3 Port Solenoid Valve Series VQ100 1 For DIN rail model number, refer to page 4-12-12.
For DIN rail model number, refer to page 4-12-12.
External Connections 20 5.1 PWR: Power supply connector 20 5.2 MOT: Motor connector, ENC: Encoder connector 20 5.3 SI: Serial I/O Connector 20 (1) Connecting the teaching box 20 (2) Connection with a PC 21 5.4 IN, OUT: EtherCAT communication connector 21 6.
Thread 1 1 VXP2272-12 1 4 1 2 AC 1 VXP2382-14 2 VXP2392-20 VXP2272-32 VXP2382-40 VXP2392-50 32A 40A 50A Flange DC Note) Surge voltage suppressor is attached in the middle of lead wire.
YA 03 YA-03 YA-05 18 20 6.8 9 16 20 6 8 42 50 6.5 6.5 10 12 Applicable air cylinder bore Bore size (mm) 32, 40 50, 63 03 05 32, 40 50, 63 U V W Mass (g) Part No.
Thread 1 1 VXP2272-12 1 4 1 2 AC 1 VXP2382-14 2 VXP2392-20 VXP2272-32 VXP2382-40 VXP2392-50 32A 40A 50A Flange DC Note) Surge voltage suppressor is attached in the middle of lead wire.
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load
/1) Dimension table 1) The motor mounting plate and coupling are attached but no motor, controller, driver, motor cable and encoder cable are included. 2) Sensors must be procured by the customer. 3) For motor details, please refer to Applicable motors on page 23. 12 3 500 12 3 450 10 2 400 10 2 350 8 1 300 8 1 250 6 0 200 6 0 150 6 0 100 Stroke F E Stroke F E 20 7 900 20 7 850 18 6 800 18
(mm) D H Bore size B GA L LB GC GB C A LX LH MM NB Y X NA Z S LD 3.5 through, 6.5 depth of counterbore 4 9.5 28 8 M4 x 0.7 12 4 8 31.5 85 65 10 15 12 14 16 5 11 20 23 16 4.5 through, 8 depth of counterbore 5 5 9.5 16 15 18.3 20 16 5 11 20 26 20 8 28 M5 x 0.8 10 16 31.5 86 66 Specific Product Precautions Be sure to read before handling. Caution on mounting Caution 1.
Heavy-duty cord 3-wire (PNP) MDSUA1 12 V Relay, MDSUA3 5 V, 12 V 5 V, 12 V, 24 V Parallel cord 24 V Grommet IC circuit PLC 2-wire 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 100 V Heavy-duty cord Reed switch Parallel cord Heavy-duty cord 100 V 3-wire (NPN) 5 V, 12 V IC circuit Solid state switch Grommet 3-wire (PNP) 12 V MDSUA7 Relay, Connector Grommet Connector Grommet Connector Heavy-duty cord 2
Max. 25 TA 7 12 12 FH 12 16 16 FF 6 6 6 FC 13 17 17 FB 33 43 43 FA 46.7 67.3 67.3 EY 53.5 67 81.5 EC 6.5 8.5 9.5 EB 20 25 31 ED 60 74 94 EA 10 12 15 h 3.5 4.5 4.5 Applicable cylinder ML2B25 ML2B32 ML2B40 10-13-15 Series ML2B Dimensions Side support A MY-SA 2-G F E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.
-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700 1 VY1900 1 Input signal voltage (current) for starting the operation of a pilot valve VY1D0 (direct operated)
Opening/closing stroke 16 (32) 24 (48) 32 (64) 40 (80) Size Size Size Size 10 20 32 40 10 20 32 40 10 16 20 25 10 16 20 25 32 40 4 6 10 14 CAT.NAS100-77 Controller Step data input type for servo motor Programless type Step data input type for step motor Series LECP1 Series LECP6 Series LECA6 Control motor Control motor Control motor Step motor (Servo/24 VDC) Servo motor (24 VDC) Step motor
27 25 28 0 26 13.5 4.5 2.8 40 89 114 26.5 40 83 5.5 12 33 24 41.5 30 2 Note 1) 65 29.5 5.5 3.2 50 2.5 132 143 28 50 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 50 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 75 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185 36 75 155 9 18 40 77.5 50 74 35 9 4.6 88 12 224 3 264 43 20 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43
For DIN rail model number, refer to page 4-12-12.
A B A B 4 (5/32") 10.1 8.1 4 (5/32") 10.1 36.1 6 10.3 8.3 6 10.3 36.3 8 (5/16") 12 10 8 (5/16") 12 37 1/4 10.3 8.3 1/4 10.3 36.3 PFM S-01/02--X693 PFM S-01/02--X694 7 5 7 5 10.2 10.2 (34.2) 43 1 43 1 A PFM A 51.5 (Max. 58.5) 51.5 (Max. 58.5) PFMV IN OUT 3 (34.2) PF2A 13 3 13 PF2W PF2D C 18 C 18 OUT IN B 48 20 20 48 B IF 2 x 3.4 2 x 3.4 C (Width across flats) C (Width across flats) A B A B
6 3 20 10 5 16 8 4 20 10 5 2.86 Impact resistance/vibration Resistance [m/s2] Note5) 50 / 20 50 / 20 50 / 20 Ball screw Drive method Ball screw and Belt [1:1] / Ball screw Ball screw and Belt [1.25:1] Ball screw Ball screw and Belt [4:7] Guide type Sliding bush (Piston rod part) Sliding bush (Piston rod part) Sliding bush (Piston rod part) Operating temperature range [] 5 to 40 5 to 40 5
Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to
(same side) (n 4) 2 (n 4) 2 25 + 55 135 + 55 125 + 55 BT-12 BT-12 BT-16 F5W/J59W/ F5BAL/F5F n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 pcs.(different side, same side), 1 pc. D-F5W, J59W D-F5BAL D-F59F D-F5NTL 155 35 145 D-A3/A4/G39/K39 BS1-125 BS1-140 BS1-160 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 35 + 55 145 + 55 "n" pcs.