Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

3 Port Solenoid Valve/

Thread Rc G NPT Nil None V V V A Yes 8 V B 5/16" V Port size 06 3/4" 10 1" * For internal pilot, the symbol is nil. * Refer to Piping for External Pilot Type on page 20 for selection of the check valve. Made to Order Series Compatible with Secondary Batteries 1 For details about 25A-, refer to the WEB catalog Series Compatible with Secondary Batteries/Series 25A-.

IZD10_eng

Installation distance mm Min. installation interval mm Object that is not to be measured Sensor head Charged object 10 20 20 40 Installation distance 25 45 30 55 40 65 50 75 60 90 Min. installation interval 70 100 75 105 Electrostatic sensor is affected by electric field or electromagnetic field due to its operation principle.

Series LQ3 High Purity Fluororesin Fitting

W M L H E W M 10 14 18 22 30 36 14 20 25 29 37 49 46.5 57 79 88 103 122 11 16 21 24 32 41 10 17 22.5 24.5 27 30 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3U1A LQ3U2A LQ3U3A LQ3U4A LQ3U5A LQ3U6A 1/4 (E) (E) L

Antistatic Tubing TA  Series

Flexible tubing KM 20 m roll 100 m reel TAU1208 TAU3220 TAU0425 TAU0604 TAU0805 TAU1065 Model KF Tubing O.D. (mm) 12 3.2 4 6 8 10 Tubing I.D.

Digital Pressure Switch

For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time. Insufficient warm-up time Product failure Replace the product. -69No.PS-OMU0003-D Problem No.

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

acceleration/deceleration [mm/s2] Horizontal 5000 Vertical 0.02 Basic type Positioning repeatability [mm] 0.015Lead H0.02 High precision type 0.1or less Basic type Lost motion[mm] note3) 0.05or less High precision type 10 5 20 12 6 24 16 8 30 20 10 lead [mm] Impact/Vibration resistance [m/s2] note4) 50 / 20 Ball screw (LEFS), Ball screw + Belt (LEFSR Actuation type L) Guide type Linear Guide

ＳＭＯＯＴＨ ＣＹＬＩＮＤＥＲ

Specifications Fluid Air Proof pressure 1.05MPa Maximum operating pressure 0.7MPa 12, 16 0.03MPa Minimum operating pressure 20 ~ 40 0.02MPa 50 ~ 100 0.01MPa -10 ~ +70 C, Built-in magnet type: -10 ~ +60 C (with no freezing) Ambient and fluid temperature Lubricant Non-lube (Do not lubricate) CM2YCG1YCA2Y +1.4 0 Stroke length tolerance (mm) CQSYCQ2Y +1.0 0 Cushion Rubber bumper (none for CA2Y

MHC2

MHC2-16 MHC2-10 MHC2-20 MHC2-25 !8 !9 NBR MHC10-PS MHC16-PS MHC20-PS MHC25-PS Seal kit @0 @1 2.6-5

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40 CY1S Series

Bumper bolt (resin tipped): Mounted on both sides Nil Bore size 6 10 15 20 25 32 40 Bumper bolt (Same as the opposite side) 6 mm Port thread type Adjustment bolt (Same as the opposite side) 10 mm Bore size (mm) Symbol Type 15 mm Shock absorber/ Adjustment bolt (metal ended): Mounted on both sides 6,10,15 M thread B 20 mm Nil Rc 25 mm TN TF 20, 25, 32, 40 NPT 32 mm Shock absorber (Same as

LX Series Compact Electric Actuators

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 i Slide Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

) L n 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 389 759 352 722 315 685 278 648 L1 L2 L3 L4 L5 241 611 204 574 167 537 130 500 93 463 56 426 379 749 342 712 305 675 268 638 231 601 194 564 157 527 120 490 83 453 46 416 412.5 775 375 737.5 337.5 700 300 662.5 261.5 625 225 587.5 187.5 562.5 150 525 112.5 487.5 75 450 423 785.5 385.5 748 348 710.5 310.5 673 273 635.5 235.5 598 198

How to Order ø 6, ø 8, ø 12, ø 16, ø 20, ø 25 MXQ  A Series Air Slide Table Double-ported Type

Port Switch mounting groove 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Because piping ports and auto switch grooves are provided on both sides, only the adjuster part of the centralized adjuster is symmetric.

Electro-Pneumatic Positioner Series IP8000/8100

to 60C Non-explosion proof (non hazardous Iocations only) 20 to 80C The positioner body is EXd2BT5 labeled.

LEC-OM032xx

ID 14 Pushing force 1 0 to 30 10% 15 Trigger LV 1 0 to 30 10% 16 Pushing Numerical data speed 1 0 to 255 mm/s ID1 input 17 Positioning Data writing thrust 1 0 to 30 10% 18 H 19 L In pos 2 0 to 65500 0.01mm ID2 20 to 39 Same as ID1 ID3 40 to 59 Same as ID1 ID4 60 to 79 Same as ID1 ID5 80 to 99 Same as ID1 ID6 100 to 119 Same as ID1 ID7 120 to 139 Same as ID1 ID8 140 to 159 Same as ID1 ID9

LECA6_C

CPU CPU CPU 1-198 CPU E 1 SV1.00 RESETSVONSETUP 52 - 13. / A () (50mm ) () () 5m 5m 10% 15m 20% 53 - 14 / 141.

PSE200

Never use pressure sensors in the presence of inflammable or explosive gases. 20 Series PSE Specific Product Precautions 2 Be sure to read before handling. Refer to pages 17 through 19 for general safety instructions and common precautions, and to pages 20 through 22 for specific product precautions.

Air Pilot Operated

28 'Vacuuh to 30o FSIG (20 Kglrcm?).

Air Pilot Operated Series NVSA

28 'Vacuuh to 30o FSIG (20 Kglrcm?).