Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber, Option: -

Series: 25A-PFM7, Flow Rate Range: 25 [0.5 to 25 (12.5) L/min], Port Size: C8 [ø8 (5/16") One-touch Fitting], Piping Entry Direction: Bottom Side, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber, Option: Panel Mount

Series: 25A-PFM7, Flow Rate Range: 10 [0.2 to 10 (5) L/min], Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber, Option: -

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: Rc1/4, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber, Option: -

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: C8 [ø8 (5/16") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber, Option: -

Series: 25A-PFM7, Flow Rate Range: 50 [1 to 50 (25) L/min], Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber, Option: -

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B B A W A B stroke 6 5 to 30 3.5 0 17 6.5 13 3.5 2.5(5) 17 4.5 5 to 20 17 13 17 10 25 7.5 3.5 20 16 2.5 7.5 20 1.5 0.5 30 19 15 19 (1) 5 27 23 27 10 22 18 22 15 27 23 27 16 8 4 2 8 2 0 B A 20 22 18 22 Bore (mm) 6 10 16 25 27 23 27 (0.5) 6.9 10 30 27 23 27 8.8 14 13.9 19 Note 1) Negative figures

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

Serial Transmission System Series EX250 Series EX500

A One-touch fitting for 12 is attached to each port.

ML1

W: Weight (kg) F: Load (N) FE: Load equivalent to impact (N) a: Average speed (mm/s) M: Static moment (Nm) : Collision speed (mm/s) L1: Distance to center of load gravity (m) ME: Dynamic moment (Nm) g: Gravitational acceleration (9.8m/s2) 1.4 100 =1.4 a(mm/s) FE= agW (4) 1 3 ME= FEL1=0.05aWL1(Nm) Note 4) Average load ratio (This is for averaging Max. load moment when stopper collides in case

ZMA

K With air supply valve, Vacuum release valve Thread type Nil Rc T F NPTF G Table (1) Combination of Nozzle Diameter and Standard Supply Pressure Standard supply pressure (MPa) Nozzle diameter M (0.35) S (0.45) H (0.5) 0.5 0.7 1.0 1.3 1.5 Table (2) Lead wire with 4-wire connector P5022-6-1 (0.6 m) P5022-6-2 (3 m) 13-4-23 4 Series ZMA Model H M Standard supply pressure Nozzle diameter (mm)

44

Width across flat Effective area (mm2) Connection thread R A Weight (g) L M d Model H1 H2 I.D.

Soft Start-up Valve

across flats 19 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth 8 6 Width across flats 32 AV5000-m06, 10-5 to 6G(Z)m-A 8 AV2000-A/3000-A/4000-A/5000-A Series Dimensions DIN terminal: AVm00-m-mD/Ymm-m-A Applicable

CM2

Please delete the unnecessary part. 1.4-18 Series CM2 Accessory Dimensions Single Knuckle Joint (mm) Single Knuckle Joint (mm) Applicable bore size 20 25/32 40 Bore size 20 25/32 40 A NDH10 U1 NX1 A NDH10 R1 NX U1 R2 Z Part No.

Dedicated Controller

Over current 20 Three times the rated current or more is flowing into the driver unit. Over load 21 The driver unit continuously received a current exceeding the rated current for a prescribed time or longer. Over speed 22 The controller exceeded the maximum operational speed. Abnormal driver temperature 24 A temperature increase of the driver unit activated the temperature sensor.

Vacuum Filter AFJ Series

Note 2) 5 m elements use fiber type element which filtrate 5 m. Note 3) The element for 40 m uses a resin mesh with openings of 40 m in height and width. Note 4) The element for 80 m uses a resin mesh with openings of 80 m in height and width. Note 5) The amount of processed air when the initial pressure loss is 4 kPa.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

max Model CYV15 1 CYV32 5 (Nm) M1 M2 Model CYV15 CYV32 M1 0.3 3 M2 0.6 4 M3 0.3 3 m m Static Moment Moment generated by the work piece weight even when the cylinder is stopped Pitch moment M1 = m x g x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass

Low Maintenance Filter Series FN1

(20m) .005 .005 .001 10 30 50 70 100 .001 10 30 50 70 100 Q (l/min) Q (l/min) Filtration Efficiency (Initial Value) Fluid: Potable water Flow rate: 20l/min Liquid temperature: Room temperature Test dust: AC course Amount of dust: 0.2mg/min Test method: Per P/A test method (sanitary test stand, HIAC particle counter) 100 100 ) m ) ) m m 0 ) 0 m (2 (2 (5 (5 20 20 05 05 -0 S0 S0 S0 0S 00080

Vacuum Equipment

Pad Bellows Pad For a workpiece that does not have a space for a buffer, or for a workpiece with a diagonal surface. Caution Guide for drop prevention If multiple pads are used for transporting a flat object with a large surface area, properly allocate the pads to maintain balance.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

N 0.5MPa 0.5MPa 40 40 0.4MPa 0.4MPa F 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 0 0 10 10 20 20 30 30 40 40 Gripping point L mm Gripping point L mm MHS2-25D MHS2-25D 100 100 F Internal gripping Pressure 0.6MPa Pressure 0.6MPa 80 80 Gripping force N Gripping force N 0.5MPa 0.5MPa 60 60 Note: 1N = 0.2248lbf 1in = 25.4mm 1MPa = 145psi 0.4MPa 0.4MPa 40 40 0.3MPa 0.3MPa 0.2MPa 0.2MPa 20 20 0 0 10 10