3 Port Solenoid Valve Series VQ100 1

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

3 Port Solenoid Valve Series VQ100 1

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

IR1000/2000/3000

) Set pressure (kPa) 30 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 10 20 30 40 50 60 70 57.0 100 95 90 85 80 75 70 65 60 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV2000 IRV2000 0 53.0 10 53.5

Refrigerated Air dryer Series IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95

0.4

10 pieces.

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

50 R5 5 100 100 R8 8 * RA 10 * Motor option RB 15 * Controller *Refer to catalog.

High Purity Fluoropolymer

10 39.5 51 55 133 48.5 10 36 Inch sizes H Applicable tubing O.D.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series RoHS Model Suitable for low speed control at 10 to 50 mm/sec Since the sonic conductance of the controlled flow is approximately 1/10 that of the standard model, it is ideal for speed control of low speed cylinders at 10 to 50 mm/sec.

High performance type Step Motor Controller (Servo/24 VDC)

(Using Step No.2) [Normal mode] Step data example Pushing Trigger Pushing Moving Move Accele Decele Speed Position Area1 Area2 In position No. ration ration force L V speed mm/s force ment MOD mm/s mm mm mm mm mm/s2 mm/s2 % % % 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 Flow chart (example) Controller (1) Select/ input No.1 (Turn

3 Port Solenoid Valve Series VQ100

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7

MLGC

model Bore size (mm) 40 32 25 20 D-B7/B80 D-B73C/B80C D-C7/C80 D-C73C/C80C D-B5/B64 8 10 9 10 8 10 9 10 8 13 8 10 13 10 9 14 9 10 14 10 D-B59W D-G79/K79/K79C D-H7BAL D-H7/H7W/H7NF 4 4 4.5 5 7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 45 D-G59F D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.

MLGC

model Bore size (mm) 40 32 25 20 D-B7/B80 D-B73C/B80C D-C7/C80 D-C73C/C80C D-B5/B64 8 10 9 10 8 10 9 10 8 13 8 10 13 10 9 14 9 10 14 10 D-B59W D-G79/K79/K79C D-H7BAL D-H7/H7W/H7NF 4 4 4.5 5 7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 45 D-G59F D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

This matches the controller. (1) LEKFS32EA-300 4 - 1.2 Specification Battery-less absolute encoder type (Step motor 24VDC) Model LEKFS25 LEKFS16 LEKFS40 LEKFS32 Stroke [mm] 50 to 800 50 to 1000 50 to 500 150 to 1200 Horizontal 14 15 12 25 30 20 45 50 25 55 65 Work load [kg] *1 Vertical 2 4 0.5 7.5 15 4 10 20 2 2 23 to 400 10 to 700 5 to 360 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMV0003 Nut assembly 16 25 40 50 Valve size Description Part indication No. Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Servo Motor Controller (24 VDC)

) Side (10) No.

Stainless Steel 316

Connection thread NPT Effective area Note 2) (mm2) Note 1) M Weight (g) A D L2 L1 (inch) L1 L1 2 x Applicable tubing M M 18 23.1 10 26 4.5 KQGT03-32 10-32UNF 10.6 20.5 18 5/32 21.5 12 25.5 28 6 KQGT03-N01S NPT1/8 D A 19 10 25 39 4.5 KQGT07-32 10-32UNF L2 22.5 12 13 22.1 27.4 42 18.8 KQGT07-N01S 1/4 NPT1/8 11 H Connection thread (In case of R) 14 26.5 29.7 50 KQGT07-N02S NPT1/4 12 23.9 30.6

Multi-channel Digital Sensor Monitor ( compatible)

Refer to the table for each pressure specification (page 110) Display/set pressure range Display/min. setting unit Power supply Used as switch output device 12 to 24 VDC (10%), and voltage ripple (p-p) 10% at max. voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Electric spec. Power supply voltage 12 to 24 VDC (10%), and ripple (p-p) 10% at max.

F/ISE

auto shift input (Brown) DC (+) 1.2K (Brown) DC (+) (Gray) Analog output (Gray) Auto shift input Main circuit Main circuit Main circuit Main circuit Load Load 1k 12VDC to 24VDC Load Load 6.8K 12VDC to 24VDC (Black) OUT 1 (Black) OUT 1 (White) OUT 2 (White) OUT 2 (Blue) DC () (Blue) DC () ZSE F/ISE --62(L)-(M) 50 60 50 60 ZSE F/ISE --70(L)-(M) 50 60 50 60 With analog output With auto shift

VQ

/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Other (1) : Option Note 1) Except for large flow capacity style.