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PFMB7501 Item Default settings [P_1] Set value of OUT1 250 L/min [H_1] Hysteresis of OUT1 25 L/min [P_2] Set value of OUT2 250 L/min [H_2] Hysteresis of OUT2 25 L/min PFMB7102 Item Default settings [P_1] Set value of OUT1 500 L/min [H_1] Hysteresis of OUT1 50 L/min [P_2] Set value of OUT2 500 L/min [H_2] Hysteresis of OUT2 50 L/min PFMB7202 Item Default settings [P_1] Set value of OUT1

[] 2 [F 0] 2 F0 F1 F99 2 -24No.PF-OMP0001CN-F [F 0][rEF] [rEF] [Anr] 26 1 [ L] L/min [Uni] [oU1] OUT1 [HYS] [1ot] OUT1 [1_P] [ 250] 250 L/min(PFMB7501) [P_1] OUT1 [ 500] 500 L/min(PFMB7102) [F 1][oU1] [1000] 1000 L/min(PFMB7202) 28 [ 25] 25 L/min(PFMB7501) [H_1] OUT1 [ 50] 50 L/min(PFMB7102) [100] 100 L/min(PFMB7202) [CoL] OUT1 [SoG] ONOFF [oU2] OUT2 2 [HYS] [2ot] OUT2 2 [2_P

(37) 30 (25) -24No.PF-OMS0001CN-A [] 2 [F 0] 2 F99 F1 F0 2 -25No.PF-OMS0001CN-A () () [F 0] [ rEF] [ ANR] 27 [ Uni] 1 [ L] L/min [ oU1] OUT1 [ HYS] [ 1ot] OUT1 [ 1_P] [ 250] 250 L/min(PFMC7501) [ P_1] OUT1 [ 500] 500 L/min(PFMC7102) 29 [F 1] [ 1000] 1000 L/min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_1] OUT1 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [ CoL] OUT1 [SoG]

Connect the fluid flow in the correct direction. [ 1ot] Switch operation of OUT1 [ 1_P] Normal output [ 250] 250 L/min (PFMC7501) Do not operate in an atmosphere containing flammable, explosive or corrosive gas. Fire, explosion or corrosion can result. This product is not designed to be explosion proof. OUT1 over current error The switch output (OUT1) load current has exceeded 80 mA.

(OUT2) [ 2_P] Normal output Page 36 50% of max. rated flow [ 2.00] 2.00 L/min (4 L type) [ 8.0] 8.0 L/min (16 L type) [ 20.0] 20.0 L/min (40 L type) [ 50] 50 L/min (100 L type) [ 126] 126 L/min (250 L type) [ P_2] Set value (OUT2) [F 2]/[ oUt2] Page 37 5% of max. rated flow [ 0.20] 0.20 L/min (4 L type) [ 0.8] 0.8 L/min (16 L type) [ 2.0] 2.0 L/min (40 L type) [ 5] 5 L/min (100 L type) [

(oC) 80oC (60oC for a product with pressure gauge) Number of element 4 4 Note2) or 8 4 Note2) or 12 Element size (mm) note3) 65 to 70 250 65 to 70 500 (For 8 elements: 65 to 70 250) 65 to 70 750 (For 12 elements : 65 to 70 250) Element replacement differential pressure (MPa) 0.1 Cover SUS304 Case SUS304 Material O-ring FGES: NBR FGEL: FKM Leg SS400 Mass (kg) Body only 10 13 18 Internal

Weight Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 LEKFS25 Product weight[kg] 1.7 1.8 2.0 2.1 2.3 2.4 2.5 2.6 2.8 2.9 3.2 3.5 3.8 0.26 Additional weight with lock[kg] LEKFS32 Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 Product weight[kg] 3.6 3.8 4.0 4.2 4.5 4.7 4.9 5.1 5.3 5.5 5.9 6.3 6.7 7.1 7.5 0.53 Additional weight with lock[kg

Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 250 150 75 300 200 100 375 250 125 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06

Baud rate Max. bus cable length 1 Mbit/s 25 m 800 kbit/s 50 m 500 kbit/s 100 m 250 kbit/s 250 m 125 kbit/s 500 m 50 kbit/s 1000 m 20 kbit/s 2000 m 10 kbit/s 5000 m -10No.EX-OMK0006-C Bus cable and termination resistors The cables, connectors, and termination resistors used in CANopen networks shall meet the requirements defined in ISO 11898.

Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other

Both directions Lock direction MXW MXP Stroke Bearing Standard stroke (mm) Long stroke (mm) Bore size (mm) MG Model MGP 20 75, 100, 125, 150, 200 250, 300, 350, 400 MLGCM Slide bearing 25 350, 400, 450, 500 MGQ 75, 100, 125, 150, 32 350, 400, 450, 500, 600 MLGCL Ball bushing bearing 200, 250, 300 40 350, 400, 450, 500, 600, 700, 800 MGG * Middle strokes and short strokes other than shown

11 12 13 14 15 16 Formula L1 = 11n + 15.5, L2 = 11n + 60 n: Station (Maximum 16 stations) L n L1 L2 (L3) (L4) 26.5 71 100 110.5 37.5 82 100 110.5 48.5 93 112.5 123 59.5 104 125 135.5 70.5 115 137.5 148 81.5 126 150 160.5 92.5 137 162.5 173 103.5 148 175 185.5 114.5 159 187.5 198 125.5 170 200 210.5 136.5 181 212.5 223 147.5 192 212.5 223 158.5 203 225 235.5 169.5 214 237.5 248 180.5 225 250

Male thread nozzle High efficiency nozzle 600 400 KN-R02-250 KNH-R02-200 350 Flow rate [l/min (ANR)] Flow rate [l/min (ANR)] 500 300 400 KN-R02-200 250 KNH-R02-150 200 300 KN-R02-150 150 200 KNH-R02-100 100 KN-R02-100 100 50 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Supply pressure [MPa] Supply pressure [MPa] Low noise nozzle with male thread Copper extension

S 8 50, 100, 150, 200, 250, 300 "n" pcs. n 12 50, 100, 150, 200, 250, 300, 350, 400 Auto switch type Adjuster option Nil Without auto switch (Built-in magnet) Nil Rubber stopper B Shock absorber Metal stopper C One side centralized piping, switch rail Only for MXY12 One side centralized piping, with switch rail Nil Without one side centralized piping, without switch rail N The auto switch

REA REB JIS Symbol Standard Stroke REC Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) Made to Order Specifications CY 25 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 (For details, refer to pages 1851 to 1954.) 4000 CX Symbol Specifications 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Long stroke type XB11 5000 40 200, 250, 300, 350, 400, 450, 500, 600, 700

No Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 65536 114688 32768 65536 Electronic gear denominator *3 PA07 1 250 125 125 125 250 125 125 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032)/ 0003 (LEC-MR-RB-12) 1 Rotation direction selection *4 PA14 0 0 (+Counter motors side ) (+Counter motors side

, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Intermediate strokes are available

Stations L1 L2 L3 L4 2 135.5 125 105 15 3 4 5 6 7 8 9 10 160.5 150 137 11.5 185.5 175 153 16 210.5 200 185 12.5 235.5 225 201 17 260.5 250 233 13.5 148 137.5 121 13.5 198 187.5 169 14.5 248 237.5 217 15.5 Stations SS5Y5-45GDBC4 C6 C8 Stations L1 L2 L3 L4 2 148 137.5 123 12.5 3 4 5 6 7 8 9 10 185.5 175 155 15 210.5 200 187 11.5 235.5 225 203 16 260.5 250 235 12.5 285.5 275 251 17 198 187.5

362.5 347 13 15.5 13.5 16.5 14.5 39 5 Port Solenoid Valve Series SX3000/5000 Stations SS5X5-45GDUC4 C6 C8 Note) L1 to L4 dimensions of SS5X5-45GUStations Dare the same as SS5X5-45GStations U-. 2 135.5 125 105 15 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 160.5 150 137 11.5 185.5 175 153 16 210.5 200 185 12.5 235.5 225 201 17 260.5 250 233 13.5 148 137.5 121 13.5 198 187.5 169 14.5 248 237.5

(Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 66 300 (Lead wire length) Indicator light 300 61 Indicator light 49 55.5 Cover diameter 1.5 Cross sectional area 0.23mm2 P R 1 3 P R 1 3 Dimenisons n : Stations (Max. 20 stations) Equation L1=10.5n+9.5 L2=10.5n+22.5 L n 2 30.5 43.5 75 85.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 18 198.5 211.5 237.5 248 19 209 222 250