ZP

7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made to Order Note) The

ZP3

w w q q q 7 Nut Structural steel (Trivalent chromated) M6 x 0.75 M8 x 0.75 8 Bushing 9 Fitting 161 A Basic/Compact Type Specific Product Precautions Be sure to read this before handling the products.

Aluminum High Vacuum Angle Valve

x 10-9 Nil A B C None w, e w e Seal material XSA 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) XVD Note 1) Values at normal temperature, excluding gas permeation.

Table of Contents

1 Drain q r e w t i u y o !0 !

Modular Design with Uniform Body Style

OUT q (Port size) OUT q (Port size) Port size IN OUT OUT q e OUT w 1/8 Port size IN OUT OUT q e OUT w e Standard Specifications Fluid Air Ambient and fluid temperatures 5 to 60C (No freezing) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Dimensions Body type: Standard Body type: Front and back port selectable 2 x P1 2 x P2 2 x P1 2 x P2 B B Center of F.R.L. body C Center of F.R.L

CRQ2

Applicable shaft types: S, W E3 = LL LL E1 = Key L1 = X = L3 = (mm) (mm) Key dimensions 4 x 4 x 20 4 x 4 x 20 5 x 5 x 25 LL 3 4 5 Size 20 30 40 X 8 to 18 10 to 20 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) Size 10 15 L3max X-2 X-2 11-8-15 16 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA31 to -XA46: Shaft Pattern Sequencing II Shaft shape pattern is dealt with simple

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

0.8 1/8 M5 x 0.8 1/8 P, R port Port size M5 x 0.8 C4 (One-touch fitting for 4) M3 x 0.5 A port M3 x 0.5 Flow characteristics Flow characteristics Effective area (mm 2) Port size 12(PA) 23(AR) Manifold C [dm3/(sbar)] 1 (P), 3 (R) port 2 (A) port b Cv C [dm3/(sbar)] b Cv Body ported for internal pilot 0.9 10-SYJ32M M3 x 0.5 M5 x 0.8 Type 10-SS3YJ3-20 Type 10-SS3YJ341 S41 M3 x 0.5 M5 x 0.8 1.5

LJ1H

Particle concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering

Table of Contents

24 1 3 to 90 L x 5.3 + 200 TCU1208-1-N-X6 TCU0604-2-N-X6 1 3 to 35 N x 12 67 L x 5 + 200 6 4 N x 12 2 3 to 66 37 L x 3.8 + 200 12 8 TCU1208-2-N-X6 TCU0604-3-N-X6 2 3 to 30 67 N x 24 L x 3 + 200 37 N x 18 3 3 to 44 L x 2.5 + 200 : B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Clear), YR (Orange) 15-6-8 1 Polyurethane Flat Tubing Series TFU Compact piping possible Model

C85

(mm) 4 4 6 6 8 10 Piston rod thread M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 Space-saving Port size M 5 x 0.8 M 5 x 0.8 M 5 x 0.8 M 5 x 0.8 G 1/8 G 1/8 Mounting accuracy and rigidity made possible by means of faucet joint and direct mounting.

VFS

VVFS3000-5-1A VVFS3000-5-2 VVFS3000-7-1 VVFS3000-8 19.8 x 16.6 x 1.6 (End plate) 20 x 16 x 2 (Manifold block) 6.2 x 3 x 1.6 VVFS3000-6A VVFS3000-4AAZ738-22AAXT336-9 No. q w e r t y u i Material Steel plate Steel plate NBR NBR NBR NBR NBR For increasing the manifold bases, please order the manifold block assembly number of the principal part assembly !0.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: S, W, Y L1 L1 = Q1 = M LL LL L2 = Q2 = M Q1 (mm) (mm) Size Size Keyway dimensions 30 50 63 80 100 30 50 63 80 100 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 2.5 4 5 4 5 6.8 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 LL 3 5 5 5 5 Key groove

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: S, W, Y L1 L1 = Q1 = M LL LL L2 = Q2 = M Q1 (mm) (mm) Size Size Keyway dimensions 30 50 63 80 100 30 50 63 80 100 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 2.5 4 5 4 5 6.8 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 LL 3 5 5 5 5 Key groove

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) DE1 = LL L3 max LL Size L1 X E3 = 10 9 (14 X) to (X 1) 3 to 14 X 1 15 10 (18 X) to (X 1.5) (mm) 3 to 18 X 1.5 LL Size Keyway dimensions 20 10 (20 X) to (X 1.5) 3 to 20 X 1.5 L1 = Keyway dimensions L3 = X = 40 2 4 x 4 x 20 30 10 (22 X to (X 2) 5 to 22 X 2 107 Series CRBU2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA31 to -XA58: Shaft Pattern Sequencing Shaft

0.4

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series Conditions CJ2 series CM2 series MB, CA2 series Tube bore x Length T0604 (O.D. 6/I.D. 4) x 1 m VQ1101 Speed controller AS3002F-06 Silencer AN15-C08 Tube bore x Length T0806 (O.D. 8/I.D. 6) x 1 m VQ2101 Speed controller AS3002F-08 Silencer AN20-C10 370 I N D E X P. 366 P. 368 P. 370 P. 372 P. 376 P. 380 Features Variations

AC

Q[l/min(ANR)] = X X 60 X C X D2 X W 4 X 106 (P2 + 0.101) 0.101 Q[l/min(ANR)] = X X 60 X 1 = 841 X 1002 X 200 4 X 106 (0.8 + 0.101) 0.101 Refer to p.1.13-2 for flow rate characteristics table. Select booster regulator size from flow characteristic stable.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) MM TC W NA P S TA ZZ WA WH 30 30 25 20 20 20 20 20 147 157 159 187 218 218 264 264 16 16 16 16 18 18 22 22 23 25 28.5 33 40.5 47.5 60.5 71 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 M5 x 0.8 M6 x 0.75

Tie-rod Type Hydraulic Cylinder

2 M12 x 1.75 139 38 6.5 118 19 27 34 14 118 90 35.5 16 13 35 35 80 32 27 14 231 90 125 34 80 M14 x 2 M27 x 2 170 38 6.5 140 19 27 34 16 140 112 35.5 16 15 35 35 100 32 27 16 247 112 160 43 100 M16 x 2 M33 x 2 197 42 9 174 22 28 38 18 174 140 45 18 17 40 38 110 36 36 18 275 140 (mm) Without rod boot With rod boot Bore size (mm) P R X Y S T V W H ZZ e f h ZZ l 40 7.5 8 1/4 37 27 8 66 207 55

33

Q = m x C x (T0 Tt) it = r x V x C x iT it = 1 x 20 x 4.2 x 103 x 12 900 = 1120 [J/s] 1120 [W] Q = m x C x (T0 Tt) it x 860 = c x V x 60 x C x iT it x 860 Cooling capacity = Considering a safety factor of 20%, 1120 [W] x 1.2 = 1344 [W] = 1 x 20 x 60 x 1.0 x 103 x 12 Thermo-chiller Q x t: Heat capacity [kJ] 15 x 860 1120 [W] 20C Water bath Cooling capacity = Considering a safety factor

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

-SYJ333 M5 x 0.8 M3 x 0.5 0.9 Type 10-SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 0.19 0.18 0.26 0.21 0.25 0.28 0.29 0.27 0.25 0.27 0.25 0.34 0.060 0.059 0.060 0.057 0.081 0.079 0.082 0.079 0.048 0.050 0.048 0.057 0.32 0.30 0.29 0.27 0.33 0.35 0.34 0.34 0.10 0.21 0.19 0.10 0.25 0.27 0.15