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~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ . ~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

CJ5-S

Applicable bore size (mm) 8 NT-02SUS 20 13 (15) 12.5 M8 x 1.25 5 Applicable snap ring Dd9 t d L m l NT-03SUS 25, 32 17 (19.6) 16.5 M10 x 1.25 6 0.040 0.076 CD-E02SUS 20, 25 NT-G04SUS 40 Type C 8 for axis 7.6 27.6 22.8 1.5 0.9 19 (21.9) 18 M14 x 1.5 8 0.040 0.076 0.050 0.093 0.065 0.117 CD-E03SUS 32, 40 NT-05SUS 50, 63 10 Type C 10 for axis 9.6 38.4 33 1.55 1.15 27 (31.2) 26 M18 x 1.5 11 CD-E05SUS

Low Friction Cylinders Series MQ

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 10 20.5 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 16 22.5 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 20 24.5 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 25 33.5 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 30, 40 40.5 22 Applicable bore size (mm) Part no.

CE2

NT-04 NT-05 NT-08 NT-10 M14 x 1.5 8 22 25.4 21 CX 11 27 31.2 26 M18 x 1.5 13 32 37.0 31 M22 x 1.5 CY 16 41 47.3 39 M26 x 1.5 MQQ M Allowable Kinetic Energy RHC Operate the stroke reading cylinder with brake within the proper allowable kinetic energy. It must not be operated out of the allowable range, which is shown in the graph on the right.

CE2

NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 M14 x 1.5 CX 26 31.2 27 11 M18 x 1.5 31 37.0 32 13 M22 x 1.5 CY 39 47.3 41 16 M26 x 1.5 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Allowable Kinetic Energy RHC Operate the stroke reading cylinder with brake within the

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

.: NT-015A Material: Carbon steel (Nickel plated) Stud bolt part no.: MT-S20 Material: Chromium molybdenum steel (Nickel plated) 11.5 Width across flats 14 With end lock 3 119.5 + Stroke 137.5 + Stroke 244 Series MTS Precision Cylinder Dimensions: 25 MTS25 Note) Spline rods width across flats have nothing to do with the position of the body mounting face.

High Power Cylinder:

D d H Part no B C 30 M22 X 1.5 26 8 26 SOR-20 20 15.0 12.5 M8 X 1.25 5 13 NT-02 20 36.9 M24 X 1.5 32 8 32 SOR-25 25 19.6 16.5 M10 X 1.25 6 17 NT-03 25/32 43.9 M30 X 1.5 38 9 38 SOR-32 32 25.4 21.0 M14 X 1.5 8 22 NT-04 40 47.3 M33 X 2.0 41 11 41 SOR-40 40 4.10-6 High Power Cylinder Series RHC How to Rotate the Relief Valve Body The relief adjustment screw can be placed in any direction by

Air Cylinder

1 1/2 1.18 1 1/2 3/4-16 2.72 1 1/2 2.76 3 3/4 0 5 5/8 1/2 3/8-24 4 11/16 1 1/8 3.9 1 3/8 400 (4") 6 1/4 2.34 6 1/4 5/8 7/16 1.57 7/8 1 1/2 1.18 1 1/2 3/4-16 2.72 1 1/2 3.32 4 1/2 0 5 5/8 1/2 3/8-24 5 7/16 1 1/8 4.7 9 Series NCA1 Medium Duty Air Cylinder Side Tapped Mounting Type NC A1R (MS4 Mounting Style) P + Stroke Y LF + Stroke WF AA D Across Flats 2-EE (NPTF) DD KK EA MM BA B E/2 4-NT

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Part No. d Cotter pin l d H B Dd9 L C D m (Cut through) Note 1) 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32, 40 50, 63 80, 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 36 51 72 4 4.5 5 44 60 82 3 4

MTS

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 30 0.2 30 0.2 40 38 31 32 57.5 21 109 + Stroke 130 + Stroke 22 0.2 28 22 0.2 4-M5 x 0.8, effective length 8 Rod end male thread 0 0.018 13h7 Width across flats 11 M8 x 1.25 M8 x 1.25 12.8 15 13 5 12 14.5 6 41.5 Stud bolt part no.: MT-S25 Rod end nut part no.: NT

MU

Size B d d C l 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 8 10 10 14 M10 X 1.25 19.6 21.9 25.4 31.2 16.5 18 21 26 25 32 40 50, 63 6 7 8 11 23 27 31 38 25 32 40 50, 63 17 19 22 27 7.6 9.6 9.6 13.4 18.2 22.2 26.2 32.2 CD-MU02 CD-MU03 CD-MU04 CD-MU05 NT-03 NT-MU03 NT-04 NT-05 M12 X 1.25 M14 X 1.5 M18 X 1.5 A nut is attached with rod end male thread as standard.

