EXxx-OMC0002

Blank terminal -11No.EX-OMC0002-C Wiring for communication cable There are two methods of CompoBus/S slave connection, T branch type and Multi drop type. In T branch type, the slave is connected to the branch cable from the main cable. In multi drop type, the slave is directly connected to the main cable. Note that it is not possible to separate the branch cable.

AC Servo Motor Driver (MECHATROLINK-II type)

54 3375 LEFB32 S LEFB40 S LEJB40 T 27 131072 3375 LEJB63 T 42 2625 H 24 1500 LEJS40 A 16 1000 LEJ B 8 500 65536 H 30 1875 A 20 1250 LEJS63 B 10 625 *The travel distance of the actuator per 1 pulse should be 1 [m/pulse]. 26 - 4.5 Positioning Completed Width This signal indicates that servomotor movement has been completed during position control.

AC Servo Motor Driver (MECHATROLINK-III type)

54 3375 LEFB32 S LEFB40 S LEJB40 T 27 131072 3375 LEJB63 T 42 2625 H 24 1500 LEJS40 A 16 1000 LEJ B 8 500 65536 H 30 1875 A 20 1250 LEJS63 B 10 625 *The travel distance of the actuator per 1 pulse should be 1 [m/pulse]. 25 - 4.5 Positioning Completed Width This signal indicates that servomotor movement has been completed during position control.

Compact Electric Actuator Series LG1

Servo malfunction indicator PL For power supply switching A surge killer should be attached to the electromagnetic contactor and relay. 5Ry Power supply OFF 1MC ON SUP 1MC 5Ry SGDE servomotor Motor 1 1MC SGDE servo pack R U V 2 M 1MC T 3 W 4 1CN 150 PULS 1 2 3 4 5 6 Be certain to ground.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

VQ7 EVS How to Order VFN VV 1 T 05 SC 0 1 4 S Valve Manifold base Thread type Electrical entry Nil Rc NPT NPTF Symbol Electrical entry position Applicable valve series N Valve body SU SC Manifold block VS410 S T F Applicable valve 4 way Manifold specifications Option Symbol EXH SUP 1 2 3 4 Applicable valve Base size: 1 8 Common Common Common Individual Individual Common Individual Individual

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i PF2D540 o !0 u !0 !2ywr e !

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

When ordering SI manifolds add suffix "X11" at end of P/N 7 Series VQ100 How To Order How to Order Valve VQ1 1 0 5 L M5 Subplate option Without subplate With M3 subplate With M5 subplate M3 M5 Series VQ Compact 3 port valve Manual override Type of valve actuation Normal close type Non-locking recessed type Latching type : Locking recessed type Locking tool type 1 B * Note) The manual override

H/DL/L/LL

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Profile Design ISO/VDMA Air Cylinder Series CP95

when a 63 air cylinder is operated at a maximum drive speed of 500mm/s.

Counter/Extension Cable

HOLD BANK1 BANK2 t (DIN rail mounting) MULTI COUNTER: CEU5 UP Counting input pulse duration COUNT PRESET FUNC. 68 0.2 LEFT RIGHT 35.5 A: B: C: D: t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.

AS

Body size Nil Option 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard None With seal Hexagonal lock nut Electroless nickel plated S K N 1 If more than one option is required, write option part numbers in the order of S, K, N. 2 M3, M5, and U10/32 are not available with seals. Type 2 3 Elbow Universal Applicable tubing O.D.

Digital Gap Checker ( compatible)

increment (0 to 60 s) 7 R/W Delay time OFF U16 0 Y 0 ~ 6000 Setting of OUT1 delay time at OFF 0.01 s increment (0 to 60 s) -98No.PS-OMW0009-C 4 How to use Product individual parameters (continued) Index Sub Access 1 Items Data type 2 Initial value Data storage 3 Set value Remarks index dec hex Output mode U8 1 Y 0: HYS 1: Wind Setting of OUT1 output mode 1 R/W 1250 0X04E2 0: Normal output

3

(15 to 35C) 5% F .S. (0 to 50C) 2% F .S.

VZS2000

Other dimensions are the same as the grommet type. 3-7-12 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS2000 Non Plug-in 2 position double, 3 position closed center/exhaust center/pressure center Grommet 2 position double: VZS2250-G H(S)-01 3 position closed center: VZS2350-G H(S)-01 3 position exhaust center: VZS2450-G H(S)-01 3 position pressure center:

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

0oi q w e r t y u i !1 !2 No.

MHF2-E

torque Nm (mm) MHF28D M3 x 0.5 0.63 4 MHF2-12D M4 x 0.7 1.5 5 MHF2-16D M5 x 0.8 3 5.5 MHF2-20D M6 x 1 5.2 6 Screw-in depth Model Bolt Max. tightening torque Nm (mm) MHF28D M2.5 x 0.45 0.36 4 MHF2-12D M3 x 0.5 0.63 5.2 MHF2-16D M4 x 0.7 1.5 MHF2-20D M5 x 0.8 3 When MHF2-8D* and MHF2-12D* are mounted body through-hole, use the attached special bolts.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 90 180 100 190 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch

Digital Flow Switch (Remote type monitor unit)

Normal condition: Flow display which is converted in atmospheric pressure at 0 C. 5: Total accuracy when used with applicable sensor. -36No.PF-OMG0008-F PF2W3 Model PF2W3 Applicable sensor PF2W504(T) PF2W520(T) PF2W540(T) PF2W511(T) Rated flow range 0.5 to 4.0 2 to 16 5 to 40 10 to 100 L/min L/min L/min L/min Instantaneous Setting/display flow range 1 0.35 to 4.50 1.7 to 17.0 3.5 to 45.0

VZ5000

Note Platinum silver q Description Sub-plate Aluminum die-casted DXT199-7-1P DXT199-7-2P Rc 1 8 Rc 1 4 Piston plate Body u Resin r Aluminum, HNBR Black w e DXT170-CSolenoid assembly Epoxy/Stainless steel i Piston Spool valve Common with Series VZ 000 1 3 Thread type Nil: Rc F: G N: NPT T: NPTF Resin o O-ring NBR 13 x 11 x 1 Black painted t Resin End cover y Stainless steel Spool spring 3

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

How to Order 11 LEFS 100 B 1 1 S K 6N 16 w e r t u y o i !0 !1 !2 !