Process Pump Series PA3000/5000/PAX1000 Series PB1000 Rc NPTF G NPT F N T, F, N are order made specifications.
Rc NPTF G NPT F N T, F, N are order made specifications.
Note 2) Combinations of H and M, R and S, S and T, L and M are not available. Note 3) Option "T" is not available for IDU6D, 8D-4 and -6.
e t e q IN OUT IN OUT r r q w w Component Parts No.
1 r t !1 !0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open. When the pilot operated solenoid valve !
the stud axis 4/2.5 x M5 4/2.5 x M5 MS-5HLH-4 MS-5ATHU-4 For soft nylon and polyurethane tube KG KFG2 6/4 x M5 6/4 x M5 MS-5ATHU-6 MS-5HLH-6 MS MS P.338 P.339 KKA KP LQ MQR T IDK 337 MS Series Barb Fitting for Soft Tube: MS-5AU-3/4/6 Weight (g) 1.4 1.5 Effective area (mm2) 1.7 2.1 Model C D L MS-5AU-3 MS-5AU-4 4.5 5 1.6 1.8 11.5 12 MS-5AU-6 7 2.5 14 4.0 1.7 Width across flats 7 Barb Elbow
3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50VDC or less) Indicator light with surge voltage suppressor 9 Z A02 VS1 01 Sub-plate Thread type Size Rc Nil F T 01 02 Size 01 G Size 02 NPTF Port size Symbol A01 A02 Piping specifications Size 02 Size 01 Side-ported 1/8 Side-ported 1/4 Specifications Piping specifications Weight (kg) Model Port size for 1(P), 2
Type T: 6 to 8 mm Type E: 2.3 to 2.8 mm Type D,Y: 4.5 to 7 mm Applicable crimp terminal Type E, T: 1.25-31.25-3S1.25Y-3N1.25Y-3S (Round shape or Y shape crimp terminal cannot be used for Type D.) DIN terminal block type Male pin terminal of DIN terminal block of solenoid valves are wired as shown below. Connect to corresponding terminal on the connector.
through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases
Refer to p.0-26 and 0-27 for Safety Instruction and common precaution of the products mentioned in this catalog, and refer to p.3.0-7 to 3.0-9 for precautions on every series.
Note Platinum silver Platinum silver Black Black Material Aluminum die-casted q Description Sub-plate Body Thread Type Aluminum die-casted Stainless steel w e Spool/Sleeve Adapter plate Nil Standard Rc r Resin NPT N T t Resin End plate Option NPTF y Resin Piston G F Replacement Parts Part no. No.
21.5 4 2 M6 x 1 (Width across flats 3) M8 x 1 (Width across flats 4) MXY8 30 70 10 40 29 M4 x 0.7 25 20.9 3.5 25 4 14 5 2.5 MXY12 40 M5 x 0.8 8.5 86 15 52 31 18 36 30.9 32 5 6 3 PH R RH RL T TB P PL PR Q QW TH W WD WE WR Z Model MXY6 4 2.9 5.1 13 7 9 11 60 12 3(depth 3) 3(depth 3) 2.5 30 5 88 25.5 20 MXY8 4 3.4 6.1 19 7 10 13 70 15 3(depth 3) 3(depth 3) 3 38 6.5 98 32 25 MXY12 5 4.5 7.8
T 25 TF L CKZP 57 TF T 25 CKZP 71 Switch output display Bore size Retracted Extended Nil Yellow Red 71 71 mm R Red Yellow Port thread types TF G TN NPT Proximity switch T TURCK P P&F Stroke 25 25 mm 50 50 mm Proximity Switch Specications Specications Bore size 57 71 Manufacturer TURCK P&F Power supply voltage 10 to 30 VDC 10 to 30 VDC Fluid Air Output N.O., PNP N.O., PNP Maximum operating
Knuckle Pin (Common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel Surface treatment: Nickel plated mm Material: Carbon steel mm Applicable bore size (mm) Retaining ring Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 l D d H B C Part no.
Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output Max. 30 V, 80 mA Residual voltage 1 V or less 1.5 MPa Withstand pressure 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at no load) Current consumption
Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output Max. 30 V, 80 mA Residual voltage 1 V or less 1.5 MPa Withstand pressure 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at no load) Current consumption
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Knuckle Pin (Common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel Material: Carbon steel Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 Applicable bore size (mm) Snap ring l D d H B C Part no.
Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.