ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

Process Pump

Max. 0.1 mg/m3 (ANR) Note 2) Downstream oil mist concentration (Before oil saturation, 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) When 2 years passed, or pressure drop reaches 0.1 MPa Element life Refer to Best Pneumatics No. 5 for further details. Note 1) With auto drain is 0.1 MPa (N.O. type), 0.15 MPa (N.C. type).

Stopper Cylinder

How to replace the shock absorber 1) Loosen the hexagon socket head set screw (M3) on the piston rod.

Angle Seat Valve

Av = Q .(8) Av : Flow coefficient [m2] Q : Flow rate [m3/s] P : Pressure differential [Pa] : Fluid density [kg/m3] P (3) Formula for flow rate Described by the practical units. Also, the flow-rate characteristics are shown in Graph (2).

MA2

AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC Tool adapter <10/15> MA 210 A M3

V

5/32 3/8 0.04 0.12 NCRB1_W10-_S 0.55 0.20 0.35 0.02 0.20 25 0.95 1.14 0.59 0.31 0 -0.00015 (0.2) (0.26) M3 NCRB1_W10-_SE 0.33 0.37 -0.0012 -0.00045 5-40UNC 5-40UNC 0.14 10-32UNF M3 3/16 15/32 0.06 0.16 NCRB1_W15-_S 0.71 0.24 0.39 0.02 0.20 25 1.14 1.34 0.79 0.35 0 -0.00015 (0.2) (0.39) (0.24) M3 NCRB1_W15-_SE 0.43 0.39 -0.0016 -0.00045 8-32UNC 8-32UNC 0.18 10-32UNF 15/64 9/16 0.06 0.18 NCRB1

New

Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] P : Pressure difference [Pa] : Fluid density [kg/m3] (3) Formula of flow rate It is described by the practical units. Also, the flow-rate characteristics are shown in Graph (2).

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Mounting bolt M3 x 45L M3 x 55L M3 x 60L M5 x 55L M5 x 60L M5 x 65L M5 x 60L M5 x 65L M5 x 70L Mounting bolt M5 x 75L M5 x 80L M5 x 85L M6 x 75L M6 x 80L M6 x 85L RSQB12-10 Note) RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 7 9 Mounting bolt C D 9 Note) When using the through-hole mounting for a size 12 cylinder, be sure to use the flat washer which

IDX-OM-O004C

) AC200V () [30mA 10A] 1.25mm 2 (16AWG) 812mm3 () 0.1m 30m (11 ) M3 6.5mm 2 5 2

DOC1019547

Connection thread Proper tightening size torque Nm M3 0.40.5 M5,10-32UNF 11.5 Note) Excessive tightening may damage the thread portion or deform the gasket and cause air leakage. If the screw is too shallowly screwed in, it may come loose or air may leak.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

x 8 M3 137 Series LJ1S Construction LJ1S20 A A Section AA Material Note Parts list Material Note 100W Slide screw No.

2 Phase Stepper Motor/Without Motor Brake Series LXS

LC6D-507AD-Q (Refer to page 306 for details.) 0.05mm Holding plate: MB1 (1 pc.), Phillips countersunk head screw: M3 x 6l (1 pc.) Phillips binding head screw: M3 x 4l (2 pcs.), Toothed lock washer M3 (2 pcs.) Binding band: T18S (1 pc.)

3 Port Solenoid Valve SYJ300/500/700 Series

Body ported type M3 0.5 0.9 (0.05) 31 29 SYJ322 N.O. SYJ314 N.C. 52 (Without sub-plate 31) 50 (Without sub-plate 29) Base mounted type (With sub-plate) M5 0.8 1.8 (0.1) SYJ324 N.O.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

x 0.5 (Opposite side, same location) Q H 2 x J through CRBU2 1.5 JA depth of counterbore JB (Opposite side, same location) (Side port) (For front port, use hexagon socket head set screw) S BE CB CA CRB1 BF DD MSU D BD BG A CRJ 2.2 (0.4) Note 1) CRA1 SD 16 BA CRQ2 2 x M3 x 0.5 depth 4 BB W MSQ 2 x M3 x 0.5 (Front port) (For side port, use hexagon socket head set screw) MRQ N DBC 20With external

Angle Seat Valve /

It is calculated using the following formula. r Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] DP : Pressure difference [Pa] r : Density of fluid [kg/m3] (3) Formula of flow rate It is described by practical units. Also, the flow rate characteristics are shown in Graph (2).

New

Av = Q .(8) $P Av : Flow coefficient [m2] Q : Flow rate [m3/s] $P : Pressure differential [Pa] : Fluid density [kg/m3] (3) Formula for flow rate Described by the practical units. Also, the flow-rate characteristics are shown in Graph (2).

100

m3/year 15 s 150 L/min (ANR) ON/OFF operation can be set freely within the set value range.

ZSE30A(F)/ISE30A

x 5L) 3 cores, copy function, 1 m Mounting screw (with 2 pcs. of M3 x 5L) Copy function (up to 10 slaves) Mounting screw (with 2 pcs. of M3 x 5L) O-ring, one-touch clip included Mounting screw (with 2 pcs. of M3 x 8L) O-ring, one-touch clip included Panel mount adapter + Front protection cover Front protection cover Lead wire with connector Lead wire with connector Mounting screw (with 2

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

x 0.5 depth 4 BB W MSQ 2 x M3 x 0.5 (Front port) (For side port, use hexagon socket head set screw) MRQ N DBC 20With external stopper: CRJU Note 2) For the 180 specification, the slated line area do not exist.

EX260-SEN_eng

OFF M3 hexagon screw Tightening torque 0.6 Nm 1 2 0 0 0 IP address 192.168. Y . X : Thread size: M3 x 30 The following instructions must be followed during maintenance: Turn off the power supply. Stop the air supply, exhaust the residual pressure and verify that the air is released before performing maintenance. Otherwise an injury can result.