CLQ

L d l D m d H B C IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 Type C 8 for axis 16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.55 1.55 2.05 2.55 2.55 13 17 22 27 32 41 15.0 19.6 25.4 31.2 37.0 47.3 Type C 10 for axis Type C 10 for axis Type C 14 for axis Type C 18 for axis Type C 22 for axis 24 Series CLQ Compact Cylinder with Lock Double Acting, Single Rod Simple Joint

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

5 @2 %0 %1 %2 %3 %4 8-13-17 18 Series MY2 16, 25, 40 MY2C G Bore size Stroke Q + Stroke PG (LL) L 4-MM, depth M 4-B depth of counter bore C LA Workpiece mounting center line LD through hole PA Workpiece mounting center line Cylinder mounting center line PB PC MW LC LE Cylinder mounting center line QW PF NX 4 x 2-square nut J PD LB NH NT NW PE PE LW NV Courtesy of Steven Engineering, Inc.-

Free Mount Cylinder for Vacuum Series ZCUK

Applicable cylinder bore (mm) 10 16 20 25 32 NTP-010 NTJ-015A NT-015A NT-02 NT-03 WCS4 x 0.7 WCS5 x 0.8 WCS6 x 1 WCS8 x 1 WCS10 x 1 9.2 11. 5 15. 0 19. 6 8 10 13 17 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 4 5 5 6 7.8 9.8 12. 5 16. 5 1261

Series CE1

NTJ-015A NT-02 NT-04 NT-05 12 M5 X 0.8 4 8 9.2 7.8 H B 20 M8 X 1.25 5 13 15.0 12.5 32, 40 M14 X 1.5 8 22 25.4 21.0 50, 63 M18 X 1.5 11 27 31.2 26 Electrical Wiring Output style Input/Output The output signal of the stroke reading cylinder is A/B phase difference output (open collector output) as shown in the figure below.

IZx-OMP0064

Option Drop prevention cover (Common for IZS40, IZS41 and IZS42) IZS31 D Sensor type Feedback sensor F Auto balance sensor [high accuracy type] G IZS31-DF IZS31-DG IZS40 E Number of fixed emitter cartridges IZS40-E3 IZS40-E4 IZS40-E5 3 4 5 Standard bar length Non-standard bar length Image of the product mounted with the cover Standard bar length Non-standard bar length Non-standard bar

CV/MVGQ

NT-04 NT-05 NT-08 NT-10 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 21 26 31 39 8 11 13 16 22 27 32 41 25.4 31.2 37 47.3 10-15-74 Valve Mounted Cylinder Double Acting, Single Rod Series CVS1 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-B5/B64/B59W D-A5/A6/A59W Auto switch Auto switch RE A B Ht Ht REC

70astamb1

(Drill through) Note) Dd9 L l d m H B C CJ1 D Cotter pin 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 3 4 4 44 60 82 36 51 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 4.5 5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 CJP CJ2 Note) When

mb1

(Drill through) Note) Dd9 L l d m H B C CJ1 D Cotter pin 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 3 4 4 44 60 82 36 51 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 4.5 5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 CJP CJ2 Note) When

Compact Cylinder with Air Cushion

L d m t M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 5 6 8 11 13 16 13 17 22 27 32 41 15.0 19.6 25.4 31.2 37.0 47.3 NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 0.040 0.076 8 20 C8 type for pivot 21 7.6 16.2 1.5 0.9 IY-G02 0.040 0.076 10 25 C10 type for pivot 25.6 9.6 20.2 1.55 1.15 IY-G03 0.040 0.076 10 32,40 C10 type for pivot 41.6 9.6 36.2 1.55 1.15 IY-G04 0.050 0.093 14 50,63 C14