High Vacuum L Type Valve

30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257

High Vacuum L Type Valve

30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0007 6.

High Vacuum L Type Valve

30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

XLA Series

If the heater 0 5 10 15 20 25 30 temperature is over 200oC or valve temperature is Time (sec.) Time (sec.) ( Duration of the inrush current flow (as a guide) Duration of the inrush current flow (as a guide) over 150oC, please use thermostat to control the heaters to prevent overheating.

XLA- ∗ -F7NJ ∗ - ∗ Series

Step 6 3 Bolt b Tightening torque of bolt a Nm 1 Tightening torque of bolt b Nm Valve size Tightening torque 2 Valve size Tightening torque 4 All sizes 0.3 XLA-16 0.7 -25 1.5 -40 2.5 -50 6 Bonnet assembly -63 6 -80 15 -100 20 Bolt a Heater Pilot port -160 102 Cover Body Apply 0.4MPa of air pressure to the pilot port.

LEC-OM038xx

(If cable length is 15m: Maximum 20% reduction.) [Transportation] Caution 1. Do not carry or swing the product by the motor or the cable 51 - 15. Electric actuators/Common precautions 15.1 Design and selection Warning 1. Be sure to read the Operation Manual.

JXCx-OMT0028CN

password OK 2)[1] 3:++ [2] LEC 3)-LEC [1] [2] 5(115.2kbps) (230.4kbps) [3] LEC 18 - 4)LEC LEC 5)-1 [1] 1:++ [2] LEC 6)LEC LEC (LEC-T1-) 1)LEC TB SET TB (TB =) 1 TB TB 2)SET [] LEC TB Ver 1.76 430726 Ver 2.00 SMCK7 19 - 3)MENU SET SET 1 1 4)3 SET 1 [1]3 [2]SET SW 5)MENU SET SET 1 1 6)5 SET 1 [1] 5 [2]SET Silent interval 7)LEC LEC 8)SET SET 1 1 20

SI unit for AS-Interface

A PRODUCT NAME SI unit for AS-Interface MODEL / Series / Product Number EX250-SAS# Table of Contents Safety Instructions 2 Product Outline 8 Model Indication and How to Order 9 Summary of Product elements 9 Mounting and Installation 10 Installation 10 Wiring 11 Setting 14 Indication 16 Connection between SI unit output and the solenoid valve 17 Data bit 18 Maintenance 19 Troubleshooting 20

XLF Series

If the heater 0 5 10 15 20 25 30 ( temperature is over 200oC or valve temperature is over 150oC, please use thermostat to control the heaters to Time (sec.) Duration of the inrush current flow (as a guide) prevent overheating. With PTC type heaters, there is an initial surge of current (inrush current) after the power is supplied. These inrush current will reduce overtime.

FILTER REGULATOR

Please be noted that the diaphragm assembly adheres to the bonnet if disassemble parts with the handle facing downwards. 20 ) Diaphragm assembly Applicable model Process Procedure Tool Check item Assembly Mount parts to the body in order of the diaphragm assembly, pressure adjusting spring, and pressure adjusting screw.

SI unit for EtherNet/IP TM

. : Refer to page 41 for the seal cap. -12No.EX-OMP0013-E Power supply connector layout PWR: M12 4-pin plug, A-coded (SPEEDCON) No. Designation Description 1 SI24 V +24 V for SI unit operation 2 SV24 V +24 V for solenoid valve 3 SI0 V 0 V for SI unit operation 4 SV0 V 0 V for solenoid valve : Recommended mating M12 5-pin socket, part no. EX500-AP00and PCA-1401804.

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

1 15-9-41 3 Dimensions AS2000E/3000E 2-port size L7 Max. Min. L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 4.5 16 57 61.5 15.5 10 17 30 5 40 1/8 AS2000E-02 4.5 20 59 63.5 17 12 23 30 5 40 1/4 AS3000E-02, 03 5.5 26 69 76 20.6 13.25 25 45.5 5.25 56 1/4, 3/8 AS4000E 2-1/4 to 1/2 72 (Max. 80) Effective thread depth 6 15-9-42

KS/KX

M D2 L A D1 M5 X 0.8 M6 X 1.0 36.5 KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S 9 12 37 33 8 16 10.4 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 12 8 6 17 14 12.8 1 8 1 4

TCU

Tube size (mm) Dimension of coil (mm) No. of tubes Max. operating length (m) L D Part No. 210 18 1 52 2 35 3 22 1 54 2 27 3 17 1 41 TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 1.5 4 2.5 280 28 265 1 2 5 tubes/ case 1.5 1 2 325 24 6 4 37 305 330 31 8 5 Dimensions are changeable due to material.

Hand Valve Series VH 1

4 VH210-02 VH200-02 3 (Closed center) 4 0.42 VH2 1 (P) 3 (R) VH211-02 VH201-02 3 (Exhaust center) 7.5 1/4 2 VH212-02 VH202-02 2 (Position) 3 1 Closed center VH300-02/03 VH310-02/03 3 (Closed center) (A) 2 (B) 4 4 3 VH301-02/03 VH311-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ5000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 10 port sizes available 4/5 PORT SOLENOID VALVE. SYJ 5 port valve manifold. 155.00000 lb. VVD.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available 4/5 PORT SOLENOID VALVE. SYJ 5 port valve manifold. 169.00000 lb. VVD.

FILTER REGULATOR

Please be noted that the diaphragm assembly adheres to the bonnet if disassemble parts with the handle facing downwards. 20 ) Diaphragm assembly Applicable model Process Procedure Tool Check item Mount parts to the body in order of the diaphragm assembly, pressure adjusting spring, and pressure adjusting screw.

base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, MFLD, BASE MT, SY7000 SERIES, VALVE, SS5Y7 MANIFOLD SY7000, WJ, SS5Y7 BUILT IN FITTING >1/4, 3.06628