SMC

A 9.5 11 11 1.5 30 5.1 B A 11.5 29 11.5 29 H G (NN1) x H Section AA Section BB (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 44 G 15

Plug-in/Plug Lead: Single Unit

A Unused A Unused A Unused A Unused A Unused VQC A B A B A B A B A B A A A B A B A B A A A A SQ 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 6 7 8 9 10 11 12 13 14 15 0 0 1 2 3 4 5 VQ0 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System VQ4 VQ5 ADDRESS NO. STATION NO.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

30.5 31.5 18.5 19.5 Grommet (Perpendicular) Reed switch Model Model 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 D-A90V 5 25.5 26.5 13.5 14.5 A B A B A B A B C D Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.

2–4

Symbol A B W A B W A B W HS 16.5 18.5 22 24 26.5 30 36 12 16 20 25 32 40 50 5.5 6 2.5 0.5 1 -1.5 -4.5 14.5 15 11.5 9.5 10 7.5 4.5 1.5 (4) 2 (4.5) -1.5 (1) -3.5 (-1) -3 (-0.5) -5.5 (-3) -8.5 (-6.5) 4.5 4 7.5 9.5 9 11.5 14.5 3.5 3 6.5 8.5 8 10.5 13.5 0 0 3.5 5.5 5 7.5 10.5 5.5 6 10 11 12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Bore size (mm) The dimension inside ( ) is for D-A93.

MY1

10 1.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

Series VQ Metal Seal/Rubber Seal Body Ported

SI unit output No. 0 1 2 3 4 5 6 7 8 9 SI unit output No. 0 1 2 3 4 5 6 7 A B A B B A Void A Void A A B A B B A A A SY Double Double Double Double Double SI unit SI unit Single Single Single Single Single SYJ Stations 1 2 3 4 5 Stations 1 2 3 4 5 Single/Double mixed wiring (Option) Double wiring (Standard) SX SC applicable to SYSBUS Wire System (OMRON) SD applicable to Satellite I/O Link

21

Note 2) D-K39A Note 2) D-M9l D-M9lW D-A9l D-B59W D-H7C D-H7BAL D-H7NF D-G5NTL D-B54 D-B64 D-C73C D-C80C A A B A B B B A B A B A B A B Bore size A 20 25 32 40 10 9 6 5 0.5 0 5.5 3.5 2.5 0 0 5.5 4.5 2 1 6.5 10 10 6 6 0.5 0.5 6.5 3.5 3.5 0 0 5.5 5.5 2 2 6.5 10 10 6 6 0.5 0.5 6.5 3.5 3.5 0 0 5.5 5.5 2 2 6.5 12 12 8 8 2.5 2.5 8.5 5.5 5.5 2 2 7.5 7.5 4 4 8.5 Note 1) Adjust the auto switch after

ISO Standard Hydraulic Cylinder

D-A59W D-Z7/Z80 D-M9/M9W D-M9A Bore size (mm) Bore size (mm) D-Z7/Z80 D-A5/A6 A B A B A B A B A B A B Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs 40 50 63 80 100 40 50 63 80 100 11.5 8.5 8 5 13 10 5 2 27 28.5 27 34 35.5 28.5 29 27 13 8 9.5 4.5 14.5 9.5 6.5 1.5 33 33.5 33 38.5 39.5 34.5 33 33 4.5 0 8.5 3.5 47.5 38.5 14.5 9.5 11 6 16 11 8 3 38.5 38 38.5 43.5 45 38.5 28 37 8.5 3.5 12.5 7.5 54

LEF-OM002xx

300 400 500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500

SMC Pneumatic Clean Series

Applicable bore size NTJ-006A NTJ-010A NTJ-015A B C d H B C d H Part no. 6 10 16 6 10 16 11 14 17 12.7 16.2 19.6 M8 x 1.0 M10 x 1.0 M12 x 1.0 4 4 4 5.5 7 8 6.4 8.1 9.2 M3 x 0.5 M4 x 0.7 M5 x 0.8 2.4 3.2 4 The applicable mounting nuts are different from those for standard cylinders. 7 Series CJ2W 10-/1121-/22Double Rod Cylinder / 10, 16 How to Order Clean Series 10 11 Relief type Vacuum suction

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

W W FY B D E d MA M a NB C F A K NA B S + Stroke FT H FX ZZ + Stroke FZ With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C d F FD FT FX FY FZ G GA GB J K M MA MM NA NB P R D E 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 23 10 60 44 18 25 9 10 77 44 95 14 17.5 9.5 M8 x 1.25 18 16 20 M14

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01

VEX1

-20 VEX5504 06 10 VEX57-10 12 14 20 VEX591978 Power Valve: Economy Valve Series VEX5 How to Order How to order pilot valves VEX5 1 06 2 E Z 5 1 B SF4 20 Option Economy valve Light/Surge voltage suppressor None Nil Bracket B G Pressure gauge Electrical entry Rated voltage Light/Surge voltage suppressor (Only with solenoid) Type (Ex.)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(12) 2n-C6, C8, C10, 02 (7.5) (5.5) 26 C8: One-touch fittings for 8 C6: One-touch fittings for 6 (4) 44.5 Mounting holes Grommet (G) C10: One-touch fittings for 10 02: Rc(PT)1/4 U side DIN rail clamp screw n Manual override 5 A A A A 2 4 B 4 4 4 4 (L4) (L3) 2 L2 L1 3 B 2 2 P=19 B 2 1 SMC B 21 Stations 6 D side 9 9 10.5 10.5 58 37 95 (Single) (C6, C8) 17.5 10.5 (C10) 116.5 (Double) 130

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGZR Double Power Cylinder/ Without Non-rotating Mechanism Double Clevis Bracket DX B Z + Stroke DB DD 4 x DT B DS DH 4 x DR DA DU DU DL DC DE DO DO Bore size (mm) 22 22 30 30 45 45 60 DX DS DH Z DDH10 DC DT DU DR DO DL DE B DA DB Model 20 25 32 40 50 63 80 14 14 20 20 30 30 32 7 7 8 8 10 10 14 44 44 60 60 86 86 110 15 15 18 18 22 22 24 10 10 11.5 11.5 14 14 15 6.6 6.6 9 9 11 11 13.5 9 9

Rotary Table/Vane Style Series MSU

For 90 rotation Single vane (S): 80 to 100 adjustable Double vane (D): 85 to 95 adjustable A B 180 Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 10 10 22.5 DSize Allowable radial load (N) Allowable thrust load (N) Allowable moment (Nm) 1 10 15 20 0.3 A B Positioning pin hole 3 15 30 40 0.7 Adjustment bolt (A) Adjustment bolt (B) 7 30 60 50 0.9 20 For 180

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

3-R1.5 2-4.5 through ( A , B , C ) 15.5 45 9 2 36 3 42h9 0 0.062 8 11 8 1.5 5 5 18.3 29 11 Angle adjustment bolt 2-4.5 through 3-R1.5 6 2-M5 x 0.8 Adjustment: Max. 8.2 6 B port A port 0.5 +0.025 0 3-3H9 long groove depth 2.5 ( A , B , C ) 5g6 0.004 0.012 12h9 0 0.043 4-M4 x 0.7 depth 8 34 0 0.062 42h9 Top ported: MSUA3-SE 36 10 A port B port 2-M3 x 0.5 11 11-5-10 10 Series MSUA Rotary Table