HRX-OM-Y098

HRL Series 5.4 Description of the Screen 5-63 HRX-OM-Y098 Chapter 5 Display and Setting of Various Functions Table 5.4-32 List of maintenance reminders 1 Maintenance No.

HRX-OM-M005

Item Descriptions 1 SERIAL Used to display the Serial communication setting screen 1 on page 5-28. 2 CH1 DIO Used to display the CH1(2)DIO communication setting screen 1 on page 5-32. 3 CH2 DIO Used to display the CH1(2)DIO communication setting screen 1 on page 5-32. 4 [Return] key Used to display the Detail setting screen 1 on page 5-22.

SI unit ( device)

Specifications 32 Dimensions 34 -1No.EX-OMW0016-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

3 Port Solenoid Valve

Turbine oil P-32 Viscosity according to ISO Grade Classification of viscosity cst (40C) Classification of viscosity cst (40C) 32 32 Kyushu Oil Co. Stork Turbine 32 Nippon Oil Corp. Turbine oil 32/ Mitsubishi turbine 32 Showa Shell Sekiyu K.K. Turbine 32 Cosmo Oil Co., Ltd. Cosmo turbine 32 Tonen General Sekiyu K.K. General R turbine 32 Japan Energy Corp.

SI unit ( device)

Specifications 32 Dimensions 34 -1No.EX-OMY0021 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Vacuum Module Series ZX

Common air pressure SUP port (PV) 4 x 5.5 (Mounting holes) End plate 131.3 Exhaust adapter Rc 1/8 29.5 61 Manifold base Adjusting needle 28.4 10 22.7 32 Adsorption confirmation switch ZSP1 Manual override (Push and turn the locking type override.) 16 Manual override (Simply turn the locking type override.)

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

DOC1001322

DI water (pure water): Electrical conductivity 1 S/cm or more (electrical resistivity 1Mcm or less) 3 (1) Ambient temperature: 32 oC, (2) Circulating fluid: Clean water, (3) Circulating fluid temperature: 20 oC, (4) Circulating fluid flow rate: Rated flow rate, (5) Power supply: 400 VAC 4 (1) Ambient temperature: 32 oC, (2) Circulating fluid: Clean water, (3) Circulating fluid flow rate:

ITV0000

" Connection size Metric size z, c: 6, x: 4 Manifold Inch size z, c: 1/4", x: 5/32" Weight Note 1) 100g or less (without options) Note 1) Indicates the weight of a single unit.

Compact Vacuum Unit

With lead wire with connector (Lead wire length: 78.7 inch (2 m)) 0.0 to 14.6 psi (0.0 to 101.0 kPa) 14.5 to 14.5 psi (100.0 to 100 kPa) G E KJ C1 H 04 F Body type Port size H L 02 04 01 03 2 mm one-touch fitting 4 mm one-touch fitting 1/8" one-touch fitting 5/32" one-touch fitting Straight Elbow Metric size Inch size Output specifications A B NPN open collector 2 outputs PNP open collector

90

When screwdriver operation type needle is selected as option (-K), make sure the lock nut is not loose to prevent the nut from coming off due to vibration. 32 Series ZK2 Specific Product Precautions 7 Be sure to read the below before handling. Refer to back cover for Safety Instructions.

ZB-OM00301

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

Air Fittings Fitting Series For Special Environment

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

Compact Electro-pneumatic Regulator Series ITV0000

" Connection size Metric size , : 6, : 4 Manifold Inch size , : 1/4", : 5/32" Weight Note 1) 100g or less (without options) Note 1) Indicates the weight of a single unit.

Compressed Air Preparation Filter

219.8 AFF40-D/AM40-D/AMD40-D 1/4, 3/8, 1/2 70 223.5 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 263.3 AFF50-D/AM50-D/AMD50-D 3/4, 1 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AFF60-D/AM60-D/AMD60-D 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Specific Product Precautions Semi-standard specifications PC/PA bowl1 Stainless steel bowl2 Metal bowl1 Metal

REA_EN

Type Type Elbow type straight type In-line type REA25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REA32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REA40 AS2201F-02-06-X214 AS2301F-02-06-X214 AS2001F-06-X214 REA50 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 REA63 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 Table.

TA301

Function plate (DXT060-32-4A) 6 Valve Functions Available by Changing of Piping Port 3 port N.C. 3 port N.O. 2 port N.C. 2 port N.O.

VDW

C37 Series 200 Symbol Port size PB 300 SUS M5 01 02 M5 1/8 (6A) 1/4 (8A) Thread type Nil F N Rc G NPT Piping to 3 Port Valve N.O. Port Caution Socket Electricity 1. Surge voltage A high voltage which is momentarily generated in the shut-off unit by shutting off the power. Cover Others 1. Material NBR: Nitrile rubber FKM: Fluoro rubber = FPM Trade names: Viton, Dai-El, etc.

Thermo-chiller

Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) 15% ethylene glycol aqueous solution: diluted by tap water in condition above without any additives such as antiseptics.

Silencer Compact Resin Type/Male Thread Series AN05 to 40

Construction/Parts/Dimensions AN05/10/20 AN15/30/40 No hexagonal part in AN05 and AN10 B Dimensions (mm) B Port size R, NPT A B D Model Sound absorbing material (Resin sintered body) AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 6.5 15 M5 x 0.8 Body (Resin) A 23 1/8 11 A 32 1/4 14 16 Hexagonal flats D 14 45 1/4 16.5 17 58.5 3/8 20 Port size 21 68 24 1/2 2