Speed Controller: Standard Type In-line Type AS Series

Valve Spring Seal NBR, Stainless steel 9 10 11 14143 14144 14147 Stainless steel NBR 652 AS Series Speed Controller: Standard Type In-line Type Dimensions: AS1000-M3 Dimensions: AS1000-M5 2 x 3.1 35 (Max. 41) 19 (Max. 21) AS-F 2 x 2.1 TMH ASD 27.5 Note 1) Male M5 x 0.8 Female M5 x 0.8 M3 x 0.5 M3 x 0.5 AS AS Reference dimensions Reference dimensions Note 1) Dimension for AS1000-M5-N AS-FE

Air cylinder

(Tightening torque of M5 screw should be 2 to 3 Nm.) (5) Modification of the detecting position should be made in the condition of 3. 14 < Applicable Auto switches > Solid state auto switch D-Y59A/BY69A/BY7P(V) D-Y7NW(V)Y7PW(V)Y7BW(V) D-Y7BAL Reed auto switch D-Z73Z76Z80 Fig. 7 Mounting and movement of the auto switch (1) Fix it to the detecting position with a set screw by installing an

ZL3-OM00601

Vacuum Pressure Switch 14 6. Vaccum release flow adjusting needle 15 7. Structural Drawing and Replacement of Parts 16 8. Maintenaunce 20 9. Specifications 21 10. Pneumatic Circuit 24 11. Exhaust Characteristics,Flow Characteristics, And Time required to reach the specified vacuum 25 11.1. Exhaust Characteristics 25 11.2. Flow Characteristics 26 11.3.

energy saving effect

When deionized water is used, the electric conductivity should be 1 mS/cm or higher (Electric resistivity: 1 Mcm or lower). 30 min 20 min 14 min 10 min 6 min 4 min Facility Water Supply 2 min 1 min Warning Operating time 30 s 20 s Max. 1. The water-cooled refrigeration type thermo-chiller radiates heat to the facility water.

53

No anchor bolt is included. 139 A HRSH090 Series Inverter Type * If the product is used at altitude of 1000 m or higher, refer to Operating Environment/ Storage Environment (page 151) Item 14 * For altitude of 1000 m or higher.

XLGR Series

Hexagon wrench (Width across flats 4mm) 13 14 Spanner (Width across flats 13mm) Fig.1 13 Open Close Fig.2 10 XL-OMP0001 6.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

If the lock is released with the product mounted vertically, a workpiece can drop due to its weight. 14 - 7. When the actuator is operated manually (when the SVRE output signal is off), supply 24 VDC to the [BK RLS] terminal of the power supply connector.

LEJ-OM002xx

High rigidity slider type / LEJS series . 14 2.1 Specification. 14 2.2 How to order . 16 2.3 Construction. 18 3. Slider type / LEJB series . 19 3.1 Specification. 19 3.2 How to order . 20 3.3 Construction. 21 4. Product Outline . 22 4.1 System construction . 22 4.2 Function / Control mode . 26 5. Wiring and cables / Common precautions . 27 6.

Multistage Ejector Series ZL112.212

Rc1/2 G1/2(3) Nil F N T 1/2-14 NPT 1/2-14 NPTF P Note 1) W/ unit switching function is not permitted to sell for the domestic use in Japan, because the new Weight and Measure Act has been implemented since October ,99.

Manifold Specifications

Unused Lead wire assy U side 6 stations (14 stations) Pin Confirm an insertion of the lead wire assembly after the insertion of pin by light pulling of the lead wire. (n) 4. Mount the end plate !2 and !3 and tighten the bolt !1. 7 stations (15 stations) (2) (1) Stations Note 1) Be careful that the packing and the O-ring do not fall out of the groove.

SJ1000/2000/3000 Series

Connection thread: M5 First, tighten by hand, then use a suitable wrench to tighten the hexagonal portion of the body an additional 1/6 to 1/4 turn. The reference value for the tightening torque is 1 to 1.5 Nm. 2. Ensure sufficient space for maintenance activities.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

ASP 10.5 35.2 39.5 14.2 8 12 R 1/8 M5 x 0.8 10.9 42.4 48.7 15 36.7 41.7 18.5 12 17 R 1/4 1/8 ASN 14.4 50 56.2 19.8 41.9 46.9 23 12 19 R 3/8 1/8 AQ 18.3 61.8 70.3 26.5 57.3 64.8 28.6 17 24 R 1/2 1/4 25.9 ASV Reference dimensions of R thread after installation.

A

x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10

W2M/4M

I Linearity =1cro or less I Hysteresis 0.5olo or less I Shock and vibration resistant (At fullspan) I Monitor signal output Repeatability i0.5% ElectroPneumatic Regulator ITI 02000.4000 I o r4'7 {0.01 -o.5 M5, PT,PF, NPT,I/8 .71 -14 {0.05-1 O} PT, PF, NPT 'v4,3t4,12 4-wi(e 0-5VDC, 0-10vDC Max. 12VDC Max. current Input signal svmbor Voltage InFlt lmpedan K <{-_-l -f], lmpedance tl or less

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

A 24 M5 thread, depth 8 With or without insert depending on base material. 32 A' Coding stud M5 x 10 DIN913-45H 12 2 8 M5 Drive flange face G1/4 DIN/ISO228/1 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 1.5 IP 3 IW 1301 AW The solenoid valve can be attached with 2 mounting bolts.

Smooth Cylinder Series CQSY

) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Standard Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 (mm) Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5

Electro-Pneumatic Regulator IT1000/2000/4000

I Linearity =1cro or less I Hysteresis 0.5olo or less I Shock and vibration resistant (At fullspan) I Monitor signal output Repeatability i0.5% ElectroPneumatic Regulator ITI 02000.4000 I o r4'7 {0.01 -o.5 M5, PT,PF, NPT,I/8 .71 -14 {0.05-1 O} PT, PF, NPT 'v4,3t4,12 4-wi(e 0-5VDC, 0-10vDC Max. 12VDC Max. current Input signal svmbor Voltage InFlt lmpedan K <{-_-l -f], Cor|duit, DIN connector

AR Series Modular Type Regulator

Nq Body size 10 20 25 30 40 Symbol Description Nw Pipe thread type Nil Metric thread (M5) V Rc V V V V N NPT V V V V F G V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + Ne Port size a Mounting Nil Without mounting option V V V V V B Note 2) With bracket V V V V V H With set nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge

MHx-OMY0005

:GR-S-010(10g):GR-L-005(5g) 14 3-3. 2 (MHF2-8D2MHF2-12D20D) 1. 2. 8:12:R 1620:C ABC 3. (8:) (12 ) :GR-S-010(10g):GR-L-005(5g)GR-L-010(10g) 8 2 12 2.5 16 3 20 4 B C C 8 A 12 0.9 16 C MHF2-8D2 20 1.3 MHF2-12D* R MHF2-8D2 8 1.5 12 2 16 2.5 20 3 12 15 3-4. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D

MH-OMY0004

No.MH*-OMY0004 180/ // MHY2-10D MHY2-16D MHY2-20D MHY2-25D 1. . 5 1-1. . 5 2. . 6 2-1. . 6 2-2. . 6 2-3. . 7 2-4. . 14 2-5. . 14 2-6. . 14 2-7. . 15 3. . 15 3-1. . 15 3-2. . 16 3-3. . 17 3-4. . 18 3-5. / . 20 2 180 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC