Slit Valve XGT Series Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE
V 12 V 3 wire (PNP) M9P IC circuit 2 Wire M9B 3 wire (NPN) M9NW 12 V Solid state switch 3 wire (PNP) M9PW IC circuit Diagnostic indication (2-color indication) 2 Wire M9BW 3 wire (NPN) M9NA 5 V 12 V Relay, PLC Yes 24 V 12 V Water Resistant (2-color indication) 5 V 12 V 3 wire (PNP) M9PA IC circuit 12 V 2 Wire M9BA 3 Wire (NPN equivalent) A96 IC circuit Yes 5 V Reed switch No 12 V 100 V A93
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector), End Lock: N (None)
wire (NPN) 3-wire (PNP) 2-wire IC circuit 5 V,12 V Solid state auto switch Reed auto switch 12 V IC circuit Diagnostic indication (2-color display) 5 V,12 V Relay, PLC 24 V Yes Grommet 12 V Water-resistant (2-color display) IC circuit 5 V,12 V 12 V Magnetic field resistant (2-color display) 2-wire (Non-polar) P3DW 3-wire (NPN equivalent) 5 V A96 A96V IC circuit Yes 24 V Grommet A93
(PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 5 V, 12 V 12 V 5 V, 12 V 12 V 5 V, 12 V 12 V Reed auto switch Solid state auto switch IC circuit Diagnostic indication (2-color indication) Relay, PLC Yes Grommet 24 V IC circuit Water resistant (2-color indication) M9PAV M9PA M9BA M9BAV Magnetic field resistant (2-color indication) P3DW 2-wire (Non-polar) 3-wire (NPN equivalent) A96 A93
Size: 50mm, Cushion: R (Internal Shock Absorber), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: Z (5m)
Size: 10mm, Cushion: A (Cushion Pad), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Size: 10mm, Cushion: A (Cushion Pad), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Size: 10mm, Cushion: A (Cushion Pad), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)
Size: 20mm, Cushion: A (Cushion Pad), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Size: 20mm, Cushion: A (Cushion Pad), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Size: 20mm, Cushion: R (Internal Shock Absorber), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Size: 30mm, Cushion: A (Cushion Pad), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Size: 30mm, Cushion: R (Internal Shock Absorber), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Size: 30mm, Cushion: R (Internal Shock Absorber), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: Z (5m)
Size: 50mm, Cushion: A (Cushion Pad), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Size: 50mm, Cushion: R (Internal Shock Absorber), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Size: 50mm, Cushion: R (Internal Shock Absorber), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 2 pcs. (Or None in the Case of No Switch), Port Type: XF (G1/8)
Size: 50mm, Cushion: R (Internal Shock Absorber), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Port Type: XN (NPT1/8)
Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed), Non-standard Indicator: X, Body Surface Treatment: A (External: Hard Anodized - Internal: Oxalic Acid Anodized), Seal Material: N1 (EPDM (2101-80), Seal Replacement