting 1 Channel selection MPa kPa OUT1 OUT2 CH 1 2 3 4 CH2 CH3 CH4 CH1 PRESSURE ZSE ISE SET PSE SET button and hold for 2 seconds or longer.

Solid State Auto Switches

Weight (g) Applicable bore size(mm) Weight Applicable bore size(mm) Weight Auto switch model Auto switch model D-A33C-4, A34C-4 D-A33C-5, A34C-5 D-A33C-6, A34C-6 D-A33C-8, A34C-8 D-A33C-10, A34C-10 D-A44C-4 D-A44C-5 D-A44C-6 D-A44C-8 D-A44C-10 162 166 184 210 232 160 164 182 208 230 40 50 63 80 100 40 50 63 80 100 Dimensions (mm) T Applicable bore size (mm) 40 50 63 80 100 C 44 52 64 78 92

Air Cylinder

7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87 26 50 10 14 66 16 M10 x 1.25 12 23 14 M26 x 1.5 28 3/8 88 168 Rod end nut (Standard) 30 d D C H B [mm] Part no.

PF-OMN0009_C

1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

10-24UNC 10.40) 10-32UNF : 270" Rotation Port Size. @ An gle Adj ustin g U nit/D im e ns io n s NCDRB18W10.15.20.30 (inch) N C R 8 1 8 W U 1 0 . 1 5 . 2 0 . 3 0 6-Q(NCRB1BW15, 20, 30) Include marka Auto Switch Compatible Type NCDRBIBWUi0. 15 NCDRB1BWU20.30 s*nci' u"it { Adjustable rotation{ *or"t "aru"ro. { With Auto Switch Appendix How To Set Rotation Time Ust@: Stable Rotation Time Regulation

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Dimensions Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 10 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 5