IDX-OM-U021

P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm 2 M3

VQZ100V-OMT0001

No. 1 1 1 1 1 M3 M3 M3 M3 1/4 0.4~0.5Nm 1) 1) 1) 1) [ [ [ [ ] ] ] ] 1 ()ISO VG32 (MSDS) [ [ [ [ ] ] ] ] 1 ()ISO VG32 2 ()ISO VG32 (MSDS) 6 No.VQZ100V-OMT0001 VQZ VQZ VQZ VQZ 3 3 3 3 5 5 5 5 / / / / , ( ( ( ( ) ) ) ) 5m ( ( ( ( ) ) ) ) 3 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 IP65 (IEC60529) IP65 7 No.VQZ100V-OMT0001 VQZ Series/ / / / L L L L /M /M /M /M ()() VQZ100 VQZ100 VQZ100

VP300-OMP0001

No. 1 1 1 1 1 M3 M3 M3 M3 1/4 0.4~0.5Nm 2 2 2 2 M5 M5 M5 M5 1/6~1/4 1~1.5Nm 1) 1) 1) 1) ISO VG32 (MSDS) 6 No.VP300-OMP0001 VP Series VP Series VP Series VP Series 3 3 3 3 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 30 () 1 ()ISO VG32 2 ()ISO VG32 IP65 (IEC60529) IP65 7 No.VP300-OMP0001 VP Series VP Series VP Series VP Series/ / / / L L L L /M /M /M /M 3.2~3.7mm () (+-) () (1mm

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 84 25 21 98 30 24 111 46

HRX-OM-Z002

Refer to Table 5-11. Make a selection with the [] [] keys and press the [SEL] key to apply the setting.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

LTF8PH100LTF8PH200LTF8PH300LTF8PH400LTF8PH500LTF8PH600LTF8PH700LTF8PH800LTF8PH900LTF8PH-1000100 200 300 400 500 600 700 800 900 2 3 4 5 6 7 8 9 10 11 1000 Positioning Time Guide Positioning time A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.5 sec.) Maximum acceleration: 3000 mm/s2 Positioning time (sec.)

CYP_EN

Applicable grease pack Grease pack Weight GR-X-005 5 g 10/11 10-1. Model Selection 1 11/11 10-2.

2/3 Port Solenoid Valve for Chemicals

N.C. 3 2 1 11 11 IN port 3 x M6 x 1,1/4-28UNF OUT port (LVM13R,14R) 6 Plug (2) 5 11 6 2 (COM) port (LVM115) Plug (LVM16R) 10 1 (N.C) port 3 (N.O) port 13 For LVM115 2 x M3 Thread length 5 The broken lines indicate the bracket type. For direct mounting 6 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SLOVENIA SMC Industrijska Avtomatika d.o.o.

Manifold Specifications

DIN Rail Manifold DIN Rail Manifold Common SUP/Common EXH Note) For more than 11 stations, supply air to both sides of 1(P) port and exhaust air from both sides of 3(R) port.

Line Filter

P A B C D G J M N Q R S T U V B AFF50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AFF60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

N.C. 3 2 1 11 11 IN port 3 x M6 x 1,1/4-28UNF OUT port (LVM13R,14R) 6 Plug (2) 5 11 6 2 (COM) port (LVM115) Plug (LVM16R) 10 1 (N.C) port 3 (N.O) port 13 For LVM115 2 x M3 Thread length 5 The broken lines indicate the bracket type. For direct mounting 6

240

2 16 Step motor (Servo/24 VDC) 392 Electric Actuator Miniature Slide Table Type LEPS Series Step Motor (Servo/24 VDC) Dimensions LEPS6 D C B A 3.5 4 5.2 LEF 19 LEJ LEL ( ) +0.025 0 ( ) +0.025 0 2.5H9 depth 2.5 2.5H9 depth 2.5 2 x M4 x 0.7 thread depth 8 LEM LEY 4 x M4 x 0.7 thread depth 6 20 11 19 LES J 25 11 LEPY LEPS LEPY LEPS LER Table operating range Note 1) LEH Motor cable length 300

LEJ-OM004xx

LEJ-OM00401 PRODUCT NAME Electric Actuator / Slider Type AC Servo Motor For Clean Room Ball Screw type MODEL / Series 11-LEJ Series The description of this manual is only a peculiar content to "11-LEJS For Clean Room". Please match and confirm the manual of each model to a detailed content of the product.

MIST SEPARATOR

SPECIFICATIONS OF BOWL ASSEMBLY 11-18 10. REPLACEMENT PROCEDURE 19-22 11. DISASSEMBLY DRAWING 23 12. DIMENSIONS 24 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

33

Note 11) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher. 200 A Thermo-chiller Basic Type HRSE Series Note 1) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher.

Air Slide Table ø 4, ø 6, ø 8 Series MXJ

Clean Series 11 Standard model no. MXJ Clean Series 11: Vacuum type External dimensions are identical to the standard model.

IDX-OM-W093

R .11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 12-5 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDF60/70/80/90 Series IDX-OM-W093 1 1.1 () 6.2 1.1.1 3 IDF60/70/80/90 Series 1-1 IDX-OM-W093 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDF60/70/80/90 Series 1-2 IDX-OM-W093 1.2.4 IDF60/70/80/90

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, MJ, SS5YJ3 BASE MT .12953 lb, .12953 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, MJ, SS5YJ3 BASE MT .12953 lb, .12953 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, MJ, SS5YJ3 BASE MT .12566 lb, .12566 lb