HRX-OM-M005

Table 7-1 Water Quality Standards Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max. 200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max. 100 Max.50 Total hardness (mgCaCO3/L) Max. 200 Max.70 Calcium hardness (mgCaCO3/L) Max. 150

HRX-OM-K003

C 10 to 35 Facility water Facility water IN pressure MPa 0.3 to 0.7 (45 to 100 [PSIG]) Facility water port Rc 3/4 Power supply 3-phase 50/60Hz AC200/200 to 208V10% Main breaker size A 30 Main breaker amperes interrupting capacity kA 50 Dimensions *6 mm W380D665H860 (W14.96xD26.18xH33.86 [inch]) Weight (HRW-H / HRW-HS)*7 kg Approx. 90 (198 [lbs]) / Approx. 95 (209 [lbs]) Approx. 100 (221 [

VT317

Lubrication Manual override Non-locking push type Mounting orientation Unrestricted 150/50 m/s2 Shock/Vibration resistance (2) Dustproof Enclosure Grommet, Conduit, Conduit terminal, DIN terminal 100, 200, 24 , 48 , 110 , 220 , 240 Electrical entry DC AC (50/60 Hz) Coil rated voltage (V) 24, 6 , 12 , 48 , 100 Allowable voltage fluctuation 15 to +10% of rated voltage 19 VA (50 Hz), 16 VA

VZ1000

Coil rated voltage (V) 24, 6, 12, 48 Allowable voltage fluctuation (%) Power consumption (W) [Current mA] 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Note) Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200

Clean Tubing: Polyolefin Tubing Series TPH

Clean Tubing: Polyolefin Tubing Series TPH Model/Specifications 20 m roll 100 m reel TPH0425 TPH0604 TPH0806 TPH1075 TPH1209 Model O.D. (mm) 4 6 8 10 12 I.D.

Bag Filter FGF Series

FN Number of elements Nominal filtration accuracy Note) Element size Number of elements 1 pc included (FGF1) 3 pcs included (FGF3) 5 pcs included (FGF5) Symbol 1 3 5 EB ES Element material (Polyester) Symbol Nominal filtration accuracy (m) Element size 190 x L440 190 x L770 Symbol A B 005 010 025 050 100 5 10 25 50 100 Port size Port size Rc2 100(4B)JIS10KFF 150(6B)JIS10KFF Applicable model

KG

(100) 44.5 112 16 22 1 2 KGT16-04 40.5 46 116 Reference dimensions after R thread installation.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Nil A F J K M Rear flange surface Indicator Without indicator Pilot port direction Indicator Without indicator Pilot port direction Symbol Nil A F G J K L M Right flange surface Left flange surface Right flange surface Left flange surface Rear flange side Rear flange side Left flange surface Right flange surface Left flange

SMC Pneumatic Clean Series

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

High-precision Digital Pressure Switch ( compatible)

0 Display units, switch output specifications and diagnostic information selection function 27 F 1 Setting of OUT1 29 F 2 Setting of OUT2 32 F 3 Digital filter setting 34 F 4 Auto-preset function 35 F 6 Fine adjustment of display value 37 F10 Sub display setting 38 F11 Display resolution setting 44 F14 Zero cut-off setting 45 F80 Power saving mode 46 F81 Security code 47 F90 Setting of all

High-precision Digital Pressure Switch

0 Display units, switch output specifications and diagnostic information selection function 30 F 1 Setting of OUT1 32 F 2 Setting of OUT2 35 F 3 Digital filter setting 37 F 4 Auto-preset function 38 F 6 Fine adjustment of display value 40 F10 Sub display setting 41 F11 Display resolution setting 47 F14 Zero cut-off setting 48 F80 Power saving mode 49 F81 Security code 50 F90 Setting of all

High-precision Digital Pressure Switch

0 Display units and switch output specifications function 26 F 1 Setting of OUT1 27 F 2 Setting of OUT2 30 F 3 Digital filter setting 32 F 4 Auto-preset function 33 F 6 Fine adjustment of display value 35 F10 Sub display setting 36 F11 Display resolution setting 42 F14 Zero cut-off setting 43 F80 Power saving mode 44 F81 Security code 45 F90 Setting of all functions 47 F96 Number of pressurizing

Air Combination

AC-OMX0051-D PRODUCT NAME Air Combination MODEL / Series / Product Number AC20(A)-(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,3,6,C,J,N,R,Z,ZA)-D AC20B,C,D -(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,6,C,J,N,R,Z,ZA)-D AC30(A)-(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC30B,C,D -(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC40(A)-(F,N)02~(F,N)04(C,D

IZ-OMU0031-CN

1]OUT1[F 2]OUT2 P_1 H_1 [kv] ON OFF [] <> 1 [P_1] -16No.IZ*-OMU0031 1 1 [P_2] -17No.IZ*-OMU0031 2[F 0] [F] 2 2 [F 0] 0.4 kV 19 [F 1] OUT1 [F 2] OUT2 20 OUT1+0.2 kV OUT2-0.2 kV 0.04 kV [F 1] OUT1 ON OFF 21 [F 3] 25 mm 22 [F 4] 1 23 [F 5] ON 24 [F 6] OFF 25 [F98] OFF 26 [F99] OFF 27 -18No.IZ*-OMU0031 [F 0] <> [F 0] [F 0] -19No.IZ*-OMU0031 [F 1] OUT1 OUT1 ON OUT1ONOFF

PSxx-OMV0003CN

OUT1 OUT2 OUT2 SET [F 2] OUT2 1SET 2SETSET2 -33No.PS-OMV0003CN-G [F 3] 0.01 sec.0.0030.00 sec. <> UPDOWN[F 3] SET UP DOWN SET [F 3] 190% 2(233033) -34No.PS-OMV0003CN-G [F 4] <> ,UPDOWN[F 4] SET UP DOWN SET [F 4] SET SET (36) -35No.PS-OMV0003CN-G () OUT1 SET[AP1 REdY] (OUT1[AP1 REdY]UPDOWN1 OUT2) OUT1 OUT1 OUT1 SET[AP1 RUn] ([AP1 RUn]UPDOWN1 OUT2) OUT2 SET[AP2 REdY] (OUT2

Electrostatic Sensor Monitor

Item Default setting Page [F 0] Select connect sensor Sensor for 0.4 kV See page 19 Output mode Hysteresis mode Reversed output Normal output [F 1] Operation of OUT1 [F 2] Operation of OUT2 See page 20 Charged potential setting OUT1: +0.2 kV OUT2: -0.2 kV Hysteresis Hysteresis: 0.04 kV [F 1] Operation of OUT1 Display color ON: Green OFF: Red See page 21 [F 3] Measured distance setting 25

PSxx-OMV0008CN

23 [H_2] [WH2] (58) SET 25 ON OFF SET UP DOWN ON ON ON ON OFF OFF OFF OFF OUT1 OUT1 OUT2 OUT2 SET [F 2] OUT2 1SET 2SETSET2 -36No.PS-OMV0008CN-E [F 3] 0.0030.00 sec.0.01 sec. <> UPDOWN[F 3] SET UP DOWN SET [F 3] 190% 2(253336) -37No.PS-OMV0008CN-E [F 4] <> ,UPDOWN[F 4] SET UP DOWN SET [F 4] SET SET (39) -38No.PS-OMV0008CN-E OUT1 SET[AP1 REdY] (OUT1[AP1

Fieldbus system (SI unit – PROFIBUS DP compatible)

rate (kbps) 9.6 19.2 45.45 93.75 187.5 500 1500 12000 Wiring length (m) 1200 1000 400 200 100 -10No.EX-OME0014-F Terminator It is necessary to attach bus terminator resistance to the units located at the ends of transmission line. : Contact each manufacture about Communication cable and Bus Tee. -11No.EX-OME0014-F Power supply wiring Power supply line inside the unit has individual power

Modular Type Filter Regulator Series AW

Contact P/A regarding the specifications for PSI unit and F .

Modular Type Air Filter Series AF

Contact P/A regarding the bowl assembly supply for PSI and F unit specifications.