Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

XLA Series

103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E 5.

XLA- ∗ -F7NJ ∗ - ∗ Series

103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 9 XL*-OML0013-B 5.

High Vacuum L Type Valve

. 2017 SMC Corporation All Rights Reserved 18 XL-OMV0016

Series CQ2

size) 30 30 2 x 4-31.5 depth of counter bore 26 Width across flats 36 40 40 62 62 4-19 through 182 226 3 5.5 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 36 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less. 109 + Stroke 17 + Stroke 17 182 226 2-M24 x 3 effective thread depth 33 143 + 2 (strokes) Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

For D-P4DW, 40 to 63 are available. Only D-P4DW type is assembled at the time of shipment. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) J79CN Since there are other applicable auto switches than listed, refer to page 18 for details.

Pulse Valve

Specifications Series JSXFAE/F 06 10 14 Orifice diameter [mm] 32 40 50 Port size 3/4 1 1 1/2 Fluid Air Pilot valve Exhaust Pilot piping Orifice diameter: 5 mm or larger Min. operating pressure differential [MPa] 0.1 JSXFA Pilot port Max. operating pressure differential [MPa] 0.9 Max. system pressure [MPa] 0.9 Fluid temperature [C] 40*1 to 60 Ambient temperature [C] 40 to 60 Weight [g] Compression

PFA/PFW

DC (+) 1 OUT 2 2 DC () 3 OUT 1 4 Flow direction 14 Digital Flow Switch for Water Series PFW Dimensions (mm)/ Separate Type For water 1in = 25.4mm Scale:70% PFW3mm mm-A Display unit Panel mount 3 x 7.2 (= 21.6) 41.8 8-M3 40.3 40 6.4 4.3 1 2 3 4 SMC FLOW SWITCH 35.8 19.4 40 UNIT RESET SET 5 6 7 8 Panel cutout dimensions 36 + 0.5 0 + 0.5 0 36 PFW3mm mm-B Display unit DIN rail The applicable

Lubricator Series AL10 to 60

53 70 70 90 95 G 27 40 54 54 66 66 E 47 47 C 26 36 38 40 38 41 45 H 22 23 26 25 35 35 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specifications Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level

New

40 10.5 14 17 20 22 22 24.5 24.5 40 48 62 66 21 <22> 28 33.5 42 57 70 71 95 28.5 37.5 38.5 49.5 85 (91.5) 93 (99.5) 104 (110.5) 110 (116) 35 35 33 37 10 14.2 15.2 17.2 M5 M5 M6 M6 Bracket mounting a b f g h i Port size P Model j 37 41 46 48 a1 Note) d e 2.3 2.3 2.3 2.3 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 56 56 70.5 70.5 52 60 68 73 75 75 92 92 30 34.5 39 41 6.5 6.5 6.5

Compact Guide Cylinder End Lock Type SeriesMGP

Specifications Lock Specifications Lock position Rear, Front Double acting Action 32 40 50 63 Air Fluid Holding force (max.)

Modular Type Lubricator Series AL

54 54 66 66 F 30 41 50 50 70 70 P 28 57 73 73 H 22 23 26 25 35 35 E 47 47 D 25 40 53 70 70 90 95 A B 77 115 142 176 176 250 268 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification

High Vacuum L Type Valve

XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 9 XL*-OMJ0005-C 5.

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

Compact Guide Cylinder JMGP Series ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

226 45 68 90 113 136 158 IN 170 34 51 68 85 102 119 20 (16 x 2) 8 OUT 402 80 121 161 201 241 281 IN 302 60 90 121 151 181 211 25 (20 x 2) 10 OUT 628 126 188 251 314 377 440 IN 471 94 141 188 236 283 330 32 (25 x 2) 12 OUT 982 196 295 393 491 589 687 IN 756 151 227 302 378 453 529 40 (32 x 2) 16 OUT 1608 322 483 643 804 965 1126 IN 1206 241 362 483 603 724 844 50 (40 x 2) 18 OUT 2513 503

Refrigerated Air Dryer Series IDF/IDU

Refrigerated Air Dryer Refrigerated Air Dryer Refrigerated Air Dryer Air Flow Capacity Power Consumption Air Flow Capacity Power Consumption Increased by up to 40% Increased by up to 40% Reduced by up to 40% Reduced by up to 40% Increased by up to 40% Reduced by up to 40% (Compared with the previous model) (Compared with the previous model) 40 40 MAX. 40% 40 40 MAX. 40% Improved corrosion

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first.

XMA/XYA Series

Exterior dimensions C D XMA Series Angle Valve Fd Fn Fc C Fc L1 KF Flange K Flange CF Flange ( K ) ( K F ) ( C F ) L2 H B G A A Unit:mm Model n Fd Fc H P.C.D L1 L2 XMA-16 40 103 38 1 30 34 17 40 P.C.D 27 6x4.4 XMA-25 50 113 48 1 40 26 39 XMA-40 65 158 66 2 55 70 41 63 P.C.D. 58.7 6x6.6 XMA-50 70 170 79 2 75 52 68 XMA-63 88 196 100 3 87 95 114 70 69 P.C.D. 92.1 8x8.4 XMA-80 90 235 117 3 114

PA3000/5000/PAX1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Performance Curves/Built-in Solenoid Type/Air Operated Type Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting range m Total lifting range m SUP=0.7MPa SUP=0.7MPa SUP=0.7MPa SUP=0.5MPa SUP=0.5MPa SUP=0.5MPa