SI unit for EtherNet/IP TM

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.

ø 32, ø 40, ø 50, ø 63 Compact Cylinder With Solenoid Valve Series CVQ

S, Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% Operating pressure (MPa) Bore size (mm) 0.3 Operating direction 0.5 0.7 181 IN 302 422 32 241 OUT 402 563 Standard Stroke 317 IN 528 739 40 (mm) Bore size (mm) Standard stroke 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 377 OUT 628 880 IN 495 825 1150 32 1 50 OUT 589 982 1370 40 50 2 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15,

MHx-OMZ0005

No.MH*-OMZ0005 / / JMHZ2-16D-X7400B-(HC10/HC10DT)-(N/P) . 2 1. . 4 2. . 5 3. . 6 3-1. . 6 JMHZ2-16D-X7400B-HC10 . 6 JMHZ2-16D-X7400B-HC10DT . 6 3-2. . 7 3-3. . 8 3-4. . 9 3-5. . 10 JMHZ2-16D-X7400B-HC10-(*) . 10 JMHZ2-16D-X7400B-HC10DT-(*) . 11 3-6. . 12 3-7. . 13 JMHZ2-16D-X7400B-HC10-(*) . 13 JMHZ2-16D-X7400B-HC10DT-(*) . 13 4 . 14 4-1. . 14 4-2. 3 . 15 4-3. . 16 5. . 17 5-1

SI unit for PROFIBUS DP

length (L) 4 1500 [mm] 5 3000 [mm] 6 5000 [mm] Item Specifications Pin No.

Micro-Mist Separator with Prefilter Series AMH

66 17 10 218 80 22 10 218 80 19 10 241 90 25 10 241 90 21 10 277 100 30 10 334 150 40 13 13 16 16 19 19 22 22 32 100 63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37

EX250-SEN_eng

Safety Instructions 1 Brown: 24 VDC +10%/-5% (Solenoid valve power supply) Refer to the operation manual from SMC website (URL http://www.smcworld.com) for more information about troubleshooting. 5 2 White: 0 V (Solenoid valve power supply) Warning 3 Blue: 24 VDC 10% (Control power supply) 4 3 66 DHCP mode (SW1 Dip switches 1-4 ON) 4 Black: 0 V (Control power supply) The IP addressis acquired

PS-OMH0005CN

0.001 MPa DC1224 V(pp) 10() 55 mA() [] -1.5 V 40 mA(4100 mA) 2 DC15 V(800 k) 4 (26.4 V) 3 3 digits NPNPNP 5(CH12CH2CH41) 80 mA DC30 V(NPN) 1 V(80 mA) 5 ms 20160640 ms 0.1F.S. 1 digit (25 ) 0.5F.S. 1 digit 4 7() 1 7() ON() ()10 msON/OFF IP65()IP40 050 -1060 () 3585RH() AC1000 V1 50 M(DC500 V) 0.5F.S.(25 ) 8Pe-con CERoHS 8 4.8 2 m 0.15 mm 2 0.9 mm PBTCR

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

Static allowable moment [Nm] Note5) 10 27 46 110 Mep (Pitching) 110 10 27 46 Mey (Yawing) 207 20 52 101 Mer (Rolling) Operating temperature range [] 5 to 40 Operating humidity range [%RH] 90 or less(No condensation) Motor size 42 56.4 56.4 28 specifications Motor type Battery-less Absolute(Step motor 24VDC) Electric Encoder Battery-less Absolute encoder Rated voltage [V] 24 VDC10% Power

2 PORT SOLENOID VALVE FOR DUST COLLECTOR

VXF-26AA VXF-26AC 24.529.5 29.434.3 VXF(A)26A(B,D) Note.5) VXF-26AB VXF-26AD VXF(A)25B(A,B,C,D) VXF-25AA VXF-25AC 12.515 1517.5 VXF(A)26B(A,C) Note.5) VXF-26BA VXF-26BC VXF(A)26B(B,D) Note.5) VXF-26BB VXF-26BD VXF(A)26C(A,C) Note.5) VXF-26CA VXF-26CC VXF(A)26C(B,D) Note.5) VXF-26CB VXF-26CD 24.529.5 29.434.3 VXF(A)26D(A,C) Note.5,6) VXF-26CA VXF-26CC VXF(A)26D(B,D) Note.5,6) VXF-26CB VXF

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 6 8 10 12 19 1/8" 1/4" 3/16" 3/8" 1/2" 3/4" 1" 25 4 3 1 2 3 Male 4 5 Branch tee LQ1B P.10 6 1 2 3 Female 4 5 P.11 6 1 2 3 Union elbow LQ1E 4 5 P.12 6 1 2 3 Union tee LQ1T 4 5 P.13 6 1 2 3 Panel mount union LQ1P 4 5 P.14 6 1 2 3 Union LQ1U 4 5 P.15 6 4 Union flange LQ1F 5 P.15 6 Note) Basic size With reducer Features

Return Filter

Maintenance parts (5) Maintenance (Refer to 6. Maintenance parts (5) Maintenance (Refer to 6. Maintenance parts (5) Maintenance (Refer to 6. Maintenance parts (5) Maintenance (Refer to 6. Maintenance parts (5) Maintenance When installing, allow sufficient space for maintenance. When installing, allow sufficient space for maintenance.

0.4

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port

Series 10-SV ® EX500 Decentralized Serial Wiring

One-touch fitting Rc 1/4 Rc 3/8 G 1/4 G 3/8 Mixed 8 One-touch fitting 5/16" One-touch fitting 10-SV1000 10-SV1000 10 One-touch fitting 3/8" One-touch fitting 10-SV2000 10-SV2000 12 One-touch fitting 3/8" One-touch fitting 10-SV3000 10-SV3000 3/8" One-touch fitting 12 One-touch fitting 10-SV4000 NPT 3/8 10-SV4000 Rc 3/8 NPTF 3/8 G 3/8 For mixed specifications (M), indicate separately on the

CG1-OM0227

AF AR 1) 5 2) 3) 5 4 4) 1 ( )ISO VG-32 2-2. 1) 2) 3) 4) 5) 6) 7 8) 9) 10) 3 1) 2) 3) 4) 5 5) (40) 2-3. 1) 2) 1) 1 P10[3. ] () (fR)[N] [mm] 1. 6 (MPa)=(MPa)+{(kg) 2)} X /(mm ,, 2) 3) 4) ( ) 5) 6) 7)()1 1 Nm CG120 1.5 1.52.2 CG125 2.9 2.53.5 CG132 2.9 6.08.6 CG140 4.9 10.814.6 CG150 11.8 1925 CG163 24.5 3040 CG180 24.5 --CG1100 42.2 --8) 9) 10) 11) 12) 7

PSE540/560

V Output impedance Approx. 1 k Brown DC (+) Main circuit 1 k Black OUT 10 to 24 VDC + (Analog output) Load Blue DC () Dimensions PSE5R04 R06 PSE54M3 M5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B 10 10 A B 14.4 10 With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

16 20 25 12 16 20 25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5

MIW/MIS

type/MIS (mm) 62 10 MIS8-10D Bore size Stroke 2 3 80 20 MIS8-20D 8 12 20 25 32 10, 20 mm 10, 20, 30 mm 130 10 MIS12-10D 10, 20, 30 mm 3 5 160 20 MIS12-20D 30, 50 mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D MIS D5 15 355 20 MIS20-20D Made to Order (For detailes, refer to page 2020.) 30 410 MIS20-30D -X Symbol Specifications 30 800 MIS25-30D 10 15 -X4 -X5 -X63 -X79 Heat resistant (-10 to

BP1000

-10 Pam3/sec He Bubble tight Ra ma x 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.65 lbs (1.2 kg) 2) Inboard leakage Outboard leakage Leak rate Across the seat leak Surface finish Connections Installation Internal volume Mass 1) 22 to 160F (30 to 71C) for Teflon seat.

Smooth Vent Valve

Operating temperature (C) 5 to 60C (Baking temperature 150C or less) Operating pressure (Pa) 1 x 10-6 (abs) to 0.2 MPa (G) Orifice diameter (mm) 3 Main air supply 4.6 Effective area (mm2) Initial air supply 0.2 to 4.6 Internal 5 x 10-9 At normal temperature, excluding gas permeation Leakage (Pam3/s) External 1.3 x 10-11 At normal temperature, excluding gas permeation Fitting 1.3 x 10-11 1.3

Peltier-type Chiller Thermo-con/ Compact Type

temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the heating capacity increases by approx. 10 W.