Specifications: E (Oil-free, External parts copper-free), Display Pressure: K1 (-100 to 100 kPa), Connection Thread: 01 (R 1/8), Option: None, Attachment: C (Clear Cover w/o Protrusion, is not Removable)

KFx-OMY0034

size Nm d) Hardening, deterioration or softness of tubing e) Loosening of the union nut G1/8 2.9 to 3.2 (3) Do not repair the fittings or patch the G1/4 5.7 to 6.3 tubing for reuse.

SI unit for CC-Link

Applicable solenoid valve series Representative series Applicable series SQ series SQ1000, 2000 series SZ series SZ3000 series -18No.EX-OME0011-H Dimensions -19No.EX-OME0011-H Revision history B: New format C: Error correction D: Add the precautions and change into the latest format E: Terminal screw change F: Modified errors in text.

Stations: 05 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs, with Unit Selection Function), Leadwire: without Leadwire, Unit Options: C [Vacuum Pump System PE Port Female Thread

System: Q (Vacuum Pump System for Manifold), Valves: R (Supply Valve; Self-holding, Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs), Connector: L3 (L-type Plug Connector), Vacuum, V Port: 08 (Metric Size, ø8 One-touch Fitting), Bracket: w/o Option, Pump System PE Port Female Thread: C (with Pump System PE Port

Digital Flow Switch for Water Series PF3W 3-color display ®

Output specification/Temperature sensor Integrated display R Symbol OUT1 OUT2 Temperature sensor Flow rate Flow rate Temperature NPN PNP Analog 1 to 5 V Analog 4 to 20 mA Analog 1 to 5 V Analog 4 to 20 mA A B C D E F G H AT BT CT DT ET FT NPN PNP Analog 1 to 5 V Analog 4 to 20 mA Analog 1 to 5 V Analog 4 to 20 mA External input Note 1) NPN PNP NPN NPN PNP PNP NPN PNP NPN PNP NPN NPN PNP PNP

Air Cylinder: Standard Type Double Acting, Single Rod Series CM2 ø20, ø25, ø32, ø40 How to Order Mounting style Cylinder stroke (mm) T B Basic style (Refer to “Standard Stroke” on page 129.) Head side trunnion style Clevis integrated style Axial foot styl

T E BZ B L F G C D U Basic style Head side trunnion style Clevis integrated style Axial foot style Bore size Cushion Boss-cut basic style Rod side flange style Nil A 20 25 32 40 Rubber bumper 20 mm Head side flange style Boss-cut rod side flange style Air cushion 25 mm FZ Single clevis style Air-hydro cylinder: Rubber bumber only 32 mm Double clevis style Boss-cut rod side trunnion style

For Water Digital Flow Switch Series PFW

the P/A remote type display unit series PFW3. (1), (3), and (4) are connector pin numbers. , , and are the series PFW3 terminal numbers. 2-Port size 4-4.5 40 50 (43.5) Connector pin numbers 2 1 42 4 3 4 Pin description DC (+) N C DC () OUT Pin no. 1 2 3 4 2-3.4 43 Flow direction Dimension L 100 106 Model PFW504 PFW520 PFW540 62 78.2 120 1.6 23 50 60 34 2-Port size 4-4.5 34 50 40 48 (43.5)

Stations: 05 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: C [Vacuum Pump System PE Port Female

System: Q (Vacuum Pump System for Manifold), Valves: R (Supply Valve; Self-holding, Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 08 (Metric Size, ø8 One-touch Fitting), Bracket: w/o Option, Pump

KFx-OMV0011

Connection thread size Tightening torque [Nm] Caution (1) Be certain to wear safety glasses at all times during periodical inspections. (2) During regular maintenance, check for the following and replace any components as necessary. a) Scratches, gouges, abrasion, corrosion b) Leakage c) Flattening or distortion of tubing d) Hardening, deterioration or softness of tubing e) Loosening of the

Air Suction Filter With One-touch Fittings ZFB Series

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 53 54 8.5 14.4 15.5 50 15 17.5 24 12.5 26 22.5 48 Metric size Inch size 15.2 6 8 9.5 16.6 17.5 61 16 19.5 27 13.5 28 65 24.5 52 Collar part arrow 57 8 10 69.5 70 18.5 11 18 21.5 65 17 21 29.5 14.5 30 27 Transparent cover 3 16 1 4 " 1 4 " 3 8 " 1

Fieldbus system (SI unit – PROFIBUS DP compatible)

Make an overall revision D: Correct an error in writing E: Revision F: Correct an error in writing Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009-2013 SMC Corporation All Rights Reserved No.EX-OME0014-F

10 to 100 L/min, Integrated type, DIGITAL FLOW SWITCH, INSTRUMENTATION, IFW/PFW FLOW SWITCH, E, IFW/PFW 3/8INCH, 1.32277 lb

KC

The above CSA NRTL/C logo is described on a product label in order to indicate that the product is approved by CSA and UL Standards. TSSA (MCCR) Registration Products TSSA is the regulation in Ontario State, Canada. The products that the operating pressure is more than 5 psi (0.03 MPa) and the piping size is bigger than 1 inch. fall into the scope of TSSA regulation.

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

NPT1/8 Piping adapter Option 1 Made to Order Output specifications Without lead wire A B C E NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog voltage PNP open collector 1 output + Analog voltage Nil Made to Order Lead wire with connector (Lead wire length: 2 m) With connector cover Unit specifications Note 1) Under the New Measurement Law, sales

Process Valve: 2 Port Valve For Flow Control VNB Series

How to Order Pilot system option Seal material Body material option Nil V Standard Vacuum pilot type NBR seals FKM seals EPR seals Nil Standard A B C Bracket (valve size: 1/2/3/4.) S Stainless steel body L Aluminum body Nil B Note) None With bracket Note) Symbol V is for vacuum pilot valve specification, for both main pressure and pilot pressure, valve size 2 to 7.

VP500/700 Series How to Order VP 5 1 7 5 D Y 1 Modular connection type Flow direction Series Nil Left to right 5 VP500 R Right to left 7 VP700 Bracket Pressure specification Nil Without bracket Nil Standard (0.7 MPa) With bracket*1 B K High-pressure type

DIN (EN175301-803(C)) terminal Z With light/surge voltage suppressor *1 For AC voltage valves there is no S option.

VQ4000

R2) 1 (P) 5 (R1) 3 (R2) VFS 3-position double check (A) 4 (B) 2 Light/Surge voltage suppressor Note) 6 VFR Nil Yes E Without light, with surge voltage suppressor 1 (P) 5 (R1) 3 (R2) VQ7 Note) For double check type, refer to page 478.

Rated Flow Range: 11 (10 to 100 L/min), Port Size, Pipe O.D.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: None, Calibration Certificate: A (Calibration Certificate), Made to Order: X109 (EPDM Seal Material