AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

VFA3000

10 7.5 10{8.7} 6.1 7.3 7.3 6.3 8.1{7.4} 5.6 8.9 8.9 7.1 14{8.3} 5.7 12 12 7.4 13{8.9} 6.1 2.2 2.2 1.8 0.33 0.34 0.43 0.43 0.43 0.33 0.34 0.43 0.43 0.43 0.51 0.52 0.66 0.66 0.66 0.51 0.52 0.66 0.66 0.66 0.56 0.57 0.71 0.71 0.71 VFA5120-02 2 1 4 3 VFA54 20-02-X1 5 0.45{0.47} 0.37 0.49 0.49 0.38 2.2{2.1} 1.4 2.9 2.9 1.9 Base mounted (1) Body ported 0.51{0.50} 0.44 0.44 0.43 0.40 2.0{0.78} 2.4

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

VFRA3000

VV5FR4-10-1-, VV5FR4-10-2 VV5FRA4-10-061-031 pc. VFRA41115 pcs. VVFS4000-10A1 pc.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

SL5200

160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 10 in. (0.25 m) Option: 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet)

VSA4

When requiring different port size, contact SMC. 02 Symbol No. of stations Type N 2 stations V 10 10 stations Manifold Optional Parts Option Body size Assembly part no. Attached parts 1 4 3 8 1 2 1 4 3 8 1 2 Blank plate XT015-4A XT016-5A XT038N-4A AXT394A AXT393A AXT396A Gasket, Bolt Interface speed control Gasket, Bolt Indicate valve and option number with the manifold base number.

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 303, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): 10, Applicable Tube O.D. inch size(inch

Body Size: 650 [212SCFM (6,000l/Min), Approx. Compressor Output 50HP, (37kW)], Thread: Rc, Port Size: 1, Accessory: None, Auto Drain: Drain Cock w/o Auto Drain, Rubber Material: Standard, Air Pressure: Standard, Drain Guide: Drain Guide 1/4 Female Threaded, IN-OUT Direction: -, Pressure Switch 125VAC, 30VDC: -, Element Service Indicator: -, Pressure Switch 30V: -, Degreasing Wash: -, Made-to-Order

Type: -, Compressed Air Quality: General Dry Air, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1, Filtration Level: 0.01μm, Operating Environment: Standard, Flow Direction: [Right] From Left to Right, Drain Cock: -, Bowl Material: [Metal] Aluminum Alloy, Bowl Guard: No, Size of Body: 650, Accessory: -, O-Ring, Gasket Material: NBR, Max. Operating Pressure(MPa): 1, Drain Outlet:

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1, Filtration Level: 0.01μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: [Manual] Manual, Bowl Material: [Metal] Aluminum Alloy, Bowl Guard: No, Size of Body: 650, Accessory: None, O-Ring

Compressor Output 50HP, (37kW)], Thread: Rc, Port Size: 10 (1), Accessory: None, Auto Drain: Drain Cock w/o Auto Drain, Rubber Material: Standard, Air Pressure: Standard, Drain Guide: J (Drain Guide 1/4 Female Threaded)

Body Size: 550C [123SCFM (3, 700l/Min)], Thread: Rc, Port Size: 10 (1), Accessory: None, Auto Drain: Drain Cock w/o Auto Drain, Rubber Material: Standard, Air Pressure: Standard, Drain Guide: J (Drain Guide 1/4 Female Threaded)

Compressor Output 30HP, (22kW)], Thread: Rc, Port Size: 10 (1), Accessory: None, Auto Drain: Drain Cock w/o Auto Drain, Rubber Material: Standard, Air Pressure: Standard, Drain Guide: J (Drain Guide 1/4 Female Threaded)

Size: 1, Reverse Flow Function: Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 1, Accessory 1: None, Accessory 2: None, Option 1: None, Option 2: Drain Guide Rc(PT) 1/4, Option 3: -

Body Size: 22C [123SCFM (3, 700l/Min), Approx. Compressor Output 30HP, (22kW)], Thread: Rc, Port Size: 1, Accessory: None, Auto Drain: Drain Cock w/o Auto Drain, Rubber Material: Standard, Air Pressure: Standard, Drain Guide: Drain Guide 1/4 Female Threaded, IN-OUT Direction: -, Pressure Switch 125VAC, 30VDC: -, Element Service Indicator: -, Pressure Switch 30V: -, Degreasing Wash: -, Made-to-Order

Body Size: 300 (3/8 Basis), Applicable Tube OD: Ø10, Lock Nut: J (Round)

Compressor Output 30HP, (22kW)], Thread: Rc, Port Size: 10 (1), Accessory: None, Auto Drain: Drain Cock w/o Auto Drain, Rubber Material: Standard, Air Pressure: Standard, Drain Guide: J (Drain Guide 1/4 Female Threaded